Table of Contents Table of Contents In t ro d uc t io n .... . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1 SOLID STATE PHYSICS, ELECTRONICS AND OPTICS PART I Section 1. M aterials and Fabrication Chapter 1. 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 1.13 1.14 Chapter 2. 2.1 2.2 2.3 2.4 2.5 2.6 2.7 2.8 Chapter 3. 3.1 3.2 3.3 3.4 3.5 3.6 3.7 3.8 Chapter 4. 4.1 4.2 4.3 Chapter 5. 5.1 5.2 5.3 5.4 ............................... ... . .... 3 5 7 .................... Submicron Structures Technology and Research . . . . . . . . . . . . . 7 Submicron Structures Laboratory . Microfabrication at Linewidths of 100nm and Below . . . . . . . . . . . . . . . . . . . . 7 . . . . .. . . 9 . . . . . . . . . .. Improved Mask Technology For X-Ray Lithography Optical Projection Lithography Using Lenses of High Numerical Aperture . . . . . . . . 10 Studies of Electronic Conduction In One-Dimensional Semiconductor Devices . . . . 10 Surface Superlattice Formation In Silicon Inversion Layers Using 0.2pm-Period Grating-Gate Field-Effect Transistors . . . . . ... . . . . . . . . . . . . . . .. . .. . . . 12 Study of Surface Superlattice Formation in GaAs/GaAIAs Modulation Doped Field-Effect Transistors ... ... . . . . ...... .. ............ ... ... 13 One-Dimensional Subbands and Mobility Modulation in GaAs/AIGaAs Quantum Wires 14 16 Study Of Electron Transport In Si MOSFETs With Deep-Submicron Channel Lengths 17 . . . ........ Crystalline Films On Amorphous Substrates . . . . . Epitaxy via Surface-Energy-Driven Grain Growth . . . .. . . . . . . . . . . . .. . . 18 Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy and Atom-Beam Interferometry ........... .. . . ............... . . . . . . 18 High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy .. . . . . . . . . . . . ......... .19 Soft X-Ray Interferometer Gratings ......... ..................... 19 Microstructural Evolution in Thin Films of Electronic Materials Grain Growth in Thin Films ............................ Modelling of Microstructural Evolution in Thin Films ............ Post-Nucleation Heteroepitaxy in Lattice Mismatched Systems Thin Film Zone Melting Recrystallization of Silicon Capillary Instabilities in Thin Solid Films Kinetics of Thin Film Silicide Formation . . . . Reliability and Microstructures of Interconnects . . . . Focused Ion Beam Induced Deposition Focused Ion Beam Fabrication . . . . . . . . 29 29 . ............ Focused Ion Beam Program ........... 29 Development of Focused Ion Beam Lithography and Patterning .. ........... Frequency Tunable Gunn Diodes Fabricated by Focused Ion Beam Implantation . . . 31 Field-Effect Transistors with Focused Ion Beam Implanted Channel Regions . . . . . . 31 . . 31 Microstructure and Properties of Gold Films Produced by Ion Induced Deposition .... 32 Focused Ion Beam Induced Depostion of Submicrometer Structures .. . . 32 . . . . . . . . . In-Situ Measurement of Gas Adsorption and Ion Induced Deposition 33 Planar Vias through Si3N4 and SiO2 Fabricated by Focused Ion Beam Implantation 35 . . . . . . . . at Surfaces . Chemical Reaction Dynamics 35 . . .. . .. . . . .. Chemical Reaction Dynamics on Semiconductor Surfaces . 35 Collision Induced Dissociative Chemisorption: Chemistry with a Hammer ........ 37 ................................... Collision Induced Desorption . Ultrashort Laser Pulse Interactions With Matter - New Effects and . . . . 39 . . . . . . . . . . . . Spectroscopic Applications . 39 . . . . . . . Impulsive Stimulated Raman Scattering of Ultrashort Pulses . 40 ............. Exciton-Phonon Interactions in Organic Molecular Crystals .... 41 . . . . . . . Phonon and Polariton Dynamics in Nonlinear Optical Crystals . 41 Coherent Excitation Through Optical Absorption of Ultrashort Pulses .. ......... Table of Contents Chapte r 6. Chemical Beam Epitaxy of Compound Semiconductors ............... Introduction 6.1 6.2 Controlled Substitutional Doping of ZnSe Grown by Chemical Beam Epitaxy...... Chapte r 7. High-Frequency InAIAs/InGaAs Metal-Insulator-Doped Semiconductor Field-Effect Transistors (MIDFET's) for Telecommunications . Chapte r 8. The Consequences of Low-Dimensionality in Oxide Superconductors Chapte r 9. Heterostructures for Optical Devices Integration of GaAIAs and InGaAIAs Multiple Quantum Well Heterostructures in 9.1 Guided Wave Optical Circuits 9.2 Molecular Beam Epitaxy (MBE) Growth of Graded Composition InGaAIAs ................................ Heterostructures on InP Substrates 9.3 Molecular Beam Epitaxy of Pseudomorphic InGaAIAs Quantum Wells on (111) Oriented GaAs and InP Substrates for Optical Modulators 9.4 Characterization of Strained Layer InGaAIAs Heterostructures on (111) Oriented GaAs Substrates 9.5 Molecular Beam Epitaxy (MBE) Growth on Textured Substrates: Three-Dimensional ..... M BE .............. ...................... Surfaces Vicinial 11) (n on Growth Epitaxial 9.6 Molecular Beam 9.7 Kinetic Beam Processing of III-V Heterostructures ........ 9.8 Diffraction Coupled Heterostructure Diode Laser Arrays . Sectiorn12. O ptics and Devices Chapt er 1. 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 1.13 1.14 1.15 1.16 1.17 1.18 Chapter 2. 2.1 2.2 2.3 2.4 2.5 2.6 ...................... iv 56 56 57 58 59 61 Optics and Quantum Electronics ................ 61 . . . . The Nonlinear Waveguide Interferometer 62 Sampling Signal Optical Picosecond 63 Solitons 64 Squeezing of Pulses ces . . . . . . . . . . . 64 Devi Optical Waveguide Semiconductor Well Quantum Multiple 65 Additive Pulse Mode Locking 66 . . . . . . . . er Diodes Lase GaAs in Femtosecond Pulse Propagation and Amplification 66 Devices InGaAsP in Dynamics Ultrafast 67 Femtosecond Laser Systems 71 Femtosecond Studies in GaAs 73 Metals in Dynamics Electron Femtosecond 74 Laser Medicine 76 Equations Rate for A New Conjugate Gradient-Type Algorithm 78 .......... Laser X-Ray and System Laser Nd:Glass Large 79 Whisper Gallery Mirrors 80 . . Nonlinearity Exciton Well X-Ray Detection Using Quantum Structure ... .......... Study and Development of a Variational Method for Relativistic Atomic 81 Calculations 81 . . . . Fusion Cold Large Coherency and 85 ..................... Infrared Nonlinear Optics 85 Magnetoresistance of HgMnTe 85 Semiconductors Gap Mode Mixing in Narrow 86 Plasma Instabilities in Quasi-Two-Dimensional Electron Gases 87 ................ Nonlinear Optics of Zero Gap Semiconductors 87 HgCdSe:Fe in Optical Nonlinearity Due to Resonant Impurity Scattering 88 Epilayers n-GaAs Doped Heavily in Mixing Four-Wave Section 3. Surfaces and Intersurfaces Chapter 1. 1.1 1.2 1.3 -- A .............................. Statistical Mechanics of Surface Systems and Quantum-Correlated Systems Finite-Temperature Properties of Correlated Systems Random-Field Mechanism in Random-Bond Multicritical Systems . . . . . . . . . . . . Exact Pair Correlations in a One-Dimensional Fluid of Hard Cores with Orientational and Translational Degrees of Freedom .............................. RLE Progress Report Number 131 89 91 91 91 92 Table of Contents Chapter 2. 2.1 2.2 Chapter 3. 3.1 3.2 Chapter 4. Chapter 5. Chapter 6. 6.1 6.2 Chapter 7. X-Ray D iffuse Scattering ................................... M etal S urface Stud ies . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Rare Gases on Graphite . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Semiconductor Surface Studies . . . . . . . . Ground State Geometries of Surfaces . . . . . . . . . Hydrogenation . . . . . . . . Ultralow Temperature Studies of Nanometer Size Semiconductor Devices Coulomb Repulsion and Resonant Tunnelling ..................... Graphoepitaxy of Colloidal Crystals ........................... Structure of Langm uir-Blodgett Films ............................. Growth of Colloidal Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Step Structures on Semiconductor Surfaces: Thermodynamics, Kinetics and Influence on Heteroepitaxy .... PA RT II A PPLIED PHYSICS .................................... ......... . . . 117 Chapter 1. 1.1 1.2 1.3 Quantum Optics and Photonics ...... . . . . . . Laser Raman Clock Studies ........... . . . . . . Fiberoptic Gyroscope Studies ......... . . . . . . Laser Linewidth Narrowing ........... . . . . . . Chapter 2. Basic Atomic Physics ............. . . . . . . 2.1 Rydberg Atoms in a Magnetic Field . . . . . . . . . . 2.2 Microwave Quantum Optics .. ....... . . . . . . 2.3 Millimeter-Wave Measurement of the Rydberg Constant . . . . . . 2.4 Precision Mass Spectroscopy of Ions ..... . . . . . . 2.5 Atom Interferometry ............... . . . . . . 2.6 Traps for Neutral Atoms ............. . . . . . . 2.7 Forces on Atoms from Light . . . . . .. . . Phvi~Q Chanter 3_ MnIA~IIInr 3.1 Electric Neutrality of Molecules: Acoustic-Electric Neutrality Experiment Chapt er 4. Small Angle X-Ray and Neutron Scattering - Its Application to Supram olecular Solutions ........................... 