Supplementary materials for:
Occupational Exposure to Airborne Nanomaterials: An Assessment of Worker Exposure to Aerosolized Metal
Oxide Nanoparticles in Semiconductor Wastewater Treatment
Journal of Occupational and Environmental Hygiene
Sara A. Brenner, MD, MPH;*1 Nicole M. Neu-Baker, MPH;1 Cihan Caglayan;2 Igor G. Zurbenko, PhD2
1
State University of New York (SUNY) Polytechnic Institute, College of Nanoscale Science, Nanobioscience
Constellation, 257 Fuller Road, Albany, New York, 12203, United States
2
Department of Epidemiology and Biostatistics, School of Public Health, University at Albany, State University
of New York, 1 University Place GEC, Rensselaer, New York, 12144, United States
*Corresponding author: Sara A. Brenner, MD, MPH; sbrenner@sunycnse.com; p: 518-956-7224; f: 518-4378687. State University of New York (SUNY) Polytechnic Institute, College of Nanoscale Science,
Nanobioscience Constellation, 257 Fuller Road, Albany, New York 12203, United States
1
FIGURE 1S. WWT system schematic
FIGURE 2S. Selected time series plots for the background and task (SMPS; 2/22/14)
These plots show the background and task (acid and base filter changes) number concentration measurements in
time from the SMPS for the 4/22/14 collection event. Background levels remain fairly stable over time with the
exception of the smallest size channels, which increase. The task shows a substantial increase in number
concentration in most size channels delayed approximately 20 minutes after starting of a task.
2
FIGURE 3S. Selected exceedance plots for the background and task (SMPS; 2/22/14)
These plots show the background and task (acid and base filter changes) number concentration exceedances
from the SMPS for the 4/22/14 collection event. The vertical scale displays concentrations of particles of
different sizes in specific SMPS measurement. Horizontal scale displays proportion values of exceedance of
given concentration for specific size channel. Levels in most size channels were higher during the task than
during the background.
TABLE 1S. SMPS data summary
Description
N
02/05/2013
Acid Filter Change
20,62
02/05/2013
Base Filter Change*
11,62
10/08/2013
Acid Filter Change**
7
Channel
11.5nm
15.4nm
20.5nm
27.4nm
36.5nm
48.7nm
64.9nm
86.6nm
115.5nm
154nm
205.4nm
273.8nm
365.2nm
11.5nm
15.4nm
20.5nm
27.4nm
36.5nm
48.7nm
64.9nm
86.6nm
115.5nm
154nm
205.4nm
273.8nm
365.2nm
11.5nm
15.4nm
20.5nm
27.4nm
36.5nm
Min, Max
197.92,407.90
511.07,857.04
548.89,763.89
764.05,937.32
802.03,896.10
632.13,758.67
429.75,547.00
246.77,417.30
114.21,312.53
62.75,167.04
0,54.13
0,40.80
0,13.10
231.70,347.25
445.59,558.89
441.58,568.41
783.60,846.00
828.98,918.47
657.90,739.24
402.31,524.22
282.17,389.07
183.75,293.25
89.61,169.79
0,57.37
0,0
0,0
637.01,825.04
2427.10,2869.56
2636.79,2994.44
2494.13,2597.54
1353.31,1518.16
Task
Mean
292.07
637.15
646.64
847.97
852.33
687.72
486.01
353.97
245.04
125.16
19.11
2.04
0.66
299.32
502.26
516.50
815.51
868.36
696.95
471.16
337.12
239.53
129.72
25.54
0
0
699.62
2584.50
2760.54
2534.26
1413.55
Median
291.52
626.48
632.65
847.35
848.64
683.12
482.10
352.15
249.38
128.28
14.47
0
0
309.06
506.64
521.60
808.37
858.67
693.61
477.17
337.09
238.42
125.96
19.49
0
0
688.14
2591.21
2775.15
2519.59
1412.88
Background
Min, Max
Mean
114.51,412.11
238.40
493.04,1681.76
871.09
639.63,1872.44
1002.54
801.64,1837.42
1113.53
792.94,1371.70
938.08
477.02,765.48
636.04
232.21,582.68
393.58
211.62,403.62
300.35
183.42,348.16
245.96
52.06,253.70
151.27
0,94.92
37.25
0,0
0
0,0
0
Median
237.41
851.20
958.00
1064.73
908.67
629.72
