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Prof. Hiroyuki Fujita gave a Haedong Colloquium Lecture in the School of Engineering,
of Seoul National University in Korea by the invitation from Prof. Kukjin CHUN, Head
of College of Electrical Engineering and Computer Science. Prof. Yong-Keeon KIM
served as a moderator. The title was “MEMS Technology for Heterogeneous
Integration”. In this talk, he discussed the concept of the heterogeneous integration
technology that combines various fabrication methods, such as MEMS, VLSI (very
large scale integration) silicon microelectronic technology, compound semi-conductor
technology, nano technology, bio technology, organic/inorganic chemistry, printing and
molding. He described the features and prospects of the technology, using the examples
from CIRMM laboratories and a Government-supported project named BEANS.