4.1 Solvent Effects on Phase Separation in Micellar Solutions ......... 4.2 Protein - Surfactant Interactions and Protein Denaturation . . . . 4.3 Ion Distribution and Solubilization in Reverse Micelles ............ 4.4 Ion Distribution around DNA Molecules . . . . . . . . . . . . . . . .... . 4.5 Photon Correlation Spectroscopy and Its Application: Critical Phenomena Microemulsion . . . . . ... . .h v., . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Chapter 1. 1.1 1.2 1.3 1.4 1.5 1.6 143 145 145 147 148 148 149 . . . . . . ..................................... Electromagnetic Wave Theory and Applications . Electromagnetic Waves in Multilayer Media .......................... Remote Sensing of Earth Terrain . Remote Sensing of Sea Ice . . . . . . . . SAR Image Interpretation and Simulation . Microwave and Millimeter Wave Integrated Circuits . High-Speed Integrated Circuit Interconnects . 1 19 1 19 12 3 12 3 12 5 12 5 12 9 13 1 13 4 13 6 13 8 1 40 1 A2 . . . . . . . Plasma Dynamics . . . . . . . Relativistic Electron Beams . . . .. . . . . . . . . . . Plasma Wave Interactions - RF Heating and Current Generation . . . . . . Physics of Thermonuclear Plasmas . . . . . . . . . . . . . . . . . . . . . . Tokakmak Experiments in the High Poloidal Beta Regime on Versator II .. ..... Section 3. Electro m ag netics . . . . . . . . . . . . . Section 2. Plasm a P h y sics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Chapter 1. 1.1 1.2 1.3 1.4 113 115 Section 1. Atomic, Molecular and Optical Physics . 93 93 94 97 97 100 105 109 111 111 111 153 155 155 158 167 173 179 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 181 181 187 193 195 200 203 Table of Contents Section 4. Radio A stronom y Radio Astronom y . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . . . Galactic and Extragalactic Research . ... .. . . . ..... ...... ......... Orbiting VLBI High-Resolution Passive Microwave Imaging of Atmospheric Structure Tiros-N Satellite Microwave Sounder ...................... Long-Baseline Astrometric Interferometer . . . . . . . . . . . . Video Image Processing .. . . . ... Nonthermal Radio Emission from the Jovian Planets . . . . Chapter 1. 1.1 1.2 1.3 1.4 1.5 1.6 1.7 PART III SYSTEM S AND SIGNALS Chapter 1. 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 1.13 1.14 1.15 1.16 1.17 1.18 Chapte r 2. 2.1 2.2 Chapte r 3. 3.1 3.2 3.3 3.4 tr Chapte 4. 4.1 4.2 4.3 4.4 4.5 4.6 4.7 4.8 4.9 4.10 4.11 4.12 209 209 - - - - : : - - 210 ............................... Section 1. D igital Signal Processing vi 207 .............................. ........... ............... Digital Signal Processing Introduction Receiver-Compatible Adaptive Modulation for Television . . . . . . . Reconstruction Of Nonlinearly Distorted Images From Zero Crossings .. .. Development of a 2.4 Kbps Speech Vocoder . . . . . . . . . . . . . . . . Correction of Geometric Distortions in Side-Scan Sonographs Caused by Sonar ..... ..... ..... .... Motion Instabilities and Expressions Knowledge Processing Signal of Manipulation Representation and Iterative Algorithms for Parameter Estimation from Incomplete Data and Their . . . . . . . . . . . . . Applications to Signal Processing . . . . . . . Assisting Design Given Multiple Performance Criteria . . . . . . . A Dual Excitation Speech Model . . . . . . . . Motion Estimation from Image Sequences . . . . . . . . . . . . . MultiLevel Signal Matching for Vector Quantization . . . . . . Application of Nonparametric Statistics in Narrowband Signal Detection ......... .. ....... Im age Texture M odelling ....... . . . . . . . . Structure Driven Scheduling of DSP and Linear Algebra Problems The Application of Function Approximation Using Generalized Polynomials to the .. . Development of Optimum Windows . . . . . . . . . . . . . . . . . . . . Iterative Algorithms for Parameter Estimation from Incomplete Data and Their . . . . . . . . . . . . . Applications to Signal Processing Equalization (Identification) of Non-Minimum Phase Systems . . . . . . . . Fractals and Chaos for Digital Signal Processing Cognitive Information Processing ..................... .................... Advanced Television Research Program Computer-Aided Fabrication System Structure . . . . . . . . Optical Propagation and Communication ................ Squeezed States of Light . . . . . . . . . . . . . . . Laser Radar System Theory . . . . . . Fiber-Coupled External-Cavity Semiconductor High Power Laser . . . . Analog Processing of Optical Wavefronts Using Integrated Guided-Wave Optics . . . . Custom Integrated Circuits Custom Integrated Circuits . . . . . Cellular Array for Image Processing . . ...................... Algorithmic Fault Tolerance in Digital Signal Processing . . . . Compiling Signal Processing Algorithms into Architectures . . . . . . . . Iterative Algorithms for Stochastic Estimation . . The Vision Chip Project ........................ Techniques for Logic Synthesis, Testing and Design-for-Testability . . . . . . . . . . . . . . . . Mixed Circuit/Device Simulation Circuit Simulation Algorithms for Specialized Applications . . . Numerical Simulation of Short Channel MOS Devices . . . . Efficient Capacitance Extraction Algorithms .................. Parallel Numerical Simulation Algorithms . . . RLE Progress Report Number 131 211 212 212 213 214 217 219 221 221 223 224 224 22 5 226 227 227 228 228 229 230 231 231 a A 232 233 233 234 235 235 236 239 239 241 244 245 247 247 251 252 253 254 255 258 262 262 263 264 264 Table of Contents Chapter 5. Neurophysiology and Neural Computation ............... 5.1 Electrical Transients in the Frog Optic Tectum . . . . . . . 5.2 Pulse Interval Coding in Regenerative Transmission Media . . . . 5.3 Interactive Front End for Pulsed Neural Network Simulators . . . . PART IV LANGUAGE, SPEECH AND HEARING Section 1. Speech Com m unication Chapter 1. 1.1 1.2 1.3 1.4 1.5 ........... .. ..... ...... ..... .. 283 .................... 289 Signal Transmission in the Auditory System . . . . . . . . . . . . . . . . . . . . . 291 Basic and Clinical Studies of the Auditory System .. . . . . . . . . . 291 Signal Transmission in the External- and Middle-Ear .. . . . . . . . . 291 Cochlear Mechanisms ............. ..... 292 Membrane Properties of Auditory Neurons . . . . . . . . . 293 Stimulus Coding in the Auditory Nerve . . . . 293 M iddle-Ear Muscle Reflex ................ ................294 ..... Cochlear Efferent System ............. . ............... 296 ..... Sources of the Brainstem Auditory Evoked Potential .. . . . . . . . . 296 Cochlear Implants ..................... 297 Section 4. Ling u istics . . .. . . . . .. . . . . . . . . . . .. . . . . . Chapter 1. Linguistics 1.1 Introduction . . . .. . . 1.2 Abstracts of Dissertations Appendices 275 276 277 278 280 282 Auditory Psychophysics and Aids for the Deaf ................... . 285 Perceptual Anchors .................... ......... .. ..........285 Binaural Hearing . . . . . .. . 285 Hearing Aid Research . . . . . . . . . . 285 ................. Tactile Communication of Speech I .......... ........... ... .......285 Tactile Communication of Speech II . . . . ........... ... .......286 Multimicrophone Hearing Aids ............. .... .... ...... ..... .. 286 Cochlear Prostheses . . . . . .......... .. .........286 Hand Function ....................... ... ...... ..... ..... .. 286 Section 3. Auditory Physiology ............... Chapter 1. 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 271 273 ............................... . . . . . . . . . . . . . . . . . . Speech Communication Processes and Representations Involved in Speech Planning . Speech Physiology . . . . . Speech Recognition .............. .... .. Studies of the Acoustics, Production, and Perception of Speech Sounds Computer Facilities . . . . . Section 2. Sensory Communication Chapter 1. 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 .................... 267 267 268 270 ................................. 301 303 ................ - . .. .. .-. . . .. . 303 ..- - ... ... 303 ................... Appendix A. RLE Publications and Papers Presented . . .................. ... . A.1 Meeting Papers Presented . ........ .. .. .......... .......... .. . A.2 Published Journal Articles ............ ................... ...... A.3 Journal Articles Accepted for Publication . ................... ........ A.4 Journal Articles Submitted for Publication .................. ......... A.5 Books/Chapters in Books ................... ................. A.6 Reports Published .................. ................... ..... A.7 Theses ............. . ............................. ..... Appendix B. Current RLE Personnel ............... . .. . ....... . . . . . . Appendix C. Research Support Index . ......... ... .................... . 313 315 315 323 332 335 337 339 339 345 351 Table of Contents Project Staff and Subject Index viii RLE Progress Report Number 131 .................................. 353