Gas Filtration Assemblies — Metal
Data Sheet A89a
Gaskleen® TM Filter
Assemblies 11⁄2 ˝ C-Seal
Description
Specifications
Pall's Gaskleen Top Mount (TM) filter
assemblies are designed for ≥ 3
nanometer filtration of semiconductor
process gases. The top mount filter is
well-suited for integrated gas delivery
systems, providing easy access and
change out.
Materials
Operating Conditions
• 316L stainless steel housing
• State-of-the-art nickel filter
• Housing meets or exceeds typical
VIM / VAR specifications
• Cr:Fe (1:1) chromium-enriched
internal surface chemistry
• ≤ 10 µin / 0.25 µm Ra internal surface
finish
• Maximum operating pressure:
5.2 MPa @ 100°C / 750 psig @ 212°F
• Maximum allowable differential
pressure:
0.69 MPa @ 38°C / 100 psid @ 100°F
• 316L stainless steel housing
• State-of-the-art nickel filter medium
• High temperature and pressure
capabilities
• Excellent gas displacement and
desorption characteristics
• 100% helium leak tested
• Manufactured and packaged in a
cleanroom environment
• No downstream welds
• Minimum downstream volume
Removal Rating
• ≥ 3 nm
Particle Removal Characteristics
• 109 particle reduction at rated flow of
100 slpm
Connections
• C-Seal, 11⁄2 ˝ interface
Leak Rating
• 100% helium leak tested to
10-9 atm•cm3/s
• Design validated to 10-11 atm • cm3/s
Dimensions
Pressure Drop vs. Gas Flow Rate*
Flow rate (scfm) Air 20˚C / 68˚F
1
0
W
2
3
30.2 mm
1.19 in
14
12
80
103 kPa / 15 psig inlet
10
60
8
6
40
4
20
483 kPa / 70 psig inlet
0
2
0
0
20
40
60
80
Clean pressure drop (psid)
Clean pressure drop (kPa)
100
H
38.1 mm
1.50 in
Top view
8 mm
0.32 in
Side view
100
Flow rate (slpm) Air 20˚C / 68˚F
F
Part Numbers / Ordering Information
Part Number
Description
Height (H)
(mm / in)
Width (W)
(mm / in)
Design Flow
Rate (slpm)
GTMN4600CC4
316L stainless steel housing
Nickel filter
75.9 / 2.99
33.8 / 1.33
0 – 100
25 Harbor Park Drive
Port Washington, New York 11050
1.800.360.7255 toll free US
1.516.484.3600 phone
1.516.801.9711 fax
microelectronics@pall.com
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/contact
Because of technological developments related to the products, systems, and/or services
described herein, the data and procedures are subject to change without notice. Please
consult your Pall representative or visit www.pall.com to verify that this information remains
valid. Products in this document may be covered by the following patent number: US 1,105,201
© Copyright 2007, Pall Corporation. Pall,
trademark registered in the USA.
A89a
, and Gaskleen are trademarks of Pall Corporation. ® Indicates a Pall
is a service mark of Pall Corporation.
November 2009