KEY for Unit 8 - Heat and Work in Physical and Chemical Transformations Example Problem: How many Joules of heat are absorbed by 30.0g of water when brought from 35°C to 80°C? First find ∆t and then calculate q given that the specific heat of water is 4.18 J/g°C. ∆t = tfinal - tinitial = 80°C - 35°C = 45°C q = 30.0g * 4.18 J/g°C * 45°C q = 5,643 J Example Problem: When 1.0g of NaCl is dissolved in 10.0g of water the calorimeter temperature goes down from 26.5°C to 23.0°C. How many joules of energy are produced? 0 = qcal + qsolution qsolution = -mwater * 4.18 J/g°C * ∆t qsolution = -10.0g * 4.18 J/g°C * -3.5°C qsolution = +146.3 J Then the heat of solution can be expressed as a molar quantity by dividing by the moles of NaCl used. qsolution = +0.146 kJ/(1.0 g / 58.45 gmol-1) = +8.55 kJmol-1 Example Heat Flow Problem: A geologist is out in the field collecting rock samples. There may be no firewood available in the area. He expects to use 50.0 cups of boiling water (for tea, soup, shaving, etc.) during the trip. He has a portable stove that uses gasoline (octane, C8H18 ) as the energy source. Given that the stove is 40% efficient in heating the water (initial T = °C), how much fuel does he have to carry during the trip? Note that gasoline is sold by volume (gallons) not mass. Possibly useful information: 1 cup = 8 fl. oz. (exact) 1 fl. oz. = 29.57 cm3 1 gallon = 3.78 L density of water = 1.00 g/cm3 density of octane = 0.7025 g/cm3 sp. heat of water = 4.18 J/(g deg C) Heats of formation water(liq) : - 285.8 kJ/mol octane(liq) = -250.1 kJ/mol CO2 = -383.5 kJ/mol [note correction to typo, ∆Hf for CO2 is not -250.1 kJ/mol] 167 Answer: First balance a reaction for the combustion of octane and find the change in enthalpy (∆H) for that reaction. Next, determine the total amount of heat needed to heat the desired volume of water. Finally, determine the amount of octane that will need to be combusted to heat the desired volume of water (recall the stove operates at 40% efficiency). First: C8H18(l) + 25 /2 O2 (g) Æ 8 CO2 (g) + 9 H2O(l) ∆H = Σ m ∆Hf (prod) - Σ n ∆H f (react) ∆H = 8mole*(-383.5 kJ/mol) + 9mole*(- 285.8 kJ/mol) – 1mole*(-250.1 kJ/mol) ∆H = -5390.1 kJ / mole octane Second: 50.0 cups of boiling water need to be produced from water at Tinit=20°C 1.00 g 29.57 cm3 find mass of water = ( /cm3)*( mass of water = 11,828 g = 11.828 kg / 1 fl. oz.)*(8 fl. oz./ 1 cup)* 50 cups find heat needed to raise water from Tinit=20°C to Tfinal=20°C kJ heat = m*Cp*∆T = (11.828 kg)*(4.18 /kg °C)*(100°C -20°C) heat = 3,955 kJ needed to heat the water Finally: determine the amount of octane needed to produce enough heat to boil the water accounting for the fact that the stove is 40% efficient. ∆H = -5390.1 kJ / mole octane heat = 3,955 kJ needed to heat the water but if the stove is only 40% efficient we will need to produce 9,988 kJ 9,988 kJ needed to heat the water octane needed = octane needed = 1.853 mole / 5,390.1 kJ / mole octane volume of octane = (1 gal/3.78 L)*(1 L / 702.5 g octane)*(114.22 g/mol)*1.853 mol volume of octane = 0.0797 gallon = 10.2 fl oz. Cirent: Industrial Problem Cirent Semiconductor is a joint venture between, Lucent Technologies' Microelectronics Group and Cirrus Logic, Inc.. The facility, located in South Orlando, is undergoing a $600 million expansion and will be home to more than 600 new engineering and technical jobs over the next two years. The plant manufactures advanced computer chips and currently houses more than 1,200 people, including a Bell Labs research and development group. Construction of a new cleanroom for the manufacture of integrated circuits on eight-inch silicon wafers is completed and production is expected to begin in early 1997. Cirent Semiconductor will be the largest manufacturer of semiconductor 168 devices in Florida, and as a joint venture, will enhance each company's ability to meet the worldwide demand for advanced integrated circuits, which are used increasingly in products such as computing equipment, cellular phones, pagers and other electronic devices. Lucent Technologies was created as part of AT&T's restructuring into three separate, publicly held companies. During the last 16 years, American Telephone and Telegraph (which included Bell Labs, Western Electric, Long Lines, Network Systems and the Regional/Local Telephone Companies) divested into AT&T and seven independent regional operating companies such as BellSouth, Ameritech, Nynex, etc. AT&T acquired NCR as well as other smaller companies after the divesture. Now AT&T has spun off Network Systems and AT&T Microelectronics (formerly Western Electric) as Lucent Technologies. NCR will be spun off by the end of the year. The Microelectronics Group of Lucent designs and manufactures integrated circuits, optoelectronic components, power systems, and printed circuit boards for applications in the telecommunications and computing industries. In addition to such components, Lucent Technologies