394.79
301.08
243.07
144.38
36.31
0
0
Task - Background
Task/Background
53.67
-233.94
-355.90
-265.56
-85.75
51.67
92.43
53.61
-0.92
-26.11
-18.15
2.04
0.66
60.92
-368.83
-486.04
-298.02
-69.72
60.90
77.57
36.77
-6.42
-21.55
-11.72
0
0
1.23
0.73
0.64
0.76
0.91
1.08
1.23
1.18
1.00
0.82
0.51
1.26
0.58
0.51
0.73
0.93
1.10
1.20
1.12
0.97
0.86
0.69
-
3
10/08/2013
Base Filter Change**
9
02/24/2014
Acid and Base Filter Change
12,24
Description
N
04/22/2014
Acid and Base Filter
Change
33,60
04/30/2014
Extended Background
111
48.7nm
64.9nm
86.6nm
115.5nm
154nm
205.4nm
273.8nm
365.2nm
11.5nm
15.4nm
20.5nm
27.4nm
36.5nm
48.7nm
64.9nm
86.6nm
115.5nm
154nm
205.4nm
273.8nm
365.2nm
11.5nm
15.4nm
20.5nm
27.4nm
36.5nm
48.7nm
64.9nm
86.6nm
115.5nm
154nm
205.4nm
273.8nm
365.2nm
198.09,324.37
0,0
0,0
291.50,385.98
379.78,424.58
156.95,208.21
0,0
0,0
388.94,713.14
1972.51,2441.35
2488.41,2645.57
2634.34,2967.16
1673.14,2049.37
431.10,631.89
0,0
0,0
219.55,331.53
347.12,400.53
179.62,241.22
0,0
0,0
128.64,290.12
160.88,332.36
113.20,190.26
141.49,267.32
182.45,268.04
123.91,217.20
86.86,184.41
136.26,188.16
113.24,195.23
67.50,155.24
18.41,55.52
0,0
0,0
Channel
11.5nm
15.4nm
20.5nm
27.4nm
36.5nm
48.7nm
64.9nm
86.6nm
115.5nm
154nm
205.4nm
273.8nm
365.2nm
11.5nm
15.4nm
20.5nm
27.4nm
36.5nm
48.7nm
64.9nm
86.6nm
115.5nm
154nm
205.4nm
273.8nm
365.2nm
Min, Max
89.26,375.23
165.95,439.22
58.57,269.93
123.91,291.79
305.14,426.68
501.41,650.56
633.93,877.03
615.97,940.36
416.32,744.71
158.37,355.19
0,8.51
0,0
0,0
247.21
0
0
341.38
401.08
176.92
0
0
522.51
2111.79
2557.40
2770.11
1800.08
511.12
0
0
254.98
373.41
204.46
0
0
226.30
271.48
144.43
220.50
229.62
181.89
145.89
159.64
161.48
111.79
33.73
0
0
Task
Mean
172.45
247.35
130.26
190.17
366.20
575.66
715.79
704.15
510.86
221.47
0.32
0
0
239.86
0
0
337.43
396.56
175.74
0
0
502.50
2056.94
2576.66
2758.36
1786.99
512.77
0
0
253.77
376.00
200.72
0
0
254.27
282.57
147.37
220.40
236.20
192.94
150.93
157.21
165.64
112.04
27.57
0
0
Median
141.14
232.07
110.33
188.20
362.27
572.42
697.87
672.49
478.89
210.39
0
0
0
98.75,187.86
127.74,225.62
84.57,177.14
150.33,235.11
150.76,229.39
106.05,214.77
82.45,179.80
106.48,186.97
62.83,200.11
29.05,138.08
6.97,45.57
0,14.76
0,8.54
122.47
179.11
135.46
191.21
190.89
154.92
130.40
138.60
133.84
91.49
30.78
0.82
0.36
115.43
176.06
130.05
188.37
189.46
148.22
122.74
134.55
134.33
92.75
31.50
0
0
Background
Min, Max
Mean
39.06,383.63
181.51
57.37,294.07
148.32
5.29,96.87
54.18
101.85,293.05
222.05
314.78,607.35
443.22
438.42,805.59
613.28
501.37,805.03
674.74
468.18,767.38
609.75
223.67,585.08
410.87
51.24,233.42
156.26
0,1.62
0.03
0,0
0
0,2.35
0.04
67.91,331.94
174.34
119.49,289.72
185.22
73.05,204.66
115.81
140.78,354.15
212.78
146.18,386.47
240.85
109.61,326.49
191.10
81.66,230.70
125.92
59.47,144.16
96.85
28.04,141.97
79.47
17.90,95.47
49.91
0,39.00
13.70
0,9.70
0.68
0,1.52
0.01
Median
170.59
156.28
54.53
222.35
439.02
614.29
686.72
616.65
200.18
154.57
0
0
0
171.01
181.19
111.03
204.97
231.65
188.04
122.01
97.30
79.86
49.30
13.49
0
0
103.83
92.37
8.96
29.29
38.73
26.98
15.49
21.04
27.64
20.29
2.95
-0.82
-0.36
Task Background
-9.06
99.03
76.08
-31.87
-77.02
-37.62
41.05
94.40
100.00
65.20
0.29
0
-0.04
1.85
1.52
1.07
1.15
1.20
1.17
1.12
1.15
1.21
1.22
1.09
-
Task/Background
0.95
1.67
2.40
0.86
0.83
0.94
1.06
1.15
1.24
1.42
11.86
-
*Background data is only listed with the first task for that day
**No background data available on this day from the SMPS
Table 1S is the data summary for all collection events in 2013 and 2014 to date for which there is SMPS data.
