EE 5340 Semiconductor Device Theory Lecture 14 – Spring 2011 Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc S-R-H net recombination rate, U • In the special case where tno = tpo = to = (Ntvthso)-1 the net rec. rate, U is dp dn URG dt dt U pn ni2 ET Efi to p n 2ni cosh kT where n no n, and p po p, (n p) ©rlc L14-08Mar2011 2 S-R-H “U” function characteristics • The numerator, (np-ni2) simplifies in the case of extrinsic material at low level injection (for equil., nopo = ni2) • For n-type (no > n = p > po = ni2/no): (np-ni2) = (no+n)(po+p)-ni2 = nopo - ni2 + nop + npo + np ~ nop (largest term) • Similarly, for p-type, (np-ni2) ~ pon ©rlc L14-08Mar2011 3 S-R-H rec for excess min carr • For n-type low-level injection and net excess minority carriers, (i.e., no > n = p > po = ni2/no), U = p/tp, (prop to exc min carr) • For p-type low-level injection and net excess minority carriers, (i.e., po > n = p > no = ni2/po), U = n/tn, (prop to exc min carr) ©rlc L14-08Mar2011 4 Minority hole lifetimes Mark E. Law, E. Solley, M. Liang, and Dorothea E. Burk, “SelfConsistent Model of Minority-Carrier Lifetime, Diffusion Length, and Mobility, IEEE ELECTRON DEVICE LETTERS, VOL. 12, NO. 8, AUGUST 1991 The parameters used in the fit are τo = 10 μs, Nref = 1×1017/cm2, and CA = 1.8×10-31cm6/s. τp ©rlc L14-08Mar2011 τo 1 ND Nref τ oC AND2 5 Minority electron lifetimes Mark E. Law, E. Solley, M. Liang, and Dorothea E. Burk, “SelfConsistent Model of Minority-Carrier Lifetime, Diffusion Length, and Mobility, IEEE ELECTRON DEVICE LETTERS, VOL. 12, NO. 8, AUGUST 1991 The parameters used in the fit are τo = 30 μs, Nref = 1×1017/cm2, and CA = 8.3×10-32 cm6/s. τn ©rlc L14-08Mar2011 τo 1 ND Nref τ oC AND2 6 Minority Carrier Lifetime, Diffusion Length and Mobility Models in Silicon A. [40%] Write a review of the model equations for minority carrier (both electrons in p-type and holes in n-type material) lifetime, mobility and diffusion length in silicon. Any references may be used. At a minimum the material given in the following references should be used. Based on the information in these resources, decide which model formulae and parameters are the most accurate for Dn and Ln for electrons in p-type material, and Dp and Lp holes in n-type material. B. [60%] This part of the assignment will be given by 10/12/09. Current-voltage data will be given for a diode, and the project will be to determine the material parameters (Nd, Na, charge-neutral region width, etc.) of the diode. ©rlc L14-08Mar2011 7 References for Part A Device Electronics for Integrated Circuits, 3rd ed., by Richard S. Muller, Theodore I. Kamins, and Mansun Chan, John Wiley and Sons, New York, 2003. Mark E. Law, E. Solley, M. Liang, and Dorothea E. Burk, “SelfConsistent Model of Minority-Carrier Lifetime, Diffusion Length, and Mobility, IEEE ELECTRON DEVICE LETTERS, VOL. 12, NO. 8, AUGUST 1991. D.B.M. Klaassen; “A UNIFIED MOBILITY MODEL FOR DEVICE SIMULATION”, Electron Devices Meeting, 1990. Technical Digest., International 9-12 Dec. 1990 Page(s):357 – 360. David Roulston, Narain D. Arora, and Savvas G. Chamberlain “Modeling and Measurement of Minority-Carrier Lifetime versus Doping in Diffused Layers of n+-p Silicon Diodes”, IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. ED-29, NO. 2, FEBRUARY 1982, pages 284-291. M. S. Tyagi and R. Van