Table of Contents Table of Contents Introduction 1 PART I SOLID STATE PHYSICS, ELECTRONICS AND OPTICS Section 1 Materials and Fabrication Chapter 1 Heterostructures for High Performance Devices ..................................................... 7 Professor Clifton J. Fonstad, Jr. 1.1 * 1.2 * 1.3 * 1.4 * 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 1.13 1.14 1.15 1.16 1.17 1.1 8 Chapter 2 Introductio n ........................................ .. ..... ..... ........................... . . . . . 7 MBE-Grown InGaAIAs Laser Diodes for Optical Fiber Communication Applications ........ 7 Design and Fabrication of Distributed Feedback (DFB) InGaAIAs Laser 8 . ................... Diodes Grown by Molecular Beam Epitaxy ........................................ Feasibility Study of 1.55 uim Intersubband Transition in InGaAs/AIAs Quantum-W ell Heterostructures ....................................... .... ....................... 8 Growth and Characterization of High Quality InGaAIAs Multiple ............................ ........... 9 Q uantum W ells .............................................. New Three-Terminal Laser Diodes with Dynamic Control of Gain and R e fra ctiv e Ind e x ......................................... .............. .................................... 10 Laser Diode Modeling and Design for Narrow Linewidth Operation ................................ 10 Evaluation of GaAs MESFET VLSI Circuits as Substrates for Ill-V ................... 11 Heterostructure Epitaxy ........................................ 12 ........................ Low Temperature Growth of GaAIAs Laser Diodes ............................ Optical Input and Output Circuitry for High Density, High Speed GaAs ................................................ 12 MESFET-based OEICs 13 ..................... High Density GaAs MESFET-based OEIC Neural Systems ...................... Applications of Resonant Tunneling Diodes in GaAs MESFET VLSI .............................. 14 Investigation of Infrared Intersubband Emission from InGaAs/AIAs/InP ...................... 14 ............... Q uantum -W ell Heterostructures ..................................... Infrared Characterization of InGaAs/AIAs/InP Quantum-Well Heterostructures .............. 15 Analysis of the Symmetry Properties of Quantum Well Subband Energy Levels ........... 15 Microwave Characterization, Analysis, and Modeling of Emitter-Down ......... .................. 16 Heterojunction Bipolar Transistors ...................... ........................... Damage-Free In-Situ UHV Etching and Cleaning of Ill-V Heterostructures 17 Using M olecular Beam s ......................................................... 17 P u b lic atio n s ...................................................................... High-Frequency InAIAs/InGaAs Metal-Insulator-Doped Semiconductor Field-Effect Transistors (MIDFETs) for Telecommunications ..................19 Professor Jesus A. del Alamo *2.1 *2.2 *2.3 *2.4 * Introduction ................................. ....... ............ ........ .. ................ 19 20 Drain-current Injection Technique for the Measurement of Breakdown Voltage ................ 21 in InAIAs/n+-InGaAs HFETs ............................................ Physics of Breakdown Publications ........................................................................... 23 Sponsored by the Joint Services Electronics Program. Table of Contents Chapter 3 Chemical Beam Epitaxy of Compound Semiconductors ..................................... 25 Professor Leslie A. Kolodziejski 3.1 *3.2 o3.3 3.4 3.5 Chapter 4 Introduction ................ ......................... .......... ...... ................. Photo-Assisted Metalorganic Molecular Beam Epitaxy of ZnSe Using a Combination of Solid and Gaseous Sources .............................. ........................... Epitaxial Lattice-Matched Ill-V Buffer Layers for Wide Bandgap II-VI Visible Sources ................................................ ........... Fabrication of Novel Channel Dropping Filters for Wavelength Division M ultiplexed Photonic System Applications ........................................... .......... Publications ........................................................................................ 25 Focused Ion Beam Microfabrication ....................................................................... 31 26 29 30 30 Dr. John Melngailis 4 .1 4.2 4.3 4.4 4.5 4.6 4.7 4.8 4.9 4.10 Section 2 Chapter 1 Intro d uctio n ........................................................... ...................................... ................... Tunable Gunn Diodes - Optimization for Microwave Applications ................................... Dose Rate Effects in the Implantation of Si in GaAs ................... ................. Limited Lateral Straggle of Focused-Ion-Beam Implants ......................... Focused Ion Beam Implantation in GaAs for Transistor Optimization ............................. Confined Carrier Distributions in III-V Semiconductors Created by Focused Io n B ea m s ............................... ........... ............................. .................. Focused Ion Beam Lithography for X-ray Mask Making .......................................... Focused Ion Beam Induced Deposition of Copper ............................................... Focused Ion Beam Induced Deposition and Ion Milling as a Function of Angle of Ion Incidence ................................ ............................................... . ........... Publications ........................................................ 31 31 32 32 33 33 33 34 34 35 Quantum-Effect Devices Statistical Mechanics of Quantum Dots ................................................................ 39 Professor Boris L. Altshuler 1.1 * 1.2 Chapter 2 P roject Description .................................................................... Publications ........................................................................ 39 40 Single Electron Transistors .............................................................................................. 41 Professor Marc A. Kastner 2.1 2.2 Chapter 3 Project Description .................................................................... Publications ............................................................... 41 ...... ............... 44 Differential Resistance Through a Quantum Dot: Signature of Kondo Correlation .. 45 Professor Patrick A. Lee * 3 .1 3.2 Chapter 4 P roject Descriptio n ......................................................................................................... Publications ............................................................. 45 46 Submicron and Nanometer Structures Technology and Research .......................... 47 Professor Henry I. Smith 4.1 *4.2 4.3 iv Subm icron Structures Laboratory ............................................................ 47 47 . ...................... X-Ray Nanolithography ........................................ . ........ 48 Improved Mask Technology for X-Ray Lithography ...................... RLE Progress Report Number 135 Table of Contents *4.4 *4.5 *4.6 4.7 *4.8 4.9 4.10 4.11 4.12 *4.13 4.14 4.15 4.16 *4.17 4.18 4.19 * 4.20 4.21 Section 3 Chapter 1 Improved Scanning Electron Beam Lithography ............................ .............. 50 A High-Precision Mask Alignment Scheme .............................................. ........ 51 Achromatic Holographic Lithography ......................................... ................ 53 Fabrication of T-gate Devices using X-ray Lithography ................................... 53 54 ............. Tenth-micron MOSFET Device Technology ............................................ Studies of Coulomb Charging Effects in Semiconductor Nanostructures ........................ 57 Study of Quasi-One-Dimensional Wires in GaAs/AIGaAs Modulation Doped F ie ld -E ffect T ransistors .................................................................... ............... 58 Planar-Resonant-Tunneling Field-Effect Transistors PRESTFET) ...................................... 59 Dual Electron Waveguide Device Fabricated Using X-ray Lithography ........................... 61 Far-Infrared Spectroscopy of Arrays of Quantum Dots and Wires .................................. 61 Ridge-Grating Distributed-Feedback Lasers Fabricated by X-Ray Lithography ......... . 62 Channel-Dropping Filters Fabricated by X-Ray Lithography ...................... 63 ............... 63 Novel Superconducting Tunneling Structures ..................... Submicrometer-Period Transmission Gratings for X-ray and Atom-Beam S pectroscopy and Interferom etry ...................................................................... ................... 65 High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy .............................................................. 65 Submicron-Thickness X-ray Window Technology .............................. ........... ....... 65 GaAs Epitaxy on Sawtooth-Patterned Silicon .......................... .................... 66 Publications ...................................... ............ ....... 66 Optics and Devices Optics and Quantum Electronics ..................................................... 71 Professor Hermann A. Haus, Professor Erich P. Ippen, Professor James G. Fujimoto, Professor Peter L. Hagelstein, Dr. Santanu Basu *1.1 * 1.2 1.3 1.4 1.5 1.6 * 1.7 1.8 1.9 *1.10 * 1.11 *1.12 *1.13 * 1.14 1.15 1.16 1.17 1.18 1.19 1.20 1.21 1.22 1.23 Additive Pulse Modelocking ........................................ .............. 71 F ib e r R ing Lase r ....................................................................................... ..................... 7 2 Long Distance Fiber Com munications ............................................................ 72 Squeezing ................................... .............................. ... .. .......... .......... 73 Integrated Optics Components: the Channel Dropping Filter ....................................... 74 Tunable Semiconductor Lasers ........................................ .................. 74 Nonlinear Properties of InGaAsP Optical Amplifiers .............................. 75 Ultrafast Index Nonlinearities in Active Waveguides ............................. 