Prof. Hiroyuki Fujita gave a Haedong Colloquium Lecture in the School of Engineering, of Seoul National University in Korea by the invitation from Prof. Kukjin CHUN, Head of College of Electrical Engineering and Computer Science. Prof. Yong-Keeon KIM served as a moderator. The title was “MEMS Technology for Heterogeneous Integration”. In this talk, he discussed the concept of the heterogeneous integration technology that combines various fabrication methods, such as MEMS, VLSI (very large scale integration) silicon microelectronic technology, compound semi-conductor technology, nano technology, bio technology, organic/inorganic chemistry, printing and molding. He described the features and prospects of the technology, using the examples from CIRMM laboratories and a Government-supported project named BEANS.