EE 5340 Semiconductor Device Theory Lecture 15 - Fall 2009 Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc Minority hole lifetimes Mark E. Law, E. Solley, M. Liang, and Dorothea E. Burk, “SelfConsistent Model of Minority-Carrier Lifetime, Diffusion Length, and Mobility, IEEE ELECTRON DEVICE LETTERS, VOL. 12, NO. 8, AUGUST 1991 The parameters used in the fit are τo = 10 μs, Nref = 1×1017/cm2, and CA = 1.8×10-31cm6/s. τp L 15 Oct 13 τo 1 ND Nref τ oC AND2 2 Minority electron lifetimes Mark E. Law, E. Solley, M. Liang, and Dorothea E. Burk, “SelfConsistent Model of Minority-Carrier Lifetime, Diffusion Length, and Mobility, IEEE ELECTRON DEVICE LETTERS, VOL. 12, NO. 8, AUGUST 1991 The parameters used in the fit are τo = 30 μs, Nref = 1×1017/cm2, and CA = 8.3×10-32 cm6/s. τn L 15 Oct 13 τo 1 ND Nref τ oC AND2 3 References for Part A: Based on the information in these resources, decide which model formulae and parameters are the most accurate for Dn and Ln for electrons in p-type material, and Dp and Lp holes in n-type material. 1. Device Electronics for Integrated Circuits, 3rd ed., by Richard S. Muller, Theodore I. Kamins, and Mansun Chan, John Wiley and Sons, New York, 2003. 2. Mark E. Law, E. Solley, M. Liang, and Dorothea E. Burk, “Self-Consistent Model of MinorityCarrier Lifetime, Diffusion Length, and Mobility, IEEE ELECTRON DEVICE LETTERS, VOL. 12, NO. 8, AUGUST 1991. 3. Note: This article is removed from the list and items 6 and 7 are added. D.B.M. Klaassen; “A UNIFIED MOBILITY MODEL FOR DEVICE SIMULATION”, Electron Devices Meeting, 1990. Technical Digest., International 9-12 Dec. 1990 Page(s):357 – 360. 4. David Roulston, Narain D. Arora, and Savvas G. Chamberlain “Modeling and Measurement of Minority-Carrier Lifetime versus Doping in Diffused Layers of n+-p Silicon Diodes”, IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. ED-29, NO. 2, FEBRUARY 1982, pages 284-291. 5. M. S. Tyagi and R. Van Overstraeten, “Minority Carrier Recombination in Heavily Doped Silicon”, Solid-State Electr. Vol. 26, pp. 577-597, 1983. Download a copy at Tyagi.pdf. 6. D.B.M. Klaassen, “A Unified Mobility Model for Device Simulation – I. Model Equations and Concentration Dependence”, Solid-State Electr. Vol. 35, pp. 953-959, 1992. See below. 7. D.B.M. Klaassen, “A Unified Mobility Model for Device Simulation – II. Temperature Dependence of Carrier Mobility and Lifetime”, Solid-State Electr. Vol. 35, pp. 961-967, 1992. Download at DbmK.pdf. L 15 Oct 13 4 Taken from Synopsys [1] manual L 15 Oct 13 5 Taken from Synopsys [1] Table 3-6. Default … parameters – L 15 Oct 13 6 Part of a SPICE model for the Motorola 1N5233 Zener diode is shown in Table 1. For purposes of this assignment, this means that 1. IS may be interpreted as the multiplier of the (exp(vD/NVt) – 1) term in the diffusion current. 