ENGR 40434– INTRODUCTION OF MEMS
Course syllabus
TEXAS CHRISTIAN UNIVERSITY
DEPARTMENT OF ENGINEERING
FORT WORTH, TEXAS 76129
1. Course Description
Prerequisites: ENGR20404 Network Analysis I, ENGR 20603 Solid Mechanics I
Micro Electro Mechanical Systems (MEMS) are miniature devices that are widely used in consumer
products such as accelerometers used in cars to activate the airbags and in smart phones to flip
images and play video games. This course will introduce the basics of MEMS design, fabrication,
sensing and actuation mechanisms, characterization and reliability testing. The MEMS concepts are
reinforced through labs that involve design and simulation of MEMS devices using an advanced
MEMS simulation tool and testing of actual MEMS devices. The applications and challenges of
existing MEMS devices will be discussed.
2. Engineering Dept. Program Outcomes. Upon completion of this course, you will have
gained the following:
a. an ability to apply knowledge of mathematics, science, and engineering
b. an ability to design a system, component, or process to meet desired needs within
realistic constraints such as economic, environmental, social, political, ethical, health
and safety, manufacturability, and sustainability
c. an ability to identify, formulate, and solve engineering problems
d. an ability to use the techniques, skills, and modern engineering tools necessary for
engineering practice
3. Administrative Data
a. Instructor:
b. Class Schedule:
Dr. Cuiling (Sue) Gong
Room 211, Tucker Technology Center, TUC
Office: 817-257-6317
Email: c.gong@tcu.edu
lecture: MWF 10:00 – 10:50am. Room TUC 135
lab:
Tu: 2:00 – 4:50pm.
Room TUC 229
c. Office Hours:
You may stop by my office at any time; if I am in the office, I will be glad to
help you. You can E-mail me ahead of time to make an appointment. I will
be available without appointment on MWF from 11am to 12pm.
d. Class Website: Check the course website in Learning Studio for all class updates.
e. Required Textbook: Foundations of MEMS by Chang Liu (2nd edition), 2012
f. Reference Books: MEMS and Microsystems (2nd edition) by Tai-Ran Hsu, 2008.
Microsystem design by Stephen Senturia
ENGR 40434 Outline
Week
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Subject
Course Introduction
Lab introduction
Microfabrication
Silicon as MEMS material
Holiday – no class
Basic processes: Photolithography
Lab 1: CoventorWare: build a 3D model
Silicon doping and oxidation
Deposition and etching
Micromachnining
Lab 2: CoventorWare: model and stress analysis
using MemMech, Spring MM, meshing study
Bulk micromachining – wet etching
Bulk micromachining – dry etching
Surface micromachining -processes
Lab 3: Electrical analysis of comb drives
Surface micromachining - stiction,
residual stress
LIGA and electroplating
Actuation and Sensing
Lab 4: Coupled Electro-thermal-mechanical
analysis: Thermal actuator
Elelctrostatic actuation (parallel plate)
Elelctrostatic actuation (comb drive)
Elelctrostatic sensing
Lab 5: micromirror design
Piezoelectric actuation
Piezoelectric sensing
Thermoelectric sensing and actuation
No lab
Review
Mid-term
Design and Modeling
Lab 6: piezoelectric frequency sensor design
Design considerations
Scaling in miniaturization
Finite Element analysis
Lab7: MEMS testing
reading and HW
HW1 due
Quiz 1
HW2 due
Quiz 2
HW#3 due
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Examples
Packaging & Assembly
wire bonding and encapsulation
Surface bonding and 3D packaging
Wafer level packaging
Signal integrity
MEMS characterization
Lab 8: MEMS switch as logic gates
characterization techniques
MEMS Testing and Reliabilities
Accelerated testing
Lab 9: project assignment – RF MEMS
Lecture by guest speaker
Applications
Acoustic MEMS: Microphones
Lab 10: Lab on a chip demo/project
Opitcal MEMS: micromirrors
Microfluidics
Lab 11: Field trip to Texas Instruments: DLP Products
Inkjet head
Piezoelectric energy harvester
Nano technologies
Lab12: project presentation
Principles, applications and challenges
Course Review
study day – no class
Final Exam: 11:30~2pm
Quiz #3
HW #4 due
Quiz #4
HW #5 due
Quiz #5