Ordering Information
Specifications
Sensor
Model
Appearance
Item
Measured particle diameter Model
Air Particle Sensor
Particle measurement type 0.3, 0.5, or 1.0 µm min.
5µm(10µm), 20µm(30µm),
50µm min.
( )is selectable.
Air Particle Sensor
Dust measurement type
Particle measurement type
Dust measurement type
ZN-PD03-S
ZN-PD50-S
Item
Measurement method
ZN-PD03-S
ZN-PD50-S
90° sideways light-scattering method
Semiconductor laser
Light source
Measured particle diameter
0.3, 0.5, or 1.0 µm min.
Particle concentration
0 to 100,000particles/cf
Sample flow rate
Trigger Input
Item
Model
Wave Inspire ES
ZN-SW11-S
System Requirements
Measure Mode
DC19V (See note 2.)
Current consumption
Item
Model
Operating and storage : 35% to 85% (with no icing or condensation)
Exhaust tube(4m)
ZN9-PT4-S
Vibration resistance
110 to 55 Hz, 0.3-mm double amplitude, 50 min
Materials
IP20
Installation method
DIN track mount / Self standing
Weight (Packed state)
Approx.1.7kg
Instruction Sheet, AC adapter
Accessories
ZN9-PC1-S
Filter for cleaning
ABS
Degree of protection
ZN9-PT8-S
Exhaust tube(8m)
Optimized Quality Management
with Real-time Particle
Monitoring System
20 MΩ min. at 500 VDC
1,000 VAC, 50/60 Hz for 1 min
Withstand voltage
ZN9-PF2-S
Operating : 0 to 40˚C
Storage : -15 to 50˚C (with no icing or condensation)
Ambient humidity range
Insulation resistance
Change filter set for
Dust measurement type
Cost Effective and Wide range measurement size
(From Particle to Dust)
1A MAX
Operating : 0 to 35˚C
Ambient temperature range
Change filter set for
ZN9-PF1-S
Particle measurement type
ZN-PD-S
Real-time mode (by second)/Cycle mode(by set cycle)/Trigger mode(by trigger)
Power supply voltage
Accessories(Order Separately)
Appearance
Clean Levels:4levels(adjustable)
7-segment main display (red/6digits):Count value
(Selectable particles/cf, particles/Litter, counts of particles per measurement time)
7-segment sub-display(green/6 digits):Selected particle diameter
Indicators
OS:Windows XP, Windows Vista
CPU:Compatible with Intel processors, 1GHz or higher
Memory: 1GB or more (2GB or more recommended)
Air Particle Sensor
Photo coupler input
Ethernet twisted-pair cable connector (TCP/IP)
Communication interface
New
Production-Environmental
Sensing Series The First
6.0Litter/min
Photo coupler output
(Status outputs linked with clean levels)
System error status output
Appearance
0 to 50,000particles/cf
2.8Litter/min
Status outputs(2 outputs)
PC Software
5µm(10µm), 20µm(30µm), 50µm min.(See note 1.)
Air-intake tube(Tubing ID : Φ10mm, Length 1m)×1
Air filter ×1
Note 1. ( ) is selectable.
Note 2. Must be used with specified AC adapter.
Dimensions
(Unit:mm)
ZN-PD03-S
(Unit:mm)
ZN-PD50-S
30
30.7
30.7
30
Φ57.9
120
85
Air intake
(diameter=10)
43.3
90.7
Air intake
Particle measurement type
LAN port
Input/output
terminals
( 0.3µm to 1µm)
110
110
LAN port
Input/output
terminals
AC adaptor
terminal
(30.7)
61
85.7
OMRON Corporation
Industrial Automation Company
Sensing Devices Division H.Q.
Growth Industry Promotion Dept.
Shiokoji Horikawa, Shimogyo-ku,
Kyoto, 600-8530 Japan
Tel: (81) 75-344-7211/Fax: (81) 75-344-7107
Regional Headquarters
OMRON EUROPE B.V.
Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen,
Germany
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199
68
26
7.4
10.7
(14)
7.4
AC adaptor
terminal
Air outlet (diameter=10)
OMRON ELECTRONICS LLC
One Commerce Drive Schaumburg,
IL 60173-5302 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
10.7
(30.7)
61
85.7
(14)
18
90.7
85
120
68
26
Air outlet (diameter=10)
Authorized Distributor:
OMRON ASIA PACIFIC PTE. LTD.
