North America Regional Standards
Committee (NA RSC)
Liaison Report
December 2011
NARSC Report - December 2011
Outline
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Current Structure of NA Standards Committees
NARSC Fall 2011 Meeting
Overall TC/WG Updates
Upcoming Events
Regional Staff Contact Information
NARSC Report - December 2011
Current Structure of the NARSC [1/2]
NARSC
Chair: Jackie Ferrell (ISMI)
Chair: Sean Larsen (LAM Research AG)
Vice-Chair: Mark Crockett (MEMSMART)
Automated Test Equip
Gases
Ajay Khoche (Khoche Consulting)
Tim Volin (Parker Hannifin)
Compounds
Information & Control
Jim Oliver (Northrup Grumman)
Russ Kremer (Freiberger)
David Bricker (AMAT)
Jack Ghiselli (Consultant)
Lance Rist (RistTex)
Microlithography
Traceability
Wes Erck (W.Erck & Associates)
Rick Silver (NIST)
Win Baylies (BayTech Group)
Yaw Obeng (NIST)
PIC
HB-LED
Mutaz Haddadin (Intel)
Matt Fuller (Entegris)
Iain Black (Philips)
Chris Moore (Semilab)
Bill Quinn (Veeco)
David Reid (Silian)
EHS (NA)
Chris Evanston (Salus
Engineering)
James Beasley (ISMI)
Sean Larsen (LAM Research)
Eric Sklar (Safety Guru)
Liquid Chemicals
Photovoltaic (PV)
Frank Flowers (FMC)
Frank Parker (ICL Performance)
Win Baylies (BayTech Group)
James Moyne (Applied Materials)
Facilities
Win Baylies (BayTech Group)
Mark Crockett (MEMSMART)
MEMS / NEMS
Phil Naughton (AMAT)
Steve Lewis (CH2M Hill)
Metrics
FPD (NA)
Bill Colbran (Engenuity)
NARSC Report - December 2011
David Bouldin (Fab Consulting)
Mark Frankfurth (Cymer)
PV - Materials
Lori Nye (Brewer Science)
New► Dick Hockett (Evans Analytical)
Silicon Wafer
Noel Poduje (SMS)
Dinesh Gupta (STA)
New►Mike Goldstein (Intel), vice-chair
3DS-IC
Chris Moore (Semilab)
Sesh Ramaswami (AMAT)
Urmi Ray (Qualcomm)
Rich Allen (SEMATECH)
Technical Architects
Board (TAB)
James Moyne (AMAT)
Yaw Obeng (NIST)
Current Structure of the NARSC [2/2]
NARSC
Chair: Jackie Ferrell (ISMI)
Chair: Sean Larsen (LAM Research AG)
Vice-Chair: Mark Crockett (MEMSMART)
FPD (Korea)
EHS (Taiwan)
3DS-IC (Taiwan)
Jong Seo Lee (Samsung)
Il-Ho Kim (LMS)
Shuh-Woei Yu (SAHTECH)
Fang-Ming Hsu (TSMC)
Tzu-Kun Ku (ITRI)
Wendy Chen (King Yuan
Electronics)
Yi-Shao Lai (ASE)
FPD Metrology (Korea)
FPD (Taiwan)
Jong Seo Lee (Samsung)
Il-Ho Kim (LMS)
Tzeng-Yow Lin (ITRI)
Jia-Ming Liu (TDMDA)
Facilities (Korea)
I&C (Taiwan)
Kwang Sun Kim (KUT)
Insoo Cho (Shinsung ENG)
Robert Chien (TSMC)
I&C (Korea)
Chulhong Ahn (Hynix)
Sammy Jeong (KC Tech)
Gunwoo Lee (Miracom)
EHS WG (Korea)
Seoung Jong Ko (Hynix)
Hyunsuk Kim (Samsung Elec.)