Overstraeten, “Minority Carrier Recombination in Heavily Doped Silicon”, Solid-State Electr. Vol. 26, pp. 577-597, 1983. Download a copy at Tyagi.pdf. ©rlc L14-08Mar2011 8 S-R-H rec for deficient min carr • If n < ni and p < pi, then the S-R-H net recomb rate becomes (p < po, n < no): U = R - G = - ni/(2t0cosh[(ET-Efi)/kT]) • And with the substitution that the gen lifetime, tg = 2t0cosh[(ET-Efi)/kT], and net gen rate U = R - G = - ni/tg • The intrinsic concentration drives the return to equilibrium ©rlc L14-08Mar2011 9 The Continuity Equation • The chain rule for the total time derivative dn/dt (the net generation rate of electrons) gives dn n n dx n dy n dz . dt t x dt y dt z dt The definition of the gradient is n i j k n, x y z ©rlc L14-08Mar2011 10 The Continuity Equation (cont.) The definition of the vector velocity is dx dy dz v i j k. dt dt dt Since A B AxBx AyBy AzBz , dn n then n v dt t ©rlc L14-08Mar2011 11 The Continuity Equation (cont.) The gradient operator can be distributed as n v n v n v . Considering the second term on the RHS, dx dy dz v 0, since x dt y dt z dt dx d x 0, etc. x dt dt x ©rlc L14-08Mar2011 12 The Continuity Equation (cont.) Consequently, since Jn qn v , we have n 1 dn n J n . So n v t q dt t dp p 1 dn n 1 Jp J n , and dt t q dt t q are the " Continuity Equations". ©rlc L14-08Mar2011 13 The Continuity Equation (cont.) dn dp The LHS, or -U, of the Continuity Eq. dt dt represents the Net Generation Rate of n or p at a particular point in space (x, y, z). n p The first term on the RHS, or , is t t the " explicit" Local Rate of Change of n or p at (x, y, z). ©rlc L14-08Mar2011 14 The Continuity Equation (cont.) 1 The second term on the RHS, J n q 1 or J p is the local rate of n or p q concentrations flowing " out of" the point (x, y, z). Note the difference in signs for electrons (-q) and holes ( q). ©rlc L14-08Mar2011 15 The Continuity Equation (cont.) So, we can re - write the continuity equations as : p dp 1 dp δp J p , where U and t dt q dt τp n dn 1 dn δn J n , where U t dt q dt τn Which can be interprete d as : Local rate of change ©rlc L14-08Mar2011 net generation rate rate of inflow 16 Review of depletion approximation EFp qVbi Ec EFn EFi Ev -xpc -xp 0 xn ©rlc L14-08Mar2011 • • • • xnc x • Depletion Approx. pp << ppo, -xp < x < 0 nn << nno, 0 < x < xn 0 > Ex > -2Vbi/W, in DR (-xp < x < xn) pp=ppo=Na & np=npo= ni2/Na, -xpc< x < -xp nn=nno=Nd & pn=pno= ni2/Nd, xn < x < xnc 17 Review of D. A. (cont.) -xpc-xp Ex xn xnc 2Vbi Va W , W xp xn , qNeff x Neff NaNd , Na xp Ndxn , Na Nd Ex 0, x xp q Ex - Na x xp , xp x 0, q Ex Na x xn , 0 x xn , Ex 0, x xn -Emax ©rlc L14-08Mar2011 18 Forward Bias Energy Bands nnon equil ni expEFn EFi / kT n p n p 0 eVa Vt 1 q(Vbi-Va) Imref, EFn Ec EFN EFi EFP qVa Imref, EFp pnon equil ni exp EFi EFp / kT pn pn 0 eVa -xpc ©rlc L14-08Mar2011 -xp 0 xn Ev Vt 1 x xnc 19 References 1 and M&KDevice Electronics for Integrated Circuits, 2 ed., by Muller and Kamins, Wiley, New York, 1986. See Semiconductor Device Fundamentals, by Pierret, Addison-Wesley, 1996, for another treatment of the m model. 2Physics of Semiconductor Devices, by S. M. Sze, Wiley, New York, 1981. 3 and **Semiconductor Physics & Devices, 2nd ed., by Neamen, Irwin, Chicago, 1997. Fundamentals of Semiconductor Theory and Device Physics, by Shyh Wang, Prentice Hall, 1989. ©rlc L14-08Mar2011 20