2. The multiplier of the exp(vD/(NRVt)) term in the recombination current may be interpreted as ISR. 3. The M value implies that this is essential a step diode. L 15 Oct 13 7 Table 1. A SPICE model for the Motorola 1N5233 diode .model D1N5233 Is=629E-18 Rs=1.176 N=1 Xti=3 Eg=1.11 L 15 Oct 13 Cjo=140p M=.5369 Vj=.75 Isr=1.707n Nr=2 BV = 6 8 Use the information given to make the best estimate of the following: 1. Diode area. 2. Concentration of donors or acceptors on the lightly doped side. Support your conclusion as to the type of Si on the lightly doped side. 3. Concentration and type of the heavily doped side. 4. Estimate the value IKF might have. The multiplier of the exp(vD/(2NVt)) term in the high level injection current may be interpreted as √(IS×IKF). 5. Length of the charge neutral region on the lightly doped side. 6. Show that the estimates are self-consistent for all regions of diode operation – especially capacitance, BV, recombination, and diffusion ranges. L 15 Oct 13 9 Injection Conditions Va - Vbi giving pno pn ppo exp Vt Va -Vbi -Vbi pn ppoe Vt pno , pno ppoe Vt , Va so pn pno exp 1, at x xn Vt Va sim. np npo exp 1, at x xp V t L 15 Oct 13 10 Ideal Junction Theory • • • • • Assumptions Ex = 0 in the chg neutral reg. (CNR) MB statistics are applicable Neglect gen/rec in depl reg (DR) Low level injection applies so that np < ppo for -xpc < x < -xp, and pn < nno for xn < x < xnc Steady State conditions L 15 Oct 13 11 Ideal Junction Theory (cont.) p n In the steady state (static) case, 0 , and t t applying the Continuity Equation to the CNR p dp 1 0 Jp , x n x x nc , and t dt q n dn 1 0 Jn , - x pc x x p t dt q L 15 Oct 13 12 Ideal Junction Theory (cont.) dn Since Ex 0 in the CNR, Jnx qDn dx dp and Jpx qDp giving dx d2 pn dx2 2 pn 0, for xn x xnc , and Dp p d np dx L 15 Oct 13 2 np Dn n 0, for - xpc x xp 13 Ideal Junction Theory (cont.) 2 2 Define Ln Dn n and Lp Dp p . So pn x Ae x Lp Be x np x Ce Ln De x x Lp , xn x xnc Ln , - x x x . pc p pn xn np xp Va Vt with B.C. e 1, pno npo and pn xnc np xpc 0, (contacts) L 15 Oct 13 14 Diffusion Length model Diffusion Length, L (microns) 1000.0 electrons holes 100.0 10.0 1.0 L = (D)1/2 Diffusion Coeff. is Pierret* model min 45 sec 2 1 7.7E 18Nim 4.5E 36Nim 0.1 1.E+13 1.E+14 1.E+15 1.E+16 1.E+17 1.E+18 1.E+19 1.E+20 Doping Concentration (cm^-3) L 15 Oct 13 15 Excess minority carrier distr fctn For xn x xnc , Wn xnc xn , sinh xnc x Lp Va V e t 1 pn x pno sinh Wn Lp and for - xpc x xp , Wp xpc xp , sinh x xpc Ln Va V e t 1 np x npo sinh Wp Ln L 15 Oct 13 16 Forward Bias Energy Bands nnon equil ni expEFn EFi / kT n p n p 0 eVa Vt 1 q(Vbi-Va) Imref, EFn Ec EFN EFi EFP qVa Imref, EFp pnon equil ni exp EFi EFp / kT pn pn 0 eVa -xpc L 15 Oct 13 -xp 0 xn Ev Vt xnc 1 x 17 Carrier Injection ln(carrier conc) ln Na Va V t np xp npo e 1 ~Va/Vt ln Nd Va V t