Table of Contents Section 1 INTRODUCTION
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Table of Contents Table of Contents INTRODUCTION PART I SOLID STATE PHYSICS, ELECTRONICS AND OPTICS Section 1 Materials and Fabrication Chapter 1 7 Submicron Structures Technology and Research Professor Henry I. Smith * 1.1 1.2 1.3 1.4 * * 1.5 1.6 * 1.7 * 1.8 * 1.9 1.10 1.11 * 1.12 1.13 Chapter 2 Submicron Structures Laboratory ........................................................... 7 M icrofabrication at Linew idths of 100nm and Below ............................................................. 7 Improved Mask Technology For X-Ray Lithography .................................... 9 Study of Electron Transport in Si MOSFETs with Deep-Submicron C han n e l Le ng ths ............................................................................... ................................. 9 Studies of Electronic Conduction in One-Dimensional Semiconductor Devices .......... 10 Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 jm-Period Grating-G ate Field-Effect Transistors ............................... ................ .............................. 12 Study of Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field -Effect T ransisto rs ................................................................ ..................................... 13 Study of One-Dimensional Subbands and Mobility Modulation in GaAs/AIGaAs Q ua ntu m W ires ........................................ .................... .. ........................ ........................ 1 4 .... ................. 14 Arrays of Field-Effect-Induced Quantum Dots ............................... Planar-Resonant-Tunneling Field-Effect Transistors (PRESTFETs) ............................... 16 Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy ... ................. 17 and A tom -Beam Interferom etry ................................................................ High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical ....... ...... 17 .......... ...... .. .... Spectroscopy ..................................... Epitaxy via Surface-Energy-Driven Grain Growth ............................. ............. 18 Microstructural Evolution in Thin Films of Electronic Materials ................ 21 Professor Carl V. Thompson * * * 2.1 2.2 2.3 2.4 2.5 2.6 2.7 2.8 2.9 2.10 M odeling of M icrostructural Evolution in Thin Films ..................................................... ... Reliability and M icrostructures of Interconnects ........................... ............. Epitaxial Grain Growth ........ ...................................................... Heteroepitaxy in Lattice M ismatched Systems ............................ ............. Kinetics of Thin Film Silicide Formation ............................................................ ........... ............................. Coarsening of Particles on a Planar Substrate Thin Film Zone Melting Recrystallization of Silicon .................. ................. Capillary Instabilities in Thin Solid Film s ........................................... Focused Ion Beam Induced Deposition ..................................... ...... ............... Protective Coatings for Integrated Circuits in an In Vitro Environment ......................... Sponsored by the Joint Services Electronics Program 21 22 23 24 24 25 25 25 25 26 Table of Contents Chapter 3 Focused Ion Beam Fabrication ...................................... ..... ............... 29 Dr. John Melngailis 3.1 3.2 3.3 3.4 3.5 3.6 3.7 3.8 3.9 3.10 Chapter 4 Focused Ion Beam Fabrication ....................................... ...................... Development of Focused Ion Beam Implantation and Lithography ............................... Frequency Tunable Gunn Diodes Fabricated by Focused Ion Beam Implantation .......... NMOS Transistors with Focused Ion Beam Implanted Channel Regions ..................... GaAs MESFETs Fabricated with Focused Ion Beam Channel Implants ...................... ....................... Focused Ion Beam Exposure of Resists ................................. Focused Ion Beam Induced Deposition of Low Resistivity Gold Structures .................... Fundamental Properties of Ion Induced Deposition ......................................... ........ ....................... In-Situ Measurement of Gas Adsorption and Ion Induced Deposition ..... Focused Ion Beam Induced Deposition of Platinum ................... ............ 29 29 30 30 31 31 31 32 32 33 Chemical Reaction Dynamics at Surfaces 35 ............................................. Professor Sylvia T. Ceyer * 4.1 4.2 4.3 4.4 4.5 4.6 Chapter 5 Chemical Reaction Dynamics on Semiconductor Surfaces ....................................... Collision Induced Dissociative Chemisorption of CH 4 on Ni( 111) by Inert Gas ................... ... Atoms: The Mechanism for Chemistry with a Hammer ..................... .............................. Collision Induced Desorption ............ ...................................................... Synthesis of Benzene from M ethane The Structure and Chemistry of CH3 and CH Radicals and Isotopic Variants Adsorbed on Ni(111 ) ........................................... ....................... High Resolution Electron Energy Loss Spectroscopy of H on Ni(111) Measurement of Electron-phonon Interactions Through Large-amplitude Phonon Excitation ............................................................... 35 36 37 38 38 39 41 Professor Keith A. Nelson * * 5.1 5.2 Chapter 6 .................... 4 1 In tro d u c tio n ..................................................................... ............................... ............. 41 High Repetition-rate Signals and Resonant Responses of Crystalline Solids Chemical Beam Epitaxy of Compound Semiconductors .............................. 47 Professor Leslie A. Kolodziejski * * 6.1 6.2 6.3 Chapter 7 C hem ical Beam Epitaxy Facility ........................................................ ................................ 47 Controlled Substitutional Doping of ZnSe Grown by Chemical Beam Epitaxy ................ 49 Laser-Assisted Chemical Beam Epitaxy of Wide Bandgap Blue/Green II-VI 50 S e m ic o n d u c to rs ........................................................................................................................ High-Frequency InAIAs/InGaAs Metal-Insulator-Doped Semiconductor ...................... Field-Effect Transistors (MIDFETs) for Telecommunications 53 Professor Jesus A. del Alamo 7.1 7.2 7.3 Chapter 8 Introduction ....................................................... Experiments ....................................................... Device Results Novel Superconducting Tunneling Structures .......................................... 59 Professor John M. Graybeal S 8.1 iv Project D escription RLE Progress Report No. 132 ................................................................. .. 59 Table of Contents Chapter 9 Heterostructures for High Performance Devices 61 ...................................... Professor Clifton G. Fonstad, Jr. * * * * 9 .1 9.2 9.3 9.4 In tro d u c tio n ......................................................................... ................................................ Computer Controlled Growth of Lattice-Matched InGaAIAs Heterostructures on InP ... ............ InGaAIAs Multiple Quantum Well Heterostructures for Guided Wave Optics MBE-Grown InGaAIAs/InP Long-Wavelength Laser Diodes for Narrow ......... ........... Linew idth A pplications ................................. ................. 9.5 InGaAIAs Strained-Layer Heterostructures on 111 GaAs ............................................... ............ and InP for Optical for M odulator Applications ...................................... 9.6 Molecular Beam Epitaxial Growth on (h11) Vicinal Surfaces ............................ 9.7 Pseudomorphic AIAs/InAs/InGaAs Resonant Tunneling Structures ....................................... 9.8 Three-Terminal Quantum Well Base/Tunnel Barrier Devices 9.9 Design and Fabrication of GaAIAs Heterostructure Laser Diodes for .................................................... Monolithic Integration with Si Circuits 9.10 Microbridge Suspension of Monolithic GaAIAs Heterostructures Grown o n S i b y M B E ........................................ .......... ....... .... .. ....................................................... 9.11 Damage-Free In-Situ UHV Etching and Cleaning of Ill-V Heterostructures Using M o le c u la r Be a m s .................................................................................................................... Section 2 Optics and Devices Chapter 1 Optics and Quantum Electronics 61 61 62 63 64 65 65 66 66 67 68 71 .......................................... .......... 73 Professor Hermann A. Haus, Professor Erich P. Ippen, Professor James G. Fujimoto, Professor Peter L. Hagelstein, Dr. Santanu Basu, Dr. Jyhpyng Wang * * * * * * * * 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 1.13 1.14 1.15 1.16 1.17 1.18 1.19 1.20 Chapter 2 The Nonlinear W aveguide Interferometer ................ ...................................................... Picosecond Optical Signal Sam pling ....................................................... Nonlinear Dynamics in Active Semiconductor Waveguides ......................................... ................................... Saturation Characteristics of Semiconductor Optical Amplifiers Femtosecond Studies of Metallic and High Tc Superconductors .................................... Suppressed and Enhanced Spontaneous Emission from Microcavities ......................... ............... ..................... ..................................... New Ultrashort Pulse Laser Technology Ultrafast Processes in Waveguide Devices .................. ................................................... ............................................................ Im age Potential and Electron Dynam ics in M etals .. .... Laser M ed icine ..................................................................................................... ............................. Developmental Status of a Table-top XUV Laser at 194 Angstrom ........................ ................. ............ Status of Zig-zag Slab Laser Development W hisper Gallery M irror Design ........................................ ................... Polarizing Cavities for the Extreme Ultraviolet ........................................ Unstable Resonators for XUV Lasers ......................................... ............ ..................... Advances in Conjugate Gradient Algorithm Development ..................... ...... ................. ............. Frequency Upconversion of Extreme UV Radiation ........................................ X-ray Detectors Based on the Quantum Well Nonlinearity A Simple Line Shape Model for GaAs Multiple Quantum Wells ....................................... ........................................................................................................ Co herent Fusio n T heo ry Novel Processes and Materials for Infrared Nonlinear Optics ................ 73 74 75 76 76 77 78 80 82 83 86 88 89 90 92 93 94 96 96 98 103 Professor Peter A. Wolff, Dr. Sunny Y. Auyang 2 .1 Project Descriptio n ................................................................................ ..................... . . . 103 Table of Contents Section 3 Chapter 1 Surfaces and Interfaces 107 Statistical Mechanics of Surface Systems and Quantum-Correlated .......................................................... System s ........................................... 109 Professor A. Nihat Berker Chapter 2 Intro d uctio n........... .............................. ................................... Finite-Temperature Phase Diagram of Vicinal Si(100) Surfaces Absence of First-Order Phase Transitions in Physical Surface Systems ......................... New Orderings in Systems with Competing Interactions ........................................... 109 109 109 110 X-Ray Diffuse Scattering 111 .......................................................................... Professor Robert J. Birgeneau 2.1 2.2 2.3 2.4 Chapter 3 ...................... Intro d u ctio n ........................................................................................... .................................. ......................... M etal S urface Stud ies ................................................................................... S em iconductor S urface Stud ies ..................... ................................................ Rare Gases in Graphite Semiconductor Surface Studies ................................................................. 111 111 112 113 11 5 Professor John D. Joannopoulos 3 .1 3.2 3 .3 Chapter 4 Intro d uctio n .............................................................. ............................................ Thermal Amplitudes of Surface Atoms .............. Heteroepitaxial G row th .......................................... ....................... Ultralow Temperature Studies of Nanometer Size Semiconductor Devices 115 115 118 121 Professor Marc A. Kastner . 4.1 Chapter 5 Project Description ......................................................................................................... 121 ........................................ 123 ........................................................................................................ 123 The Quantum Hall Effect in Narrow MOSFETs Professor Patrick A. Lee * 5 .1 Chapter 6 P roject Descriptio n Epitaxy and Step Structures on Semiconductor Surfaces ....................... 125 Professor Simon G.J. Mochrie * 6 .1 Project D escription .................................................................. 125 PART II APPLIED PHYSICS Section 1 Atomic, Molecular and Optical Physics 129 Quantum Optics and Photonics 131 Chapter 1 ...................................... Professor Shaoul Ezekiel 1.1 1.2 1.3 vi Microwave Phase Dependent Optical Absorption ........................................ A New Approach to Microwave Excitation of Atomic Beams ...................................... ....................................... Stimulated Brillouin Fiberoptic Gyroscope RLE Progress Report No. 132 131 132 136 Table of Contents Chapter 2 Basic Atomic Physics ........................................ 139 Professor Daniel Kleppner, Professor David E. Pritchard * * 2.1 2.2 2.3 2.4 2 .5 Chapter 3 Experimental Study of Small Ensembles of Atoms in a Microwave Cavity .................. Rydberg Atoms in a Magnetic Field ........................................ Millimeter-Wave Measurement of the Rydberg Constant ............... ................ Precision Mass Spectroscopy of Ions ..................................... Neutra l A to m T rap ................................................................................................................ 139 143 146 148 153 Small Angle X-Ray and Neutron Scattering - Its Application to Supramolecular Solutions ........................................ 157 Professor Sow-Hsin Chen 3.1 3.2 3.3 3.4 3.5 3.6 3.7 Section 2 Chapter 1 Interlayer Diffusion in Langmuir-Blodgett Films ........................................ Thermodynamics of Protein/Surfactant Complex in Aqueous Solution and Reptation Mechanism for Protein/SDS Polyacylamide Gel Electrophorosis ......... Phase Separation in a Lipid/Water/Urea Micellar System .................... .................... Ion Distribution and Solubilization in Reverse M icelles ................... ...................... Ion Distribution around DNA Molecules ............................. ........... Structural Study of Vesicles Formed from a New Bolaamphiphile ............................. Photon Correlation Spectroscopy and Its Applications: Dynamic Transition at the Percolation Threshold of a Three-Component Microemulsion ........................... Plasma Physics Plasma Dynamics 157 158 160 160 160 161 163 165 ........................................ 167 Professor George Bekefi, Professor Abraham Bers, Professor Bruno Coppi, Professor Miklos Porkolab, Riccardo Betti, Dr. Paolo Detragiache, Dr. Ronald C. Englade, Dr. Stanley C. Luckhardt, Dr. Stefano Migliuolo, Dr. Abhay K. Ram, Dr. Linda E. Sugiyama 1.1 1.2 1.3 1.4 Section 3 Chapter 1 Relativistic Electron Beams ........................................... 167 Plasma Wave Interactions - RF Heating and Current Generation ............................... 169 Physics of Thermonuclear Plasmas ........................................ ........ .................... 181 Investigation of Electron Cyclotron Resonance Plasma Production in the Versator 11Tokamak ......... ..... ............................... 191 Electromagnetics Electromagnetic Wave Theory and Applications 195 ...................................... 197 Professor Jin Au Kong, Dr. Sami M. Ali, Dr. Robert T. Shin, Dr. Ying-Ching E. Yang * 1.1 1.2 1.3 1.4 1.5 1.6 1.7 Electromagnetic Waves in M ultilayer Media ......................... ............... Rem ote Sensing of Earth Terrain ............................................................................. Remote Sensing of Sea Ice ......... ................................... SAR Image Interpretation and Simulation .......................... .............. M icrowave and M illimeter W ave Integrated Circuits ................................ ......... High-Speed Integrated Circuit Interconnects ........................... ................. ILS/MLS Frequency Management Assessment ........................................ 197 202 208 212 215 218 220 Table of Contents Section 4 Chapter 1 223 Radio Astronomy Radio Astronomy 225 ........................................ Professor Bernard F. Burke, Professor David H. Staelin, Professor Jacqueline N. Hewitt, Dr. Philip W. Rosenkranz 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 ........................ ................. Galactic and Extragalactic Research ................. ................ .............................. Gravitational Lens Search ............................................................ ................ Orbiting VLBI Development of an Undergraduate Laboratory ........................................ Radio Interferom etry of Nearby dM e Stars ......................................................................... Gravitational Lenses as Astrophysical Laboratories ...................................................... Tiros-N Satellite Microwave Sounder ......... ........................... Long- Baseline Astrometric Interferometer ................ ............................................... ........................................ Nonthermal Radio Emission from the Jovian Planets High-Resolution Passive Microwave Imaging of Atmospheric Structure .................... .................. .. ................................................. Characterization of Dolphin W histles .................................... Rapid Precision Net-Form Manufacturing PART III SYSTEMS AND SIGNALS Section 1 Digital Signal Processing Chapter 1 Signal Processing Research Program 225 225 229 230 231 231 231 232 232 233 234 234 239 ...................................... 241 Professor Alan V. Oppenheim 1 .1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 1.13 1.14 1.15 Chapter 2 ..... ... ................ . ............... In tro d u ctio n .......................... ........... ................... ..................... Algorithmic Fault Tolerance in Digital Signal Processing Active Noise Cancellation Using the EM Algorithm ........................................ Iterative Maximum Likelihood Time Delay and Doppler Estimation Using . ...... S tatio n a ry S ig n a ls ................................................................................................... ....... Estimation and Correction of Geometric Distortions in Side-Scan Sonar Images ............ ..................... An Algorithm Design Environment for Signal Processing Compiling Signal Processing Algorithms into Architectures ............... .................. ... .............. .................... Vector Quantization with Adaptive Structured Codebooks The Application of Complex Approximation Algorithms to the Design ........................................ of Robust Range-Dependent Beamformers ......... Analysis and Applications of an Adaptively Trained Recurrent Neural Network ....................................... A Code-Division, Multiple Beam Sonar Imaging System ...................... ................... Back-projection with Fourier Series Expansion and FFT Iterative Algorithms for Parameter Estimation from Incomplete Data and ..... ................................... Their Applications to Signal Processing Equalization (Identification) of Non-Minimum Phase Systems .................................... Signal Processing with 1/f Processes Using Wavelets .................................. 