76 Femtosecond Pulse Generation and Amplification in F-center Systems ......................... 77 Coherent Phonons In Electronic Materials ....................................... ............ 77 Fem tosecond Studies of Fullerenes ............................................................. 78 Ultrashort Pulse Generation in Solid State Lasers ........................ ............ ... 79 Studies of Ultrafast Phenom ena in M aterials ............................................................ 81 Time Domain Diagnostics of Waveguide Devices ....................................... 83 Laser Med icine ................................................................... 85 O bservation of Gain in Ni-like Nb ............................................................. 90 P um p P ulse Length ....................................................................................................... 92 End-pumped X-ray Lasers ........................................ ......................... 93 The Kinetics and Hydrodynamics of Laser-Generated Plasmas ...................................... 94 An Analytical Solution of the 2D Exciton-Phonon Matrix Element ................................... 96 Quantum Dot Diode Lasers ............................................. 97 Coherent Fusion Theory ................................................ 98 Deuterated Metal Experiments ......................................................... 100 Table of Contents Chapter 2 Optical Propagation and Communication ..................................... 103 Professor Jeffrey H. Shapiro, Dr. Robert H. Rediker, Dr. Ngai C. Wong 2 .1 2.2 2.3 2.4 2.5 Chapter 3 Intro d uctio n ........................................................................................................................ Squeezed States of Light .................................................. Optical Frequency Division and Synthesis ........................................ Fiber-Coupled External-Cavity Semiconductor High Power Laser ................................ Analog Processing of Optical Wavefronts Using Integrated Guided-Wave Optics ........ 10 3 103 105 106 107 High-Frequency (> 100 GHz) Electronic Devices ..................................... 109 Professor Qing Hu 3.1 3.2 3.3 3.4 3.5 3 .6 Section 4 Chapter 1 Facility for Millimeter-wave and THz Frequencies ........................................ Millimeter-wave and Infrared Superconducting Focal-plane Receiver Arrays ............... Photon-assisted Quantum Transport in Quantum Point Contacts .................................. High-Tc Superconducting Josephson Devices .......................................... .................. Far-infrared (THz) Lasers Using Multiple Quantum Wells ...................... ................. ...... P u b lic atio n s .............................................................................................. 109 109 110 112 114 116 Surfaces and Interfaces Statistical Mechanics of Surface Systems and Quantum-Correlated Systems ........ 119 Professor A. Nihat Berker 1.1 * 1.2 * 1.3 * 1.4 * 1.5 * 1.6 S1.7 Chapter 2 119 119 120 120 121 ................ . Introduction ......................................................... ................................... Renormalization-Group Approach to Electronic Systems Suzuki-Trotter Approach to Electronic Systems ....................................... Phase Diagrams of Semiconductor Alloys ........................................ Renormalization-Group Theory of an Internal Critical Endpoint Structure ..................... Phase Diagrams of the Ising Model on the Square Lattice with Crossed D iagonal B o nds ..................................................................... Publications ........................................................................................... 12 1 121 Synchrotron X-Ray Studies of Surface Disordering ..................................... 123 Professor Robert J. Birgeneau 2.1 *2.2 *2.3 *2.4 Chapter 3 Introduction ................................................................ Metal Surface Studies ........................................ Semiconductor Surface Studies ........................................ Model Surface Overlayers ........................................ 123 123 124 124 Chemical Reaction Dynamics at Surfaces ..................................... 127 Professor Sylvia T. Ceyer *3.1 3.2 3.3 vi A New Mechanism for Dissociative Chemisorption on Si: Atom Abstraction ................ 127 .................... 128 New Mechanisms for Surface Processes ........................................ The C hem istry of Bulk Hydrogen ........................................................... 129 RLE Progress Report Number 135 Table of Contents Chapter 4 Semiconductor Surface Studies ..................................... .......................................... 131 Professor John D. Joannopoulos *4.1 * 4.2 * 4.3 *4.4 Chapter 5 ...................................................... Introduction Surface Reconstruction .......................................................... Com putation at Large Length Scales ........................................................................ P ublications .............................................................. 131 131 133 135 Epitaxy and Step Structures on Semiconductor Surfaces .................................... 137 Professor Simon G.J. Mochrie S5.1 * 5 .2 Structure and Phase Behavior of the Si(113) Surface ...................... .................. .. P u b licatio ns ........................................................................... PART II APPLIED PHYSICS Section 1 Atomic, Molecular and Optical Physics Chapter 1 Quantum Optics and Photonics ........................................................ 137 140 145 Professor Shaoul Ezekiel 1.1 1.2 1.3 1.4 1.5 Chapter 2 145 Optical Data Storage with Raman Excited Spin Echoes ......................................... Phase-dependent Velocity Selective Coherent Population Trapping in a Folded Three-level A System under Standing Wave Excitation .................................... Continuous Pol-Grad Pre-Cooling for Loading a Subrecoil Temperature Trap ................ Raman Gain in a A Three-level System with Closely Spaced Ground States ................. Brillouin Laser Fiberoptic G yroscope ........................................................................... 146 148 149 151 Basic Atom ic Physics .............................................. 155 ................................................. Professor Daniel Kleppner, Professor David E. Pritchard *2.1 2.2 *2.3 *2.4 Chapter 3 Millimeter-Wave Frequency Measurement of the Rydberg Constant ............................. ....................................... The Diamagnetic Rydberg Atom Precision Mass Spectroscopy of Ions .................................... Atom Interferometry . ................................................ 155 158 161 163 Neutrality of Molecules by the Pulsed Gas Flow Method ..................................... 171 Professor John G. King 3 .1 3.2 Section 2 Chapter 1 171 171 Introd uctio n ......................................................................... Project Description ............................................................. Plasma Physics Plasm a Dynam ics ...................................................................... ................................ 175 Professor George Bekefi, Professor Abraham Bers, Professor Bruno Coppi, Professor Miklos Porkolab, Professor Jonathan S. Wurtele, Dr. Ronald C. Englade, Dr. Stefano Migliuolo, Dr. Abhay K Ram, Dr. Barrett Rogers, Dr. Linda E. Sugiyama 1.1 1.2 1.3 1.4 Relativistic E lectron Beam s ............................................................................ Plasma Wave Interactions - RF Heating And Current Generation ................................ ..................... Physics of Thermonuclear Plasmas ................. Versator II Tokamak Research Program .................................. 175 181 192 198 Table of Contents Section 3 Chapter 1 Electromagnetics Electromagnetic Wave Theory and Applications ..................................... 203 Professor Jin Au Kong, Professor Terry Orlando, Dr. Robert T. Shin, Dr. Y. Eric Yang 1.1 S1.2 1.3 1.4 1.5 Section 4 Chapter 1 Remote Sensing of Earth Terrain ........................................ Electromagnetic Waves in Multilayer Media ...................................... Aircraft Landing Systems: ILS, MLS, GPS, and SVS ....................... ................. Publications .............................................................. Superconducting Transmission Lines ...................................................... 203 205 207 208 209 Radio Astronomy Radio Astronom y ............................................................................................................. 215 Professor Bernard F. Burke, Professor David H. Staelin, Professor Jacqueline N. Hewitt, Dr. Philip W. Rosenkranz 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 .................. Extragalactic Radio Source Studies ....................... The Study of Exoplanets ................................................. Studies of G ravitational Lenses ................................................................ ................... Radio Interferometry of Nearby dMe Stars ........................................ Algorithms for Advanced Microwave Sounding Unit Operational Use ........................... Earth Observing System: Advanced Microwave Sounding Unit .................................... High-Resolution Passive Microwave Imaging of Atmospheric Structure ....................... Rapid Precision Net-Form Manufacturing ........................................ .... Conformal Experiment Design ........................................... Recognition of Natural Nearly Repetitive Signals ........................................ PART III SYSTEMS AND SIGNALS Section 1 Computer-Aided Design Chapter 1 215 216 217 218 218 219 219 219 220 221 227 Custom Integrated Circuits ....................................... Professor Jonathan Allen, Professor John L. Wyatt, Jr., Professor Jacob White, Professor Srinivas Devadas 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 Chapter 2 Custom Integrated Circuits ........................................ Analog VLSI Systems for Integrated Image Acquisition and Early .. ................... V isio n P ro cessing ............................................................................ Parallel Algorithms for Device Simulation ........................................ Numerical Simulation of Short Channel MOS Devices ................................... C ircuit S im ulation Algorithm s ............................................................................................. .................... Parallel Circuit Simulation Algorithms .......................... ............ Microelectromechanical CAD (MEMCAD) ............................ Numerical Techniques for Simulating Josephson Junction Arrays ................................ Efficient 3-D Interconnect Analysis ....................................... Techniques for Logic Synthesis, Formal Verification and Testing ................................. 227 Computer-Integrated Design and Manufacture of Integrated Circuits ................... 247 22 9 238 239 239 240 240 241 241 242 Professor Donald E. Troxel 2 .1 2.2 2.3 viii Intro d u ctio n .................................................................... Principal Objectives ............................................................ Principal Accomplishments ........................ RLE Progress Report Number 135 247 248 ................. 248 ............................. .... Table of Contents 2.4 2.5 2.6 Section 2 Chapter 1 Process Flow Representatation ........................................ 250 Technology C A D Fram ew ork ............................................................................................. 251 Publications ............................ ............................................ ................ ............. ........ 252 Digital Signal Processing Digital Signal Processing Research Program 255 ..................................... Professor Alan V. Oppenheim, Professor Arthur B. Baggeroer, Professor Gregory W. Wornell 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 1.13 1.14 1.15 Chapter 2 Introduction ............................. ....... . .... .... .. ....... .......... ..... . 255 Oceanographic Signal Processing ....................................... 256 Segmentation of Polarimetric Synthetic Aperture Radar Images Using Markov Random Field Techniques ..................................................... 256 Signal Synthesis from Marine Mammal Communications ....................... 257 Analysis, Synthesis, and Applications of Synchronized Chaotic Systems ..................... 257 High-Resolution Direction Finding for Multidimensional Scenarios ................................ 258 Signal Processing Applications of Chaotic Dynamical Systems .................................... 258 Wavelet-Based Representation and Algorithms for Generalized F racta l S ig na ls .......................................... ........................... .. .................. 2 5 9 Acoustic Tomography through Matched Field Processing ....................... .............. 259 Binary Data Transmission and Detection with Chaotic Signals ..................................... 260 Real-Time Active Noise Cancellation .............................................. 260 State and Parameter Estimation with Chaotic Systems ..................................... 261 Nonlinear Models for Signal Processing .................... .................... 261 Model-Based Analysis of Music ........................................ 262 Active Noise Cancellation ............................................. 262 Advanced Television and Signal Processing Program ..................................... 263 Professor Jae S. Lim 2 .1 2.2 2.3 Chapter 3 Intro d u ctio n .................................................................................................................. Advanced Television Research Program ............................................ Speech Signal Processing ...... ....................................... 2 63 263 267 Combined Source and Channel Coding for High-Definition Television ................. 269 Professor William F. Schreiber 3 .1 P roject D escriptio n ................................................................................... PART IV BIOELECTRONICS Section 1 Genetic Analysis Chapter 1 Genosensor Technology Development ..................................... .................... 269 275 Dr. Mark Hollis 1.1 1.2 1.3 Introduction ............................................... ......... 275 Development of Genosensor Arrays for DNA Decoding ..................................... 275 Microdetection Technology for Automated DNA Sequencing ........................................ 276 Table of Contents PART V LANGUAGE, SPEECH AND HEARING Section 1 Speech Communication Chapter 1 Speech Communication ........................................ 281 Professor Kenneth N. Stevens, Dr. Joseph S. Perkell, Dr. Stefanie Shattuck-Hufnagel 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 Section 2 Chapter 1 .... ............... 282 Introduction ........................................... ...........282 Speech Production Planning ................................ 