Super hydrophobic films synthesis by PECVD and mechanical & chemical properties of the film Joon S. Lee, Su B. Jin, Yoon S. Choi and In S. Choi, Jeon G. Han Center for Advanced Plasma Surface Technology, Institute for Plasma-Nano Materials, Sungkyunkwan University, 300 Chunchun-dong Jangan-gu, Suwon, Korea e-mail: platinum87@skku.edu Abstract Super-hydrophobic surface has a contact angle greater than 150°. Due to the high contact angle, very small amount of water droplet comes into contact with the surface. So super-hydrophobic properties have attracted much interested for both fundamental research and applications. The applications include self-cleaning, anti-fingerprint, prevention of snow sticking, anti-fog, etc. Designing and creating hydrophobic surfaces through adjusting the chemical composition as well as the morphology of the surfaces has become a focus in the field of material sciences. Hydrophobic properties of materials are usually obtained by padding or coating processes using silicon or fluorine compounds. But current hurdle is film deposition at low process temperature less than 100 C especially for polymer treatment, because of the melting temperature of polymer is very low. Hydrophobic film is deposited by PECVD process with RF plasma discharge which is independently modulated for plasma parameter control. Precursors which are commercially available are used for film synthesis such as OMCTS, HMDSO, HMDS, TEOS, etc. The typical film system for hydrophobic film synthesis on polymers including PET and PC is comprised of interlayer coating of hard coating such as SiOx and top coating of hydrophobic film. Surface chemistry is analyzed by FTIR. Surface morphology change is analyzed by AFM. Hydrophobic property changes are evaluated with boiling test at elevated salty water, pencil hardness test and cosmetic cream test etc. Keywords: PECVD, hydrophobic film, HMDS precursor