CHP_SOP_sputter_coater

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Appendix C
UF CHP Standard Operating Procedures (SOPs)
This form needs to be kept on file within the laboratory. Do not send it to EH&S.
Principal Investigator:
Building:
Dr. Jacob L. Jones
Rhines Hall
Dept.:
Materials Science
and Engineering
Room(s):
270
This SOP must be kept on file for lab staff training and review. It will be reviewed
annually for accuracy.
Date:
Review date(s):
11/22/2006
11/22/2006
Revision date(s): 11/22/2006
By:
The individual responsible for the Chemical Hygiene Plan in this area is:
Dr. Jacob L. Jones
Chemicals are stored in:
Gas cylinder
Chemicals are safely transported by the following means:
Appropriate carts for transport of cylinders.
In the event of an accident or other emergency, the following shall be done:
In case of heavy leakage of gas from the Argon gas cylinder, evacuate the area
and call appropriate safety personnel.
In case of electrical emergencies, immediately shut off the sputter coater.
This is a list of our emergency equipment:
N/A
The following are the spill control and decontamination procedures:
N/A
The following are the waste disposal procedures:
When the argon cylinder is empty, call the supplier to take away the cylinder.
1.
Standard Operating Procedure for the activity:
2. Chemical(s) Used
Argon
5.
3. Hazard Class
0
lab coat or proper safety shirt and pants
protective eyewear
Engineering Controls required for this activity:
Release valve on the Argon tank
7.
Can cause asphyxia if
released in large amount in
confined area.
Personal Protective Equipment required for this activity:
Nitrile gloves
6.
4. Health Hazards
Other precautions required for this activity:
N/A
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