283 Studies of Speech Production .................................................. Speech Research Related to Special Populations ......................................................... 284 287 Models for Lexical Representation and Lexical Access ......................... Studies of the Acoustics, Perception, and Modeling of Speech Sounds ....................... 287 Development of Computer and Data Processing Facilities ......................................... 288 ................. ...... 288 Publications ....................................... Sensory Communication Sensory Communication ...................................... 293 Professor Louis D. Braida, Nathaniel I. Durlach, Dr. William M. Rabinowitz, Dr. Charlotte M. Reed, Dr. Mandayam A. Srinivasan, Dr. Patrick M. Zurek 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 1.10 1.11 1.12 1.13 Section 3 Chapter 1 Introduction .......................................................... ........... Hearing Aid Research ......................................... Multimicrophone Hearing Aids .......................................................... ................................................. Cochlear Prostheses B in a u ra l He a ring ................................................................................................................ Clinical Applications of Binaural Hearing .................... .................... ........... Tactile Communication of Speech ....................................... .......................... Interfaces Human-Machine Improved for Localization Super-Auditory Research on Reduced-Capability Human Hands ........................................................... Mechanistic Modeling of Primate Fingerpad ........................................... Biomechanics of Skin-Object Contact ..................................... Human and Robot Hands: Mechanics, Sensorimotor Functions and Cognition ............ ..................... Publications ............................................. 293 293 302 303 3 04 304 304 306 307 309 311 313 314 Auditory Physiology Signal Transmission in the Auditory System ..................................... 319 Professor Lawrence S. Frishkopf, Professor Nelson Y.S. Kiang, Professor William T. Peake, Professor William M. Siebert, Professor Thomas F. Weiss, Dr. Bertrand Delgutte, Dr. Donald K. Eddington, Dr. Dennis M. Freeman, Dr. John J. Guinan, Jr., Dr. John J. Rosowski 1.1 1.2 1.3 1.4 1.5 1.6 1.7 x .................. ... ................................ Intro d u ctio n ...................... .......... Signal Transmission in the External and Middle Ear ........................................ .............. Cochlear Mechanism s ..................................... Electrical Stimulation of the Auditory Nerve .............................................. Interactions of Middle-Ear Muscles and Olivocochlear Efferents ................................... ..................... Cochlear Efferent System ............................. C ochlea r Im plants ................................................................................... ..................... RLE Progress Report Number 135 3 19 319 321 324 324 325 326 Table of Contents Linguistics Section 4 Chapter 1 Linguistics ........................................................................................................................ 331 Professor Noam Chomsky, Professor Morris Halle In tro d u ctio n ................................................................................................ Abstracts of Doctoral Dissertations ....................................... ................... 3 3 1 331 APPENDICES Appendix A RLE Publications and Papers Presented ........................................ ................ 339 Meeting P apers ............................................................ Jo u rna l A rticles ........................................................... Books/C hapters in Books ....................................................................... R LE Publications ............................................................ R LE T h e s e s .................................................................................. Misce lla neo us .............................................................. 339 350 360 361 362 364 Appendix B Current RLE Personnel ........................................ 365 Appendix C Milestones ......................................................................................................................... 371 New Faculty and Staff .............................................. P ro m o tio n s ........................................................................... . .................. ................... Chair Appointments ................................................ Awards and Honors ................................................................................................... 371 371 371 371 RLE Research Support Index ........................................ 373 A. 1 A.2 A.3 A.4 A.5 A.6 C.1 C.2 C.3 C.4 Appendix D Project Staff and Subject Index 377 xii RLE Progress Report Number 135