Data Sheet A100
Gas Filtration Assemblies-Metal
Ultramet-L® 4281, 4581 Series Assembly
Description
Specifications
The Ultramet-L® 4281/4581 Series Filter
Assemblies are available with an all 316L
stainless steel housing and either a
316L stainless steel or nickel filter. They
are designed for ≥ 3 nanometer (0.003 µm)
filtration of semiconductor grade gases.
The 4281/4581 series filters are recommended for all applications with process
gases that are compatible with 316L
stainless steel or nickel. For applications
with corrosive gases, such as halogen
containing acid gases, the nickel filter
assembly is recommended only if the gas
is known to be anhydrous.
Materials
Operating Conditions
• Electropolished 316L stainless steel
housing
• 10 µin / 0.25 µm Ra internal surface
finish
• Housing material meets or exceeds
typical VIM VAR specifications
• 316L stainless steel or nickel filter
media
• Maximum Operating Pressure:
3,000 psig @ 100°F / 207 bar @ 38°C;
1,685 psig @ 840°F / 116 bar @ 450°C
• Maximum Allowable Differential
Pressure:
125 psid @ 100°F / 8.6 bar @ 38°C;
60 psid @ 840°F / 4.1 bar @ 450°C
• EU Pressure Equipment Directive:
Assemblies have been evaluated and
are CE marked per the European
Union’s Pressure Equipment Directive
97/23/EC
• State-of-the-art 316L stainless steel
or nickel media
• Excellent particle removal efficiency vs.
pressure drop
• Accommodates extremely high flow
rates for the assembly size
• Excellent gas displacement and
desorption characteristics
• High temperature and pressure
capabilities
• Compact size for ease of installation
• Wide variety of fitting options
available
• 100% helium leak tested
• Cleanroom manufactured and
packaged
• Housing material meets or exceeds
VIM VAR specifications.
Removal Rating
• ≥0.003 µm
Connections
• 1⁄4" Gasket Seal, male
(VCR1 or compatible)
• Other fitting configurations available,
please contact Pall
Particle Removal Characteristics
• 4281 series:
109 particle reduction up to
6 slpm / 0.2 scfm
104 particle reduction up to
75 slpm / 2.6 scfm
• 4581 series:
109 particle reduction up to
50 slpm / 1.76 scfm
Leak Rating
• 100% helium leak tested to
10-9 atm • cm3/sec
• Design validated to 10-11 atm • cm3/sec
1
VCR is a trademark of Swagelok Co.
Pressure Drop vs. Gas Flow Rate
GLFF4581VMM4
30 psig / 2.1 bar Inlet
3
0.2
2
0.1
1
80 psig / 5.5 bar Inlet
0.0
0
0
25
50
Flow Rate (slpm) Air 20C / 68F
1.5
10
0.6
8
2.1 kg/cm2 (30 psig)
6
0.4
4
0.2
5.6
kg/cm2
(80 psig)
2
0
0.0
0
10
20
30
Flow Rate (slpm) Air 20C / 68F
75
40
50
Dimensions
GLFN4581VMM4
GLFF4281VMM4
Flow Rate (scfm) Air 20C / 68F
(SCFM) 20º C 1.5
0.0
0.5 Flow Rate1.0
0.0
0.5
1.0
1.5
2.0
12
0.8 0.30
10 4
2.1 kg/cm2 (30 psig) inlet
0.6
8
2.1 kg/cm 2 (30 psig) inlet
0.20
6
0.4
4
0.2 0.10
2
5.6 kg/cm2 (80 psig) inlet
5.6 kg/cm2 ( 80 psig) inlet
0.0
0
00.00
Clean Pressure Drop (psid)
Clean Pressure Drop (kg/cm2)
Flow Rate (scfm) Air 20C / 68F
0.0
1.0
0.5
0.8
Clean Pressure Drop (psid)
4
Clean Pressure Drop (kg/cm2)
2.0
Clean Pressure Drop (psid)
Clean Pressure Drop (kg/cm2)
GLFF4281VMM4
Flow Rate (scfm) Air 20C / 68F
0.0
1.0
1.5
0.5
0.3
10
20
30
Flow0Rate (slpm) Air 25
20˚C / 68˚F
40
50
50
1.30"
33mm
3
2
1
3.31"
84mm
0
75
Flow Rate (SLPM) Air 20º C
Part Numbers/Ordering Information
Part Number
Description
Fitting Type
GLFF4281VMM4
All Stainless Steel
1
GLFF4581VMM4
All Stainless Steel
1
GLFN4581VMM4
Nickel Media, 316L Stainless Steel Housing
1
⁄4" Gasket Seal (VCR or Compatible)
Male / Male
⁄4" Gasket Seal (VCR or Compatible)
Male / Male
⁄4" Gasket Seal (VCR or Compatible)
Male / Male
Unit conversion: 1 kilogram per square centimeter = 98.067 kilopascals
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East Hills, New York 11548-1289 USA
1.800.360.7255 toll free (Only in US)
1.516.484.5400 phone
1.516.625.3610 fax
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© Copyright 2004, Pall Corporation. Pall,
registered in the USA.
A100
are trademarks of Pall Corporation. ® Indicates a Pall trademark
is a service mark of Pall Corporation.