pn xn pno e 1 ln ni ~Va/Vt ln ni2/Nd ln ni2/Na -xpc L 15 Oct 13 -xp 0 xn x xnc 18 Minority carrier currents Jp x dpn qDp dx , 2 qni Dp for xn x xnc cosh xnc x Lp Va V e t 1 NdLp sinh Wn Lp Jn x qDn d np dx , for - xpc x xp cosh x xpc Ln Va V e t 1 NaLn sinh Wp Ln L 15 Oct 13 qni2Dn 19 Evaluating the diode current Assu min g no gen/rec in DR, then Va V J Jp xn Jn xp Js e t 1 where Js Jsn Jsp with definitions Jsn / sp L 15 Oct 13 2 qni Dn / p Na / dLn / p coth Wp / n Ln / p 20 Special cases for the diode current Long diode : Wn Lp , or Wp Ln Jsn 2 qni Dn 2 Dp , and Jsp qni NaLn NdLp Short diode : Wn Lp , or Wp Ln Jsn L 15 Oct 13 qni2 Dn 2 Dp , and Jsp qni NaWp NdWn 21 Ideal diode equation • Assumptions: – – – – – low-level injection Maxwell Boltzman statistics Depletion approximation Neglect gen/rec effects in DR Steady-state solution only • Current dens, Jx = Js expd(Va/Vt) – where expd(x) = [exp(x) -1] L 15 Oct 13 22 Ideal diode equation (cont.) • Js = Js,p + Js,n = hole curr + ele curr Js,p = qni2Dp coth(Wn/Lp)/(NdLp) = qni2Dp/(NdWn), Wn << Lp, “short” = qni2Dp/(NdLp), Wn >> Lp, “long” Js,n = qni2Dn coth(Wp/Ln)/(NaLn) = qni2Dn/(NaWp), Wp << Ln, “short” = qni2Dn/(NaLn), Wp >> Ln, “long” Js,n << Js,p when Na >> Nd L 15 Oct 13 23 Diffnt’l, one-sided diode conductance Static (steadystate) diode I-V characteristic Va ID Is exp d Vt ID dI D gd dVa VQ IQ Va L 15 Oct 13 VQ 24 Diffnt’l, one-sided diode cond. (cont.) ID JA JsA exp dVa Vt Is exp dVa Vt Is exp VQ Vt dID gd VQ . If Va Vt , Vt dVa VQ then gd VQ IDQ , where IDQ ID VQ . Vt Vt 1 The diode resistance, rd VQ gd IDQ L 15 Oct 13 25 Charge distr in a (1sided) short diode pn L 15 Oct 13 Wn = xnc- xn • Assume Nd << Na • The sinh (see L10) pn(xn) excess minority carrier distribution Q’p becomes linear for Wn << Lp pn(xn)=pn0expd(Va/Vt) x • Total chg = Q’p = x xnc Q’p = qpn(xn)Wn/2 n 26 Charge distr in a 1sided short diode pn p (x ,V +V) • Assume Quasin n a pn(xn,Va) • Q’p = +qpn(xn,Va)Wn/2 Q’p • Q’p =q(W/2) x {pn(xn,Va+V) p (x ,V )} n n a x • Wn = xnc - xn (Va) xnc 27 Q’p L 15 Oct 13 xn static charge distributions Cap. of a (1-sided) short diode (cont.) Qp Q'p A, A diode area. Define Cd dQp dVa d qApn0 Wn qApn (xn )Wn exp d V V a t 2 2 dVa IDQ Wn2 IDQ When Va Vt , Cd VQ transit . Vt 2Dp Vt d dVa xnc pn Wn2 So, rd VQ Cd VQ transit q dx 2Dp xn J p L 15 Oct 13 28 References [1] Taurus Medici Medici User Guide Version A-2008.09, September 2008, ©SYNOPSYS Inc pg 3-306 – 3-315. This reference also quotes [2] below. [2] D.J Roulston, N.D. Arora and S. G Chamberlain, “Modeling and Measurement of Minority-Carrier Versus Doping in Diffused Layers of n+-p Silicon Diodes,” IEEE Trans, Electron Devices, Vol. ED-29, pp. 284-291, Feb. 1982. [3] Semiconductor Device Fundamentals , 2nd edition, by Robert F. Pierret, Addison Wesley, New York, 1996. L 15 Oct 13 29