offers public and private networks, communications systems and software, and consumer and business telephone systems. Bell Laboratories is the research and development arm of the new company. Headquartered in Fremont, Calif., Cirrus Logic is a leading manufacturer of advanced integrated circuits that perform multimedia, communications and mass storage functions. Having captured strong market positions in key sectors of the desktop and portable PC markets, the company is now extending its core technologies beyond the PC to innovate software-rich chip solutions for the Interactive Age. 1. In semiconductor processing, silicon tetrachloride has been most studied and has seen the widest industrial use for growing epitaxial silicon. This is the defect free layer that is grown on the surface of silicon wafers cut from a grown ingot and polished. This is the starting layer for all silicon devices. The overall reaction can be classified as a hydrogen reduction of a gas. This reaction normally is performed at 1200 deg C in a chemical vapor deposition reactor. The overall reaction is: SiCl4 (gas) + 2H2 (gas) Si (solid) + 4HCl (gas) four of the reactions that actually occur during the overall process follow: a. SiCl4 (gas) + H2 (gas) b. SiHCl3 (gas) + H2 (gas) c. SiH2Cl2 (gas) SiHCl3 (gas) + HCl (gas) SiH2Cl2 (gas) + HCl (gas) SiCl2 (gas) + H2 (gas) d. SiCl2 (gas) + H2 (gas) Si (solid) + 2HCl 169 Demonstrate the correct combination of these equations to get the net equation: 1*Rxn(a) SiCl4 (gas) + H2 (gas) SiHCl3 (gas) + HCl (gas) 1*Rxn(b) SiHCl3 (gas) + H2 (gas) 1*Rxn(c) SiH2Cl2 (gas) SiCl2 (gas) + H2 (gas) 1*Rxn(d) SiCl2 (gas) + H2 (gas) SiCl4 (gas) + 2H2 (gas) o SiH2Cl2 (gas) + HCl (gas) Si (solid) + 2HCl Si (solid) + 4HCl (gas) The following two problems concern heat produced form exothermic reactions in an etch system. Fluorine chemistry is very important in the processing or etching of silicon. We produce the fluorine by a variety of means (which is a special set of problems, possibly too difficult at this stage of your education). A problem is the heat generated and how to control it, as it always affects the wafers. This problem has been greatly simplified (thus it is workable). You may find the following properties of silicon (see below in answer) invaluable as you solve the problem, all data may not be necessary - so be careful. 2. The enthalpy of the exothermic reaction: Si (solid) + 4F (gas) SiF4 (gas) is 370 kcal/mole at 25 degC. At what rate is heat being generated when a 200mm diameter, 0.75mm thick silicon wafer is etched on one surface at a rate of 1 micrometer per minute? The silicon properties are: o o o o o specific heat = 0.7J/(g degC) thermal conductivity = 1.5W/(cm degC) atoms of Si = 5.0 x 1023 density = 2.33 g/cm3 Atomic Weight = 28.09 Find amount of silicon etched per minute then multiply by 370 kcal/mole. 170 radius of wafer = 100 mm or 10.0 cm area of wafer = π (r)2 = π (10.0 cm)2 = 100*π cm2 etch rate in thickness units = 1 µm / minute = 0.0001 cm / min volume of wafer etched per min = (100*π cm2)*(0.0001 cm/min) = 0.0314 cm3/min mole Si / min = (mole /28.09 g)*(2.33 g/cm3)*(0.0314 cm3/min) = 2.61x10-3 mol/min heat generated by rxn = (370 kcal/mole)*(2.61x10-3 mol/min) = 0.964 kcal/min 3. Let's assume that the wafer is thermally isolated during the etching. By how much will its temperature rise if 5.0 micrometers of silicon is etched away? 5.0 minutes will be required to etch microns . . . so the total heat generated is . . . total heat generated = 5 minutes*(0.964 kcal/min) = 4.82 kcal If the silicon is thermally isolated then all the heat will remain in the wafer. The total wafer mass = volume*density = area*thickness*density area of wafer = π (r)2 = π (10.0 cm)2 = 100*π cm2 thickness of wafer = 0.75 mm = 0.075 cm total wafer mass = (100*π cm2)*(0.075 cm)* (2.33 g/cm3) = 54.9 g Si heat = mass * Cp * ∆T so ∆T = heat /(mass * Cp ) = 4.82 kcal (4,184 J/kcal) /(54.9 g * 0.7 Jg-1°C-1) ∆T = 525°C Clearly the wafer gets hot, but it also conducts away some of the heat as it is generated. The amount of heat that dissipates from the wafer is a bit harder to calculate. The calculation would involve the use of the thermal conductivity of the Si (given above), but the real solution to the problem involves differential equations and is beyond the scope of this course. 4. High energy photons are used to disrupt polymeric bonds or to link bonds to form a polymer in photoresists. Negative resists become less soluble in developer when they are exposed to radiation and positive resists become more soluble after exposure. There are advantages to both types of resists but each is exposed by using the "i-th" emission line from a mercury vapor lamp. The wavelength is 365nm. (a) What is the frequency of these light photons? ν = c/λ = 8.22 x 10+14 Hz (b) What is the energy of a single photon at this wavelength? E = hν = 5.45x10-19 J . . . . .which corresponds to 328 kJ per mole of photons 171