The 2015 International Symposium on Semiconductor Manufacturing Intelligence (ISMI2015) Abstract of the 2015 International Symposium on Semiconductor Manufacturing Intelligence Young Jae Jang, James R. Morrison and Jei-Zheng Wu ABSTRACT Abstracts will be from 200 words to 300 words. Abstracts will not appear in the Proceedings. Each accepted abstract will be given a presentation time slot. For more information on ISMI 2015, please feel free to contact the General Chair, Professor James R. Morrison (james.morrison@kaist.edu) or General Co-Chairs, Young Jae Jang (yjang@kaist.edu), Jei-Zheng Wu (jzwu@scu.edu.tw). This research is supported by National Science Council, Taiwan (NSC 103-2622-E-007-002; NSC 102-2221-E-007-057-MY3), Hsinchu Science Park (102A26), the Toward World Class University Project from Ministry of Education (102N2075E1), and Taiwan Semiconductor Manufacturing Company (102A0287JC). J.-Z. Wu is with the NTHU-TSMC Center for Manufacturing Excellence, National Tsing Hua University, Taiwan J. Morrison and Young Jae Jang are with Department of Industrial & Systems Engineering, KAIST, South Korea. 1