NARSC Report - December 2011
Photovoltaic (Taiwan)
Jeff Lee (Chroma)
B.N. Chuang (CMS/ITRI)
J.S. Chen (PVTC/ITRI)
Ray Sung (UL Taiwan)
Regional Committees
&
Working Groups
NARSC SEMICON Fall 2011 Meeting
(October 23)
• Meeting Highlights:
– Supported formation of the China PV Committee
– NARSC Joint Regulations WG / Planning Meeting
• Reactivated the discussion of requirements and development of
procedures that would enable remote voting in TC meetings
• Gathered inputs for Standards training materials for new members
and TC/TF leadership
• Discussed possible approaches for NA leadership succession plan
NARSC Report - December 2011
NA Standards Fall 2011 Meetings
October 24-27
Sunday
23
Monday
24
Tuesday
Wednesday
25
26
Thursday
27
Friday
28
Saturday
29
EH&S
NARSC
Facilities & Gases
Liquid Chemicals
Information & Control
MEMS/NEMS
HB-LED
Metrics
Schedule
-at-a-glance
Photovoltaic
Physical Interfaces & Carriers
Silicon Wafer
Traceability
ATE
3DS-IC
Locations
NARSC Report - December 2011
- SEMI
- AMAT
- Intel
Overall TC/WG Updates
(from NA Fall 2011 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
Inspection & Metrology TF:
(b) Doc. 5269 (Terminology for Through Silicon Via Geometrical
Metrology) to be balloted for C1-12
NA 3DS-IC
Committee
October 25, 2011
Bonded Wafer Stacks TF:
(b) Doc. 5173 (Guide for Describing Materials Properties and
Test Methods for a 300 mm 3DS-IC Wafer Stack) to be
balloted for C1-12
Thin Wafer Handling TF:
(b) Doc. 5175 (New Standard: Guide for Multi-Wafer Transport
and Storage Containers for Thin Wafers) to be balloted for
C1 or C2-12
NARSC Report - December 2011
Overall TC/WG Updates
(from NA Fall 2011 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
(p) New Task Force: Impurities & Defects in HB-LED Sapphire
Wafers
NA HB-LED
Committee
Wafer TF:
(b) Doc. 5265 (Specification for 150 mm Diameter
Sapphire Wafers for HB-LED Applications) to be balloted
for C1-12
October 27, 2011
Equipment Automation TF:
(p) Developing draft for 150 mm open cassette standard
(p) Discussing requirements for load port standard
(p) Reviewed and discussed results from automation software
survey
(o) Continuing discussion on HB-LED operational safety
NARSC Report - December 2011
Overall TC/WG Updates
(from NA Fall 2011 Meetings)
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
Org. Name
Last met on:
NA Automated
Test Equipment
Committee
October 25, 2011
(b) Doc 4782C (STDF) passed TC review
(b) G79 & G80 (digital timing accuracy) reapprovals passed
TC review
NA Compound
Semiconductor
Materials
Committee
September 13, 2011
(b) 5-Year Review ballots for M9.3, M9.4, and M9.8 (polished
monocrystalline GaAs wafers) for C1-12
NA EHS
Committee
NA Facilities & Gases
Committee
NARSC Report - December 2011
October 27, 2011
(o) AMHS Safety TF disbanded
(o) S22 revision (4605E) and S2 revision (non-ionizing
radation – 4774B, removal of burrs/sharp edges – 4449C
LI1) passed TC review
(b) S8 rev (ergonomics – 5009) and S2 rev (¶ 3.3 limitations –
5171) for C2-12
(o) Adopted a preference that S8 be a delayed revision
document, synchronized with S2
October 25, 2011
(p) Doc 4737D (Guide for Heater Systems Requirements)
passed TC review
(b) Several 5-Year Review ballots (reapprovals/revisions)
passed TC review + more balloted for C1/C2-12 including
reapproval for F47 (voltage sag)
Overall TC/WG Updates
(from NA Fall 2011 Meetings)
Org. Name
NA I&C
Committee
NA Liquid Chemicals
Committee
NA MEMS / NEMS
Committee
NARSC Report - December 2011
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
October 26, 2011
(p) New TF: Energy Saving Equipment Communication
(o) Data Quality TF disbanded
(o) Allowed E95 (human interface) to go into Inactive status
(b) Ballot 5002A (New Common EDA Metadata) failed TC
review + New E54 subordinate standards (5181, 5102A)
passed TC review
October 25, 2011
(p) New TF: F39 & F41 Re-write
(b) F57 revision (4555A) passed TC review
(b) 5-Year Review for C20, C24, C26, C33, C41, C46, C47, C48,
and C51 to be balloted for C1-12
October 24, 2011
(p) MS2 (step-height measurements) and MS4 (Young’s
Modulus measurements) revision ballots passed TC review
(b) New Guide on Fluid Permeation (5266) and MS1
reapproval (wafer-to-wafer bonding) to be balloted
for C1-12
Overall TC/WG Updates
(from NA Fall 2011 Meetings)
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
NA Metrics
Committee
July 13, 2011
(b) Ballots passed TC review: E10, E35, E140 revs; E113, E135,
E136, E143 reapprovals; and new Guide for
Handling Extremely Electrostatic Sensitive (EES) items.
