TESCAN Lyra XMU FIB-FESEM Syllabus
Instructor
Rich Martens
Phone Office 205-348-8099
Mobile 205-310-3504
Office
Bevill 1016
Office Hours
8am- 5pm M-F
E-mail rmartens@caf.ua.edu
Prerequisites:
Student must be trained through basic SEM class first. Knowledge and understanding of basic electron theory and
operation are REQUIRED.
Requirements:
Previous SEM experience is required. SEM training on XL-30, JEOL 7000 or FEI Quanta is required. Classes will be held 3x a
week/2 weeks. Student is expected to attend every session.
Text:
Recommended reading: Introduction to Focused Ion Beams Instrumentation, Theory, Techniques and Practice, Edited by
Lucille A. Gianuzzi and Fred A. Stevie
Description:
Basic FIB operation. Training will be dependent on TEM and/or Atom Probe specimen preparation.
Goals:
Session 1:
Explanation of microscope and beam formation. Introduction to microscope software. Basic electron and
ion beam operation, stage movements, coincidence point/eucentric, ion beam operation/interaction and
platinum deposition. Load and unload procedures.
Session 2:
Loading specimens, stage operation. Ion beam milling, platinum deposition, preparation of AP/TEM
wedges. Operation of Operation of SmartAc in-situ manipulator.
Session 3:
Focus and Stigmation review. Theoretical and practical application of spot size/probe current. Review of
basic instrument operation including ion beam operation, platinum deposition, stage movements,
coincidence point/eucentric. Operation of SmarAc in-situ manipulator and lift-out procedure.
Session 4:
TEM and/or Atom Probe specimen final preparation.
Session 5:
Practice using student’s samples. Review concepts as needed.
Session 6:
Practice using student’s samples. Review concepts as needed.
Resources:
Guide to electron microcopy, available from instructor.
Evaluation:
Proper stage alignment and position. Comprehension of eucentric and beam coincidence point. Knowledge of platinum
deposition, ion beam interactions and SmarAc in-situ manipulator operation.