No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandra Technopark, Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
OMRON Industrial Automation Global: www.ia.omron.com
Dust measurement type
( 5µm to 50µm)
© OMRON Corporation 2008 All Rights Reserved.
In the interest of product improvement,
specifications are subject to change without notice.
Printed in Japan
Cat. No. E397-E1-01(WEB1)
(0709) (KW)
Optimized Quality
Management with
Two valuable
Models!
Particle/contamination
Real-time Monitoring
ALL NEW
Ambient Dust
Real-time Monitoring
Thinking of upgrading from manual fixed-point particle measurement in your clean
environment to a continuous monitoring solution?
The ZN-PD03-S Particle Sensor (Particle Type) provides continuous high-precision
monitoring at a very low set-up cost.
It is ideal for traceability and fault analysis and substantially reduces labor expenses.
Foreign matter in the production environment can affect the quality of finished products.
Perhaps your production environment is affected by dust? The largest form of particles,
typically carried by human operators and generated by machinery.
The ZN-PD50-S Particle Sensor (Dust measurement type) provides the most simple
and effective solution yet for monitoring dust levels.
Combines high-precision measurement
with continuous monitoring
Measurement accuracy to rival a particle counter?
Measure dust levels and identify dust
sources with a single unit
Industry First
Top
In Class
The Particle Sensor generates air flow of 2.83 liters per minute through a combination of
fully rectified internal design and high-suction fan. Measurement accuracy is close to
that of a particle counter, thanks to Omron laser-optic design technology as used in
high-precision displacement sensors.
Measured value (particles/cF)
Typical air cleanliness readings from different types
of measuring devices
600
ZN-PD-S
Particle counter
Conventional particle sensor
ZN-PD-S detects fluctuations
in cleanliness even in very
clean environments
500
400
Dust Catcher feature to
identify dust sources
The combination of a powerful fan and
a funnel-shaped air intake efficiently
captures falling dust. A built-in filter
prevents large dust particles from
entering the system and causing
internal blockages. The filter is simple
to replace.
Double-sided tape on the pull-out Trap Box
captures dust particles. The dust can then be
analyzed under a microscope to determine
the source.
Model ZN-PD03-S
300
0.3 µm 0.5 µm 1.0 µm
200
100
0
Particle measurement type
Efficient measurement of
falling dust
Trap Box
Simultaneous real-time sensing
0:00
0:10
0:20
0:30
0:40
0:50
1:00
1:10
Filter
Time (hr:min)
Intake air is irradiated with laser light
and the level of scattered light from
particles is measured.
Cleanliness levels varied in a CLASS 100 (approx.) environment
using FFU air flow control.
Particle sensor measurements taken via scaling.
Examples of use
Examples of use
Low-maintenance design
for continuous measurement
The maintenance workload is reduced substantially
through a combination of long-lasting fan construction and intermittent laser mode designed to
prolong the life span of the laser. Maintenance
costs are also much lower since the Particle Sensor
does not need an external pump which tends to
require frequent replacement.
Dust measurement type
Model ZN-PD50-S
5(10)µm 20(30)µm 50µm
Simultaneous real-time sensing
Multi-point continuous monitoring in clean room
Dust monitoring on paint process
Trend monitoring of manufacturing equipment
Measurement data is used for trend analysis and
early detection of problems
Connects readily to Ethernet hub for
networking with computers
Trend monitoring in cell manufacturing production line
Production-Environments Visualizer (PC software)
Option Model ZN-SW11-S
Real-time analysis of
measurement data
Diagram layout of equipment
and measuring devices
Convert selected data to
Excel format
Computer
Pop-up alarm window
LAN Port
Input/output
terminals
Supports trigger input as well as two-stage alarm and
error outputs.Can be configured to begin measurement
as required in response to trigger input and to generate
alarms in accordance with monitoring levels.
Scalable to particle diameter size
LAN
or
PLC
EtherNet hub
Recommended: SYSMAC CS/CJ series
Ethernet unit (Omron)
Connect to PLC to create an independent
low-energy system tailored to the
production environment.
Max./min./average values
Visual representation of particle volumes makes
it easier to identify trends for faster analysis!
Also handles time-consuming tasks such as
data storage and collation.
Shows hourly and daily trends at a glance-ideal
for early detection of problems.
Two display modes
Pop-up windows provide immediate notification of
alarms to enable a rapid response.
Select required log data and convert to CSV file
format. Direct import into Excel file format is also
available.