Background Statement for SEMI Draft Document 5825
REAPPROVAL FOR SEMI E34-1110, SAFETY GUIDELINE FOR MASS
FLOW DEVICE REMOVAL AND SHIPMENT
Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in
reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.
Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant
patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this
context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the
latter case, only publicly available information on the contents of the patent application is to be provided.
Background
SEMI E34-1110 is due for Five Year Review. At the North America (NA) Standards Fall 2014 Meetings, the NA
Environmental Health & Safety (EHS) Committee approved the letter ballot distribution for the reapproval of SEMI
E34.
This ballot is a reapproval ballot for the full E34 document, and voters are welcome to submit comments against any
section therein if they do not believe E34 should be reapproved as is. This reapproval ballot is being submitted to
provide more of the industry an opportunity to identify material they believe should be updated or corrected in this
document.
For your reference, the attached text of the E34 Standard contains only the following sections: Purpose, Scope,
Referenced Standards and Documents, and Terminology. If you would like a complete copy of SEMI E34 in order
to vote on this ballot, please request a copy by email from Paul Trio at ptrio@semi.org at least three business days
before the voting deadline.
Review and Adjudication Information
Task Force Review
Review of SEMI E34, S5, and S27
Reapproval Ballots
Monday, March 30, 2015
Date:
Time & Timezone: 10:30 AM to 12:00 Noon, Pacific Time
SEMI Headquarters
Location:
3081 Zanker Road
City, State/Country: San Jose, California 95134 / U.S.A.
Facilitator: Eric Sklar (Safety Guru, LLC)
Leader(s):
Group:
Committee Adjudication
NA EHS Committee
Thursday, April 2, 2015
9:00 AM to 6:00 PM, Pacific Time
SEMI Headquarters
3081 Zanker Road
San Jose, California 95134 / U.S.A.
Chris Evanston (Salus)
Sean Larsen (Lam Research)
Bert Planting (ASML)
Paul Trio (SEMI NA)
Paul Trio (SEMI NA)
Standards Staff:
408.943.7041 /ptrio@semi.org
408.943.7041 / ptrio@semi.org
This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact
Standards staff for confirmation.
Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will
not be able to attend these meetings in person but would like to participate by telephone/web, please contact
Standards staff.
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
SEMI Draft Document 5825
REAPPROVAL FOR SEMI E34-1110, SAFETY GUIDELINE FOR MASS
FLOW DEVICE REMOVAL AND SHIPMENT
1 Purpose
1.1 This Safety Guideline provides procedures to reduce the risk associated with removing, shipping, and receiving
mass flow devices that have been exposed to hazardous materials.
NOTE 1: Mass flow devices (mass flow controllers and mass flow meters) are used as an integral part of the chemical delivery
systems in semiconductor, flat panel, and solar cell and panel processing equipment. Many of the chemicals used in the associated
processes are hazardous to personnel and can damage equipment. Once exposed to these chemicals, a contaminated mass flow
device can present a hazard to personnel and might damage equipment.
1.2 This Safety Guideline is intended to:
1.2.1 Encourage the purging of devices used with hazardous materials prior to removal to reduce the risk of chemical
injury and equipment damage while handling them.
1.2.2 Establish a process for properly identifying and documenting such mass flow devices by using an orange tag
and a health and safety disclosure form.
1.2.3 Establish a means of alerting the recipients of such mass flow devices to the hazards.
2 Scope
2.1 This Safety Guideline applies to mass flow devices that have been exposed to hazardous materials.
NOTICE: This safety guideline does not purport to address all of the safety issues associated with its use. It is the
responsibility of the users of this safety guideline to establish appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior to use.
3 Referenced Standards and Documents
3.1 None.
4 Terminology
4.1 Definitions
4.1.1 hazardous materials — any chemical, substance, or compound which is defined or interpreted to pose risks or
hazards to human health or the environment by applicable international, national, regional, or local laws or regulations.
[SEMI S12]
4.1.2 mass flow controller (MFC) — a self-contained device, consisting of a mass flow transducer, control valve, and
control and signal-processing electronics, commonly used in the semiconductor industry to measure and regulate the
mass flow of gas.
4.1.3 mass flow device — a mass flow controller or mass flow meter.
4.1.4 mass flow meter (MFM) — a self-contained device, consisting of a mass flow transducer and signal-processing
electronics, commonly used in the semiconductor industry to measure the mass flow of gas.
4.1.5 material safety data sheet (MSDS) — written or printed material concerning chemical elements and compounds,
including hazardous materials, prepared in accordance with applicable standards. [SEMI S2]
4.1.6 protective container — a sealable plastic bag or other container which will keep hazardous material from the
mass flow device from contaminating the outer package.
4.1.7 purge — to remove hazardous material from, or dilute hazardous material in, a device by flowing an inert gas
through the device.
NOTE 2: Purging a chemical delivery line containing a mass flow device with an inert substance is intended to dilute or displace
hazardous materials and reduce the level of risk. To be effective, the inert substance must be able to reach all points within the
chemical delivery system in sufficient quantity to dilute or displace the hazardous material to acceptable levels. The nature of the
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone: 408.943.6900, Fax: 408.943.7943
hazardous material and the physical configuration of the chemical delivery system must be considered when developing a purge
procedure.
NOTICE: Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as
to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The
determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are
cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature,
respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change
without notice.
By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights
or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this
Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights, and the
risk of infringement of such rights are entirely their own responsibility.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development)
activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Date: 2/10/2016