Quanta 200 3D Dual Beam FIB 30 Syllabus Instructor Rich Martens Phone Office 205-348-8099 Mobile 205-310-3504 Office Bevill 1016 Office Hours 8am- 5pm M-F E-mail rmartens@caf.ua.edu Prerequisites: Student must be trained through basic SEM class first. Knowledge and understanding of basic electron theory and operation are REQUIRED. Requirements: Previous SEM experience is required. SEM training on XL-30 and/or JEOL 7000. Classes will be held 3x a week/2 weeks. Student is expected to attend every session. Text: Recommended reading: Introduction to Focused Ion Beams Instrumentation, Theory, Techniques and Practice, Edited by Lucille A. Gianuzzi and Fred A. Stevie Description: Basic FIB operation. Training will be dependent on TEM and/or Atom Probe specimen preparation. Goals: Session 1: Explanation of microscope and beam formation. Introduction to microscope software. Basic electron and ion beam operation, stage movements, coincidence point/eucentric, ion beam operation/interaction and platinum deposition. Load and unload procedures. Session 2: Loading specimens, stage operation. Ion beam milling, platinum deposition, preparation of AP/TEM wedges. Operation of Omniprobe in-situ manipulator. Session 3: Focus and Stigmation review. Theoretical and practical application of spot size/probe current. Review of basic instrument operation including ion beam operation, platinum deposition, stage movements, coincidence point/eucentric. Operation of Omniprobe in-situ manipulator and lift-out procedure. Session 4: TEM and/or Atom Probe specimen final preparation. Session 5: Practice using student’s samples. Review concepts as needed. Session 6: Practice using student’s samples. Review concepts as needed. Resources: Recommended reading: Introduction to Focused Ion Beams Instrumentation, Theory, Techniques and Practice, Edited by Lucille A. Gianuzzi and Fred A. Stevie Evaluation: Proper stage alignment and position. Comprehension of eucentric and beam coincidence point. Knowledge of platinum deposition, ion beam interactions and omniprobe operation.