Piezo • Nano • Positioning
PIOne: Picometer Class Linear Scale
Interferometric Measuring System for Nanopositioning and Beyond
Ordering Information
PIOne is an optical linear encoder
used in PI precision motion control
systems when the performance of
commercial nanopositioning sensors is not sufficient to satisfy our
customer's need.
The PIOne sensor is based on an interferometric measuring principle. A resolution
of 20 picometer can be achieved with a scale with 2 μm grating period
PIOne is a critical component to
increase the precision of PI positioning systems and is supported by
many PI motion controllers, such
as the E-712 piezo controller
platform s.p. 2-140, the E-861
piezo stepping drive controller
family s. p. 1-20 and the C-867
ultrasonic motor controllers
s. p. 4-116.
PIOne is not offered as stand-alone
product.
© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.
The newest release for data sheets is available for download at www.pi.ws. 10/07/21.0
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Resolution to 20 Picometer RMS
Speed up to 500 mm/sec at Maximum Resolution
Compact Dimensions 23 x 12 x 9.5 mm
Sine, Cosine or Quadrature Output Signals
Low Power Consumption and low Heat Dissipation
PIOne is a patented, compact
position sensor for applications requiring sub-nanometer resolution and travel
ranges in the millimeter
range. While its high resolution and bandwidth are
comparable to state-of-the-art
capacitance sensors it provides longer measuring distances. The sensor head measures only 23 x 12 x 9.5 mm.
Interferometric Principle
Allows Sub-Nanometer
Resolution
The sensor head of the PIOne
contains a Mach-Zehnder interferometer, which is moved
along a linear scale. Sine and
Cosine signals are generated
from the optical reflections at
the grid. Additional interpolation accounts for the system's
picometer range resolution.
The sensor head also generates a direction-sensing reference.
Controlling the design and
manufacture of these two enabling motion system components allows PI to raise the
standards of the highest-performance nanopositioning
systems even higher.
PIOne and PiezoWalk®:
System Components for the
Future of Nanopositioning
PiezoWalk® piezo stepping
motors combine piezo-class
resolution and responsiveness with basically unlimited
travel. To take advantage of
subnanometer precision over
10's of millimeters of travel, a
high resolution measuring
system such as the PIOne is
required.
The PIOne is used in PI's high-resolution nanopositioning systems such as the
N-664. This linear positioner is driven by NEXACT® piezo linear motors and,
depending on the motion controller, can achieve a position resolution of less
than one nanometer at 30 mm travel range
Piezo • Nano • Positioning
Noise measurement of a positioning system with the PIOne at 1 MHz
bandwidth and 18-bit resolution of the sensor input: 16 picometer RMS
and 100 picometer peak-to-peak
PIOne sensor head dimensions in mm
Technical Data
Model
D-711
Scale
Graduation structure
Al on Si
Grating period
2 μm
Linear coefficient of thermal expansion
3 • 10-6/K
Available lengths
10 to 130 mm
Reference mark
directional homing track
Output signals
Signal period
0.5 μm
Signals
± sin, ± cos (1 Vpp)
Bandwidth (-3 dB)
1 MHz
Velocity, max.
500 mm/s
Noise (RMS) at 1 MHz bandwidth
< 0.02 nm
Fine adjustment of signals
digital, saved in EEPROM
Power supply and laser
Current consumption (no load)
65 mA (room temperature); 75 mA (50 °C)
Current consumption (at 120 Ω load)
105 mA (room temperature); 115 mA (50 °C)
Power consumption sensor head
(room temperature, no load)
106 mW
Power consumption electronics
(in the connector; room temperature, no load)
219 mW
Operating voltage
+5V ±10 %, GND
Connectors
15-pin sub-D (f), 1 m cable
Max. cable length
30 m (min.)
Wavelength of laser
655 nm
Laser power
700 μW (laser safety class 2)
Environmental conditions
Operating temperature range
+10 to +50 °C
Storage temperature range
-20 to +70 °C
Humidity
20 to 80 % (not condensing)
Mass
Sensor head (without cable)
4.3 g
Scale (130 mm)
10.2 g
Cable (1 m)
15.9 g
PIOne complete (without scale)
49.5 g