Values are reported in particle number concentration, number of particles per centimeter squared. For days on
which the collection event consisted of both a background and task measurements, tasks measured generally
higher than backgrounds.
4
TABLE 2S. OPC data summary
Description
02/24/2014
Acid and Base
Filter Change
N
Channel
Min, Max
3724,5132
289,500
58,166
53,230
42,284
5,81
7961,10603
445,705
99,181
73,176
27,177
1,77
34,61
Task
Mean
4601.03
406.97
121.06
134.79
149.29
37.74
9011.49
553.55
134.34
105.98
62.54
11.48
0.3-0.5um
0.5-0.7um
0.7-1.0um
1.0-2.0um
2.0-5.0um
>5.0um
04/22/2014
89,164
0.3-0.5um
Acid and Base
0.5-0.7um
Filter Change
0.7-1.0um
1.0-2.0um
2.0-5.0um
>5.0um
04/30/2014
301
0.3-0.5um
Extended
0.5-0.7um
Background
0.7-1.0um
1.0-2.0um
2.0-5.0um
>5.0um
*Background data is only listed with the first task for that day
Median
4669.5
413
120
132.5
158
34
8936
552
134
101
56
8
Background
Min, Max
Mean
3517,4937
4396
303,465
383.77
78,161
113.93
62,180
117.84
31,193
110.66
1,48
21.97
6456,10012
8136.05
503,892
678.27
120,257
180.65
77,240
143.09
31,212
63.07
0,52
6.05
1422,4145
2062.90
117,518
201
33,188
66.43
27,245
56.10
4,317
26.41
0,86
3.03
Task - Background
Task/Background
205.03
23.20
7.12
16.96
38.64
15.77
875.45
-124.72
-46.31
-37.11
-0.53
5.43
1.05
1.06
1.06
1.14
1.35
1.72
1.11
0.82
0.74
0.74
0.99
1.90
Median
4416
383
114
120
117
23
8137.5
674.5
179.5
138.5
57
5
1962
192
62
52
20
1
Table 2S is the data summary for all collection events in 2014 to date for which there is OPC data. Values are
reported in particle number concentration, number of particles per centimeter squared. Device issues in the
field resulted in a lack of OPC number concentration data for 2013. The task on 2/24 measured higher than the
background in all channels. The task on 4/22 measured higher than the background in some size channels (0.30.5, >5.0) and lower in the rest of the size channels. The values for the extended background were lower in all
channels that previous background measurements.
TABLE 3S. CPC data summary
Description
N
Task
Min,Max
5965,9603
Mean
8082.13
02/05/2013
1255,3808
Acid Filter Change
02/05/2013
663,3808
4615,8461
7359.50
Base Filter Change*
10/08/2013
559,1049
15066,18763 17558.64
Acid Filter Change
10/08/2013
458,1049
14917,19727 18230.30
Base Filter Change*
10/08/2013
Sump Clean-Out
527,900
8905,14187
10494.87
02/24/2014
720,1385
2474,5893
4295.21
Acid and Base Filter Change
4/22/2014
1999,3600
2646,6128
4668.52
Acid and Base Filter Change
4/30/2014
Extended background
*Background data is only listed with the first task for that day
Median
8001
Background
Min,Max
2970,17834
Mean
9315.92
Median
9100
7440
17614
12242,15657
14408.05
14515
18269.5
Task-Background
Task/Background
-1233.79
.87
-1956.42
.79
3150.59
1.22
3822.25
1.27
10246
4437.5
6287,12740
2241,3899
9265.47
2999.79
9301.50
3000
1229.41
1295.42
1.13
1.43
4677
1841,7628
3965.52
4255
703.00
1.18
1603,5209
2910.16
2778
Table 3S is the data summary for all collection events in 2013 and 2014 to date for which there is CPC data.
Values are reported in particle number concentration, number of particles per centimeter squared. In general,
tasks measured higher particle number concentration values than background measurements. Background
measurements in 2013 were taken after the task, and in 2014 this methodology was changed so that the
backgrounds were taken before the task.
5