Data Sheet E32b
Gas Filtration Metal
Product shown larger than actual size
Gasket-Sert ™ Filter
Description
Specifications
The Gasket-Sert filter is designed to
protect major components of gas panels
employed in semiconductor gas distribution systems.
Materials
Operating Conditions
• Medium: 316L or Hastelloy C-22
• Gasket: Nickel 200
• Recommended Flow Range:
0-10 SCFM/0-280 slpm
• Maximum Operating Temperature:
Non-Corrosive Gases: 840°F / 450°C
Corrosive Gases: 70°F / 21°C
• Maximum Differential Pressure:
400 psid @ 840°F / 27 bar @ 450°C
750 psid @ 100°F / 52 bar @ 38°C
Removal Rating
• True in-line design and easy installation
• Fits in place of standard 1⁄4" VCR
Gasket
• Available in 316L or Hastelloy C-22
• Gasket material Nickel 200
• Broad compatibility with process gases
• Low differential pressure
• All metal construction
• Dried with high purity nitrogen
• Cleanroom packaged
• No particle contribution above
background
• No housing required
• Retrofit of existing panels without
reconfiguring of systems
• Zero displacement
• Protection for regulators and MFCs
• ≥ 0.4 µm
Pressure Drop vs. Gas Flow Rate
1000
800
10
600
30 psig/2.1 mbar inlet
400
5
100 psig/6.9 mbar inlet
0
0
0.2
0.4
0.6
0.8
200
1.0
0
Clean Pressure Drop (psid)
15
5
300
4
200
3
1500 psig/103.4 mbar inlet
2
100
1
0
2
0
4
6
8
10
0
Clean Pressure Drop (mbar)
Flow Rate (slpm) Air @ 20˚C/68˚F
100
0
200
25
20
Clean Pressure Drop (mbar)
Clean Pressure Drop (psid)
Flow Rate (slpm) Air @ 20˚C/68˚F
5
0
15
10
Flow Rate (scfm) Air @ 20˚C/68˚F
Flow Rate (scfm) Air @ 20˚C/68˚F
Dimensions
1.03"
26 mm
0.5"DIA 0.125"DIA
12.7 mm
3 mm
0.12"DIA
3 mm
0.18"DIA
4.5 mm
Flow
Part Numbers/Ordering Information
Part Number
Material of Construction
Fitting Type
CNL3004VNG4
316L Stainless Steel Media, Nickel 200 Gasket
1
CNC3004VNG4
Hastelloy C-22 Media, Nickel 200 Gasket
1
⁄4" VCR
⁄4" VCR
Unit conversion: 1 bar = 100 kilopascals
2200 Northern Boulevard
East Hills, New York 11548-1289 USA
1.800.360.7255 toll free (Only in US)
1.516.484.5400 phone
1.516.625.3610 fax
Visit us on the Web at www.pall.com/micro
Pall Corporation has offices and plants throughout the world in locations including:
Argentina, Australia, Austria, Belgium, Brazil, Canada, China, France, Germany, Hong Kong,
India, Indonesia, Ireland, Italy, Japan, Korea, Malaysia, Mexico, the Netherlands, New Zealand,
Norway, Poland, Puerto Rico, Russia, Singapore, South Africa, Spain, Sweden, Switzerland,
Taiwan, Thailand, United Kingdom, United States, and Venezuela. Distributors are located in
all major industrial areas of the world.
© Copyright 2004, Pall Corporation. Pall,
registered in the USA.
E32b
are trademarks of Pall Corporation. ® Indicates a Pall trademark
is a service mark of Pall Corporation.