Semiconductor Device Modeling and Characterization – EE5342 Lecture 5 – Spring 2011 Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc/ First Assignment • e-mail to listserv@listserv.uta.edu – In the body of the message include subscribe EE5342 • This will subscribe you to the EE5342 list. Will receive all EE5342 messages • If you have any questions, send to ronc@uta.edu, with EE5342 in subject line. ©rlc L05-28Jan2011 2 Second Assignment • Submit a signed copy of the document that is posted at www.uta.edu/ee/COE%20Ethics%20Statement%20Fall%2007.pdf ©rlc L05-28Jan2011 3 Classes of semiconductors • Intrinsic: no = po = ni, since Na&Nd << ni =[NcNvexp(Eg/kT)]1/2,(not easy to get) • n-type: no > po, since Nd > Na • p-type: no < po, since Nd < Na • Compensated: no=po=ni, w/ Na- = Nd+ > 0 • Note: n-type and p-type are usually partially compensated since there are usually some opposite- type dopants ©rlc L05-28Jan2011 4 Equilibrium concentrations • Charge neutrality requires q(po + Nd+) + (-q)(no + Na-) = 0 • Assuming complete ionization, so Nd+ = Nd and Na- = Na • Gives two equations to be solved simultaneously 1. Mass action, no po = ni2, and 2. Neutrality po + Nd = no + Na ©rlc L05-28Jan2011 5 Equilibrium conc n-type • For Nd > Na > Let N = Nd-Na, and (taking the + root) no = (N)/2 + {[N/2]2+ni2}1/2 • For Nd+= Nd >> ni >> Na we have > no = Nd, and > po = ni2/Nd ©rlc L05-28Jan2011 6 Equilibrium conc p-type • For Na > Nd > Let N = Nd-Na, and (taking the + root) po = (-N)/2 + {[-N/2]2+ni2}1/2 • For Na-= Na >> ni >> Nd we have > po = Na, and > no = ni2/Na ©rlc L05-28Jan2011 7 Position of the Fermi Level • Efi is the Fermi level when no = po • Ef shown is a Fermi level for no > po • Ef < Efi when no < po • Efi < (Ec + Ev)/2, which is the midband ©rlc L05-28Jan2011 8 EF relative to Ec and Ev • Inverting no = Nc exp[-(Ec-EF)/kT] gives Ec - EF = kT ln(Nc/no) For n-type material: Ec - EF =kTln(Nc/Nd)=kTln[(NcPo)/ni2] • Inverting po = Nv exp[-(EF-Ev)/kT] gives EF - Ev = kT ln(Nv/po) For p-type material: EF - Ev = kT ln(Nv/Na) ©rlc L05-28Jan2011 9 EF relative to Efi • Letting ni = no gives Ef = Efi ni = Nc exp[-(Ec-Efi)/kT], so Ec - Efi = kT ln(Nc/ni). Thus EF - Efi = kT ln(no/ni) and for ntype EF - Efi = kT ln(Nd/ni) • Likewise Efi - EF = kT ln(po/ni) and for ptype Efi - EF = kT ln(Na/ni) ©rlc L05-28Jan2011 10 Locating Efi in the bandgap • Since Ec - Efi = kT ln(Nc/ni), and Efi - Ev = kT ln(Nv/ni) • The sum of the two equations gives Efi = (Ec + Ev)/2 - (kT/2) ln(Nc/Nv) • Since Nc = 2.8E19cm-3 > 1.04E19cm-3 = Nv, the intrinsic Fermi level lies below the middle of the band gap ©rlc L05-28Jan2011 11 Sample calculations • Efi = (Ec + Ev)/2 - (kT/2) ln(Nc/Nv), so at 300K, kT = 25.86 meV and Nc/Nv = 2.8/1.04, Efi is 12.8 meV or 1.1% below mid-band • For Nd = 3E17cm-3, given that Ec - EF = kT ln(Nc/Nd), we have Ec - EF = 25.86 meV ln(280/3), Ec - EF = 0.117 eV =117meV ~3x(Ec ED) what Nd gives Ec-EF =Ec/3 ©rlc L05-28Jan2011 12 Equilibrium electron conc. and energies no Ef Ec no exp , or Ef Ec kT ln ; Nc kT Nc no Ef Efi no exp , or Ef Efi kT ln ; ni kT ni noNv Nv and Ef Ev kT ln 2 kT ln po ni ©rlc L05-28Jan2011 13 Equilibrium hole conc. and energies po po Ev Ef exp , or Ev Ef kT ln ; Nv kT Nv po po Efi Ef exp , or Efi Ef kT ln ; ni kT ni poNc Nc and Ec Ef kT ln 2 kT ln no ni ©rlc L05-28Jan2011 14 Carrier Mobility • In an electric field, Ex, the velocity (since ax = Fx/m* = qEx/m*) is vx = axt = (qEx/m*)t, and the displ x = (qEx/m*)t2/2 • If every tcoll, a collision occurs which “resets” the velocity to <vx(tcoll)> = 0, then <vx> = qExtcoll/m* = mEx ©rlc L05-28Jan2011 15 Carrier mobility (cont.) • The response function m is the mobility. • The mean time between collisions, tcoll, may has several important causal events: Thermal vibrations, donor- or acceptor-like traps and lattice imperfections to name a few. • Hence mthermal = qtthermal/m*, etc. ©rlc L05-28Jan2011 16 Carrier mobility (cont.) • If the rate of a single contribution to the scattering is 1/ti, then the total scattering rate, 1/tcoll is 1 all 1 , and the tcoll collisions ti total mobility m is given by 1 all 1 m total collisions mi ©rlc L05-28Jan2011 17 Drift Current • The drift current density (amp/cm2) is given by the point form of Ohm Law J = (nqmn+pqmp)(Exi+ Eyj+ Ezk), so J = (sn + sp)E = sE, where s = nqmn+pqmp defines the conductivity • The net current is I J dS ©rlc L05-28Jan2011 18 Drift current resistance • Given: a semiconductor resistor with length, l, and cross-section, A. What is the resistance? • As stated previously, the conductivity, s = nqmn + pqmp • So the resistivity, r = 1/s = 1/(nqmn + pqmp) ©rlc L05-28Jan2011 19 Drift current resistance (cont.) • Consequently, since R = rl/A R = (nqmn + pqmp)-1(l/A) • For n >> p, (an n-type extrinsic s/c) R = l/(nqmnA) • For p >> n, (a p-type extrinsic s/c) R = l/(pqmpA) ©rlc L05-28Jan2011 20 References *Fundamentals of Semiconductor Theory and Device Physics, by Shyh Wang, Prentice Hall, 1989. **Semiconductor Physics & Devices, by Donald A. Neamen, 2nd ed., Irwin, Chicago. M&K = Device Electronics for Integrated Circuits, 3rd ed., by Richard S. Muller, Theodore I. Kamins, and Mansun Chan, John Wiley and Sons, New York, 2003. • 1Device Electronics for Integrated Circuits, 2 ed., by Muller and Kamins, Wiley, New York, 1986. • 2Physics of Semiconductor Devices, by S. M. Sze, Wiley, New York, 1981. ©rlc L05-28Jan2011 21