Ballot failed TC review: E33 (EMC) rev
(o) Reported IP assessed as potentially material and
technically justified to E10. SEMI to pursue LOA process
(o) E10 Rev & Equip Productivity Metrics TFs merged =
Equipment RAMP Metrics TF
(b) Doc 5169 (E78 rev, ESD) to be balloted for C1 or C2-12
NA Microlithography
Committee
July 12, 2011
(b) Several 5-yr review docs reviewed at West, more to be
balloted early 2012 for meeting at SPIE 2012
Org. Name
NA PI&C
Committee
NARSC Report - December 2011
October 26, 2011
(p) Ballots passed TC review: E144 (RFID) rev +
E158 (450 FOUP)/E159 (450 MAC) revs + E1.9, E47, E47.1,
E62, E64, E119 reapprovals + E7 withdrawal
(b) E152 rev (5263, EUV pod) to be reballoted for C1-12
Overall TC/WG Updates
(from NA Fall 2011 Meetings)
Org. Name
Last met on:
Progress (p) / Concern (c) /
Ballot to be issued (b) / Others (o)
October 26, 2011
(o) Dick Hockett (Evans Analytical) appointed as co-chair
(b) Two test methods (resistivity & TCO) + 2 chemical
(2-propanol & sulfuric acid) passed TC review.
Test method on Inductively Coupled-Plasma Mass
Spectrometry (#4675B) failed; reballot for C1 or C2-12
NA Silicon Wafer
Committee
October 26, 2011
(o) Mike Goldstein (Intel) appointed as vice-chair
(b) Several 5-Year Review ballots passed TC review.
MF1535 (carrier lifetime) reapproval failed TC review.
(p) New Test Method for Non-Contact Wafer Diameter
Measurement (5344)
(b) M49 and M62 to be revised to include 450 mm
(p) M1-1111 published – includes 450 mm polished wafer
NA Traceability
Committee
October 27, 2011
(b) T4 withdrawal (150/200mm Pod ID) + T10 reapproval (2D
Matrix Direct Mark Quality) to be balloted for C1-12
NA PV Materials
Committee
NARSC Report - December 2011
NA Standards Spring 2012 Meetings
• April 2-5
• SEMI Headquarters in San Jose, California
• Inviting local companies willing and able to host
some of the meetings to maintain one-week format
• Final schedule, including meeting/hosting locations, to
be announced soon
NARSC Report - December 2011
Upcoming NA Meetings
Event Name
Event Type
NA Standards Spring 20112
Meetings
Standards Meetings
April 2-6, 2012
SEMI Headquarters in San Jose, California
NA HB-LED Committee
TF and Committee
Meetings
February 7-9, 2012
In conjunction with Strategies in Light Conference
Santa Clara, CA
NA Microlithography
Committee
Committee
Meeting
February 12-16, 2012
In conjunction with SPIE Advanced Litho Conference
San Jose, CA
NA Compound Semiconductor
Materials Committee
Committee
Meeting
April 23-26, 2012
In conjunction with CS MANTECH
Boston, MA
NARSC Report - December 2011
Contents
NA Standards Staff Changes
Paul Trio
Sr. Manager, NA Standards Operations
Kevin Nguyen
Manager, NA Standards Committees
Provisional: Contact
Paul Trio (ptrio@semi.org) or Kevin
Nguyen (knguyen@semi.org)
Operations
Committees: NARSC / I&C / ATE / MEMS / Microlithography,
HB-LED / 3DS-IC
Meetings & Events Planning
General Information
STEPS/Workshops and Sponsorships
Committees: Facilities / Gases / PV / PV Automation /
PV Materials / Silicon Wafer / Traceability
Standards Website
Committees: Compounds Semiconductor Materials / EHS /
FPD / Liquid Chemicals / Metrics / PIC
Hiring of new NA Standards staff has been completed.
Official announcement by the end of the month.
NARSC Report - December 2011
Regional Staff
Contact Information
Name
Paul Trio
E-mail
ptrio@semi.org
Phone
+1.408.943.7041
Office Address
Committees
In charge
NARSC Report - December 2011
3081 Zanker Road
San Jose, CA 95134
U.S.A.
NARSC
Automated Test Equipment / HB-LED / 3DS-IC /
Information & Control / MEMS / Microlithography
Thank you!
NARSC Report - December 2011