Data Sheet A75c
Gaskleen® TM Filter
Assemblies 11⁄8" C-Seal
Description
Pall’s Gaskleen Top Mount (TM) filter assemblies are
designed for ≥ 3 nanometer (nm) filtration of semiconductor
process gases. The top mount filter is ideally suited for
integrated gas delivery systems, providing easy access
and changeout.
Gaskleen TM 1013 Series Assembly
• 316 L stainless steel housing
• State-of-the-art 316 L stainless steel or nickel filter
• High temperature and pressure capabilities
• Excellent gas displacement and desorption
characteristics
• 100% helium leak tested
• Manufactured and packaged in a cleanroom
environment
Gaskleen TM 3600 Series Assembly
• 316 L stainless steel housing
• State-of-the-art nickel filter medium
• High temperature and pressure capabilities
• Excellent gas displacement and desorption
characteristics
• 100% helium leak tested
• Manufactured and packaged in a cleanroom
environment
Gaskleen TM 3101 Series Assembly
• 316L stainless steel housing
• All fluoropolymer element
• Medium: PTFE
• Core and end caps: PFA
• O-ring: FEP encapsulated fluorocarbon
• High temperature and pressure capabilities
• 100% integrity tested
• 100% helium leak tested
• Manufactured and packaged in a cleanroom
environment
Specifications
Materials
• 316 L stainless steel housing
• Housing exceeds typical VIM / VAR
specifications
• Cr:Fe (2:1) Chromium enriched internal
surface chemistry
• ≤ 0.13 μm / 5 μin Ra internal surface
finish
Removal Rating • ≥ 3 nm
Particle Removal • 1013 Series: 10 9 reduction at rated flow
Characteristics
of 5 slpm for stainless steel and 3 slpm
for nickel
• 3101 Series: 10 9 reduction at rated flow
of 75 slpm
• 3600 Series: 10 9 reduction at rated flow
of 50 slpm
Connections
• C-seal, 11⁄8 ˝ interface
Leak Rating
• 100% helium leak tested to
10-9 atm • cm3/s
• Design validated to 10-11 atm • cm3/s
Operating
Conditions
• Maximum operating pressure
3.5 MPa @ 100°C / 500 psig @ 212°F
• Maximum allowable differential pressure
1013 and 3600 series:
0.7 MPa @ 38˚C / 100 psid @ 100˚F
3101 series:
0.6 MPa @ 121˚C / 80 psid @ 250˚F
Air Flow vs. Pressure Drop
207 kPa / 30 psig
2
620 kPa / 90 psig
10
1
5
2
1
3
0
Flow rate (slpm) Air 20˚C / 68˚F
5
4
0
207 kPa / 30 psig Inlet
6
4
20
2
10
620 kPa / 90 psig Inlet
50
25
75
0
Flow rate (slpm) Air 20˚C / 68˚F
100
0
Clean pressure drop (kPa)
8
30
0
207 kPa / 30 psig
15
2
10
620 kPa / 90 psig
1
5
0
3
2
1
0
Flow rate (slpm) Air 20˚C / 68˚F
Flow rate (scfm) Air 20˚C / 68˚F
0.5
1.0
0.0
50
4.0
3.0
Clean pressure drop (psid)
Clean pressure drop (kPa)
Flow rate (scfm) Air 20˚C / 68˚F
2.0
0.0
1.0
60
40
3
20
0
GTMN1013CC4
GTMF1013CC4
50
4
25
GTMP3101CC4
1.5
6
40
30
4
207 kPa / 30 psig
20
2
10
620 kPa / 90 psig
0
20
10
30
0
Flow rate (slpm) Air 20˚C / 68˚F
40
50
0
Clean pressure drop (psid)
0
Clean pressure drop (kPa)
3
20
0.10
Clean pressure drop (psid)
4
25
15
Flow rate (scfm) Air 20˚C / 68˚F
0.00
0.05
30
0.15
Clean pressure drop (psid)
Clean pressure drop (kPa)
Flow rate (scfm) Air 20˚C / 68˚F
0.05
0.10
0.00
30
GTMN3600CC4
Dimensions
21.69 mm
0.85 in
22.1 mm
0.87 in
21.7 mm
0.856 in
28.45 mm
1.12 in
79.5 mm
3.13 in
74.4 mm
2.93 in
40.2 mm
1.58 in
•
Top view for all parts
28.57 mm
1.125 in
N1013 / F1013
•
•
6.6 mm
0.26 in
P3101
6.6 mm
0.26 in
N3600
6.6 mm
0.26 in
Part Numbers / Ordering Information
Part Number
Description
Height
(mm / in)
Shell Diameter
(mm / in)
Design Flow
Rate (slpm)
GTMF1013CC4
All 316 L stainless steel
35.6 / 1.4
22.1 / 0.87
0–5
GTMN1013CC4
316 L stainless steel housing
Nickel filter
35.6 / 1.4
22.1 / 0.87
0–3
GTMP3101CC4
316 L stainless steel housing
All fluoropolymer element
75.5 / 2.98
22.1 / 0.87
0 – 75
GTMN3600CC4
316 L stainless steel housing
Nickel filter
75.7 / 2.98
28.57 / 1.125
0 – 50
Microelectronics
25 Harbor Park Drive
Port Washington, New York 11050
+1 516 484 3600 telephone
+ 1 800 360 7255 toll free US
microelectronics@pall.com
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world. For Pall representatives in your
area, please go to www.pall.com/contact
Because of technological developments related to the products, systems, and/or services
described herein, the data and procedures are subject to change without notice. Please
consult your Pall representative or visit www.pall.com to verify that this information remains
valid. Products in this document may be covered by the following patent number: US 1,105,201
© Copyright 2007, 2012, Pall Corporation. Pall,
Pall trademark registered in the USA.
A75c
, and Gaskleen are trademarks of Pall Corporation. ® Indicates a
is a service mark of Pall Corporation.
June 2012