24 1 241 243 Speech Processing Research Program 253 ...................................... 24 4 245 245 246 247 249 249 250 250 251 251 252 Professor Jae S. Lim 2 .1 2.2 2.3 2.4 2.5 2.6 viii In tro d u ctio n ............................................................................................................................. ................. Development of a 1.5 Kbps Speech Vocoder ......................... ....................................... A New Method for Representing Speech Spectrograms A Dual Excitation Speech Model ........................................ .................... Image Texture Modeling ....................... Speech Enhancement Techniques for the Dual Excitation Vocoder Model ................. RLE Progress Report No. 132 253 253 254 254 255 255 Table of Contents Chapter 3 Advanced Television Research Program ...................................... 257 Professor Jae S. Lim, Professor William F. Schreiber 3.1 3.2 3.3 3.4 3.5 3.6 3.7 3.8 Advanced Television Research Program .............................................. 257 Adaptive Amplitude Modulation for Transform Coefficients .................................... 258 Transform Coding for High Definition Television ....................... ................... 259 Filter Design for Multirate Filter Banks .................................... 260 Adaptive Spatiotemporal Filtering ................................................. 260 Signal Processing for Advanced Television Systems ................................... 261 Adaptive Frequency Modulation for Satellite Television Systems ................................ 261 Subband Coding for Channel-Compatible Transmission of High-Definition T elevisio n ............... .......................................................................................... . . . . . . .. 26 2 3.9 Channel Equalization and Interference Reduction Using Adaptive Amplitude Modulation and Scrambling ........... .......................................... 263 3.10 A Novel QM F Design Algorithm ...................................... ........................ ............ 264 Chapter 4 Computer-Aided Fabrication System Structure ......................................... 265 Professor Donald E. Troxel 4 .1 4.2 Chapter 5 Intro d uctio n .............................................................................................................. Computer-Aided Fabrication Environment ............................................. Optical Propagation and Communication ..... . ................................................... 265 265 267 Professor Jeffrey H. Shapiro, Dr. Robert H. Rediker, Dr. Ngai C. Wong 5.1 5.2 5.3 5.4 5.5 Chapter 6 Intro d uctio n .............................................................................. ..................... Squeezed States of Light .......................................... Laser Radar System T heory .............................................................................. Fiber-Coupled External-Cavity Semiconductor High Power Laser ............................ Analog Processing of Optical Wavefronts Using Integrated Guided-Wave Optics ....... 267 267 269 271 272 Custom Integrated Circuits ........................................ 275 Professor Jonathan Allen, Professor John L. Wyatt, Jr., Professor Srinivas Devadas, Professor Jacob White * 6.1 6.2 6.3 6.4 6.5 6.6 6.7 6.8 6.9 Chapter 7 Custom Integrated Circuits ........................................... T he V isio n Ch ip Project .................................................................... ....................... Techniques for Logic Synthesis, Testing and Design-for-Testability ............................ M ixed Circuit/D evice S im ulation .............................................................. Circuit Simulation Algorithms for Specialized Applications ....................................... Numerical Simulation of Short Channel MOS Devices ................... ...................... Efficient Capacitance Extraction Algorithms ........................................ Parallel N um erical A lgorithm s ........................................ Integrated Circuit Reliability .......................................... 275 279 283 288 289 290 291 292 292 Neurophysiology and Neural Computation 295 ...................................... Professor Jerome Y. Lettvin 7.1 7.2 Abstracts of Doctoral Dissertations ................................................ Abstract of M asters Thesis ......................... ............................................. 295 296 Table of Contents PART IV LANGUAGE, SPEECH AND HEARING Section 1 Speech Communication Chapter 1 Speech Communication 299 ............................................................................... 301 Professor Kenneth N. Stevens, Dr. Joseph S. Perkell, Dr. Stefanie Shattuck-Hufnagel 1 .1 1.2 1.3 1 .4 1.5 1.6 1 .7 Section 2 Chapter 1 1 .1 1 .2 1 .3 1.4 1.5 1 .6 1 .7 Section 3 Chapter 1 1 .1 1.2 1 .3 1.4 1.5 1.6 1.7 1.8 1 .9 1.10 x ........................................................................ Introd uc tio n ..................................................... Studies of the Acoustics, Production and Perception of Speech Sounds .................. Studies and Models of the Perception and Production of Syllables, W o rd s, a n d S e n ten ces ........................................................................................................... ... ............................................................................................. Basic S peech Physio lo gy ............................. Speech Production of Cochlear Implant Patients Phonatory Function Associated with Misuse of the Vocal Mechanism .................... .............................................................................................................. C o m p u te r Fa c ilitie s 30 2 302 Sensory Communication 313 Auditory Psychophysics and Aids for the Deaf .......................................... Professor Louis D. Braida, Nathaniel I. Durlach, Dr. William M. Rabinowitz, Dr. Charlotte M. Reed, Dr. Patrick M. Zurek 315 In tro d u c tio n ............................................................................................................................. B in a u ra l He a rin g ..................................................................................................................... Hea rin g A id Rese arc h ............................................................................................................ ....................................... Tactile Communication of Speech ......................................... Multimicrophone Hearing Aids ............................................................................................................. Coc h le a r Prosth ese s ..................................................................................................................... Ha n d Fun c tio n 3 15 315 315 315 315 3 16 3 16 Auditory Physiology 319 3 06 309 310 310 311 321 Signal Transmission in the Auditory System ................................................ Professor Lawrence S. Frishkopf, Professor Nelson Y.S. Kiang, Professor William T. Peake, Professor William M. Siebert, Professor Thomas F. Weiss, Dr. Bertrand Delgutte, Dr. Donald K. Eddington, Dr. John J. Guinan, Dr. Robert A. Levine In tro d u c tio n ............................................................................................................................. .............................. Signal Transmission in the External- and Middle-Ear ......................................................................................................... Co c h lear M ec h an ism s ............... .................................. Regeneration of Primary-Auditory Neurons In Vitro .................................. Stimulus Coding in the Auditory Nerve ............................................. M iddle-Ear M uscle Reflex .............................................. Cohlear Efferent System ................. The Generators of the Brainstem Auditory Evoked Potential ............... ................................................................................................ ......... Co c hle ar Im p la nts Anatomical Basis for the Relationships between Binaural Hearing and Brainstem .............. ...................... Auditory Evoked Potentials in Humans RLE Progress Report No. 132 321 321 3 24 325 326 327 328 329 330 331 Table of Contents Section 4 Chapter 1 Linguistics Linguistics 335 ........................................ 337 Professor Noam Chomsky, Professor Morris Halle 1.1 1.2 Introd uctio n ................................... Abstracts of Doctoral Dissertations ... ................ .... ................. . ...... ............................................................................ 337 337 APPENDICES Appendix A RLE Publications and Meeting Papers A.1 A.2 A.3 A.4 A.5 A.6 A.7 A .8 A.9 A .10 ...................................... 343 Meeting Papers Presented ............................................. 343 Published Meeting Papers .......................................................... 350 Meeting Papers Accepted For Publication ............................... 354 Published Journal Articles ......................................................... 355 Journal Articles Accepted for Publication ........................................ 363 Journal Articles Submitted for Publication .................................................... .. ..... 366 Books/Chapters in Books .......... .................................. 367 R LE Publications ....................................................................................................... . . 368 Theses ........................................... ................................. 369 M iscellaneous Publications ............ ..... ..................................................................... 371 Appendix B Current RLE Personnel ........................................ Appendix C RLE Research Support Index ......................................... PROJECT STAFF AND SUBJECT INDEX ................................................. 373 379 383 xii RLE Progress Report No. 132
