Gas Filtration Metal
Data Sheet A94a
Gasket-Sert™ PSP Filter
Description
Specifications
The Gasket-Sert PSP filter is designed
to protect major components of gas
panels employed in semiconductor gas
distribution systems.
Materials
Operating Conditions
• Medium and gasket: 316L stainless
steel
• True in-line design and easy
installation
• Alignment retainer for ease of
installation
• Fits in place of standard 1⁄4 ˝ VCR1
or 1⁄4 ˝ UJR compatible gasket
• Broad compatibility with process
gases
• Low differential pressure
• All 316L stainless steel construction
• Dried with high purity nitrogen
• Cleanroom packaged
• No hold-up volume
• No particle contribution above
background
• No housing required
• Retrofit of existing panels without
reconfiguring of systems
• Zero displacement
• Protection for regulators and MFCs
• ≥ 0.4 µm at 99.9% efficiency
• Recommended flow range:
0-28 slpm / 0-1 scfm
• Maximum operating temperature:
Inert gases: 300°C / 572°F
Anhydrous corrosive gases:
30°C / 86°F
• Maximum differential pressure:
Inside out:
690 kPa @ 20°C / 100 psid @ 68°F
Outside in:
1380 kPa @ 20°C / 200 psid @ 68°F
Removal Rating
1 VCR is a trademark of Swagelok Co.
Pressure Drop vs. Gas Flow Rate
Flow Rate (scfm) @ 20˚C/68˚F
30
10
20
Flow Rate (scfm) @ 20˚C/68˚F
0.0
0.25
0.75
0.5
40
0
1.0
50
20
4
1.5
10
1.0
5
0.5
620 kPa inlet/90 psig
0
0.0
0
7
14
21
3
20
10.3 Mpa inlet/1500 psig
15
2
10
1
5
20.7 Mpa inlet/3000 psig
0
0
0
28
1000
500
Clean Pressure Drop (psid)
2.0
206 kPa inlet/30 psig
Clean Pressure Drop (kPa)
15
25
Clean Pressure Drop (psid)
Clean Pressure Drop (kPa)
2.5
1500
Flow Rate (slpm) @ 20˚C/68˚F
Flow Rate (slpm) @ 20˚C/68˚F
Dimensions
24.5 mm
.96"
4.0 mm
.16"
12.7 mm
.50"
3.30 mm
.13"
Part Numbers/Ordering Information
Part Number
Material of Construction
Fitting Type
CNF1104USG4
All 316L stainless steel
1
⁄4 ˝ VCR or 1⁄4 ˝ UJR
Unit conversion: 1 bar = 100 kilopascals
25 Harbor Park Drive
Port Washington, New York 11050 USA
1.800.360.7255 toll free (Only in US)
1.516.484.5400 phone
1.516.625.3610 fax
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world in locations including:
Argentina, Australia, Austria, Belgium, Brazil, Canada, China, France, Germany, Hong Kong,
India, Indonesia, Ireland, Italy, Japan, Korea, Malaysia, Mexico, the Netherlands, New Zealand,
Norway, Poland, Puerto Rico, Russia, Singapore, South Africa, Spain, Sweden, Switzerland,
Taiwan, Thailand, United Kingdom, United States, and Venezuela. Distributors are located in
all major industrial areas of the world.
© Copyright 2006, Pall Corporation. Pall,
trademark registered in the USA.
A94a
, and Gasket-Sert are trademarks of Pall Corporation. ® Indicates a Pall
is a service mark of Pall Corporation.