Gas Filtration – Metal
Data Sheet MEGPSPSWEN
Gasket-Sert™ PSP Filter
1 1/8˝ W-seal
Description
Specifications
The Gasket-Sert PSP W-seal filter is
designed to protect major components
of gas panels in semiconductor gas
distribution systems. The W-seal gasket
is easy to install into any system that uses
W-seal-type components.
Feature
Benefit
Value
Welded to W-seal gasket
Filter can replace any W-seal gasket
Lower installation
cost
Contains alignment retainer
Easy installation into system with
minimal operator handling
Lower labor cost
All stainless steel
construction
Broad compatibility with semiconductor
process gases
Long service life
No housing required
No hold-up volume and zero gas
displacement
Faster start-up time
Cleanroom packaged
High level of cleanliness
Faster start-up time
0.4 µm particle removal
rating
Filter protects critical components such
as regulators and MFCs
Lower cost of
ownership
Low differential pressure
High flow rates with minimal flow
restriction
Long service life
Wetted Materials
• Medium: 316L stainless steel (filter
and gasket)
Removal Rating1
• ≥0.4 µm at 99.9% efficiency
Operating Conditions
• Maximum operating temperature
Inert gases: 300˚C / 572˚F
Anhydrous corrosive gases: 30˚C / 86˚F
• Maximum differential pressure
Inside out:
0.7 MPa at 38˚C / 100 psid at 100˚F
Outside in:
1.4 MPa at 38˚C / 200 psid at 100˚F
1 Particle rating is based on laboratory testing with
NaCl aerosol.
Pressure Drop vs. Gas Flow Rate
W-seal Gasket-Sert PSP Filter
Flow rate (scfm) Air @ 20˚C / 68˚F
0.0
0.25
0.75
0.5
1.0
3.0
20
103 kPa inlet / 15 psig
15
2.0
10
206 kPa inlet / 30 psig
1.0
5
552 kPa inlet / 80 psig
0
0
7
14
21
28
0
Clean pressure drop (psid)
Clean pressure drop (kPa)
25
Flow rate (slpm) Air @ 20˚C / 68˚F
Dimensions
24.7 mm
0.97 in
2.6 mm
0.102 in
7.78 mm 3.2 mm
0.306 in 0.13 in
3.3 mm
0.13 in
Flow
Part Numbers / Ordering Information
Part Number
Wetted Materials of Construction
Fitting Type
CNF1104UPSG2
All 316L stainless steel
1 1⁄8 ˝ W-seal gasket
Unit conversion: 100 kilopascals = 1 bar
25 Harbor Park Drive
Port Washington, NY 11050
+1 800 360 7255 (only in US)
+1 516 484 3600 phone
microelectronics@pall.com
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world. For Pall representatives
in your area, please go to www.pall.com/contact.
Because of technological developments related to the products, systems, and/or
services described herein, the data and procedures are subject to change without
notice. Please consult your Pall representative or visit www.pall.com to verify that this
information remains valid.
© Copyright 2009, Pall Corporation. Pall,
, and Gasket-Sert are trademarks of Pall Corporation.
® Indicates a Pall trademark registered in the USA.
is a service mark of
Pall Corporation.
MEGSPSPWEN
August 2009