IST-017255 MONA Deliverable D0.4 (M30) Project number: 017255 MONA Merging Optics and Nanotechnologies Instrument: Specific Support Action Thematic priorities: IST & NMP Final activity report Period covered: from month 1 to month 30 Start date of project: 01.06.2005 Project coordinator name : Laurent FULBERT Project coordinator organisation name : CEA 13/02/2016 Dissemination level : Public Date of preparation: 20.12.2007 Duration: 30 months Revision : 1 Page 1/13 IST-017255 MONA Deliverable D0.4 (M30) Table of contents SECTION 1 – PROJECT EXECUTION ............................................................................................................ 3 PROJECT OBJECTIVES ........................................................................................................................................... 3 LIST OF PARTICIPANTS ......................................................................................................................................... 3 COORDINATOR CONTACT DETAILS ....................................................................................................................... 3 WORK PERFORMED AND RESULTS ACHIEVED....................................................................................................... 4 INTENTION FOR USE AND IMPACT ...................................................................................................................... 10 SECTION 2 : DISSEMINATION AND USE ................................................................................................... 12 13/02/2016 Dissemination level : Public Page 2/13 IST-017255 MONA Deliverable D0.4 (M30) Section 1 – Project execution Project objectives The goal of the MONA project (Merging Optics and Nanotechnologies) is to leverage synergies in photonics and nanotechnologies, seeking to increase the impact and efficiency of investment on European research. There are three principal objectives for the MONA project: Create a common site for the exchange of information concerning research, networks of excellence, and integrated projects in photonics and nanotechnologies. Promote the timely exchange of scientific results, market development, and technology needs through MONA-developed workshops. Develop a European roadmap for photonics and nanotechnologies. MONA will foster collaborations between photonics and nanotechnologies stakeholders and will help preparing future research activities. A major outcome of MONA will be a consolidated scenario (time horizon 5-10 years), setting out development and technology road maps. The MONA project contributes directly to the development of synergies between photonics/nanophotonics and nanomaterials/nanotechnologies. The challenge of mastering nanoelectronics and nano-photonics science and technologies at an industrial scale (i.e. aiming at low cost mass production capability) is of utmost strategic importance for the competitiveness of the European industry in a global context. Through the cooperative work between equipment manufacturers, nanotechnologies and photonics experts, MONA will help to identify and address the most critical manufacturing issues. This will ensure the building of a strategic comprehensive approach for the key technologies in order to profit from this highly important area for the European Union. List of participants Partic. Role CO CR CR CR CR CR CR CR CR CR CR Participant name Commissariat à l’Energie Atomique Interuniversitair Micro-Elektronica Centrum VZW Acreo AB Schott AG ALCATEL-THALES III-V LAB AIXTRON AG ASM-International, N.V European Photonics Industry Consortium VDI Technologiezentrum GmbH Opticsvalley Yole Développement Participant short name CEA IMEC Acreo Schott A-T AIX ASMI EPIC VDI-TZ OV YD Country F B S D F D NL F D F F Coordinator contact details Laurent FULBERT CEA-LETI 17, rue des Martyrs 38054 GRENOBLE cedex 9 tel : (+33) 438 78 38 45 mailto:laurent.fulbert@cea.fr FRANCE http://www.ist-mona.org 13/02/2016 Dissemination level : Public Page 3/13 IST-017255 MONA Deliverable D0.4 (M30) Work performed and results achieved During the 30 months of the MONA project, all the partners have contributed to the fulfilment of the objectives. The general organisation of the project is described below At the beginning of the project, a joint frame of reference has been established to set the starting point of the project. Then, a comprehensive study of nanophotonic materials/devices/applications/equipment has been made through workshop and interaction with world-wide experts. The final synthesis of the roadmapping activities has been edited as a report entitled “A European roadmap for photonics and nanotechnologies”. For the whole duration of project, dissemination activities have been undertaken to reach the nanophotonic/nanotechnologies community. A detailed description of the MONA activities is made hereafter. Frame of reference The objective of WP1 is to set the starting point of the project MONA regarding its content. WP1 serves to provide a joint frame of reference for the subsequent work packages. The work summarizes the state of the art in both of the fields: Nanostructuring technologies Nanophotonics Each of these two fields are analysed with respect to: Materials and technologies Equipment and processes. The main result is a report that analyses and assesses the various technologies with respect to their potential for volume production. In particular the compatibility with CMOS processes will be investigated. The main topics addressed in the report are: Current Production Technologies in Photonics Nanostructuring Technologies o Top-Down Technologies o Bottom-Up Technologies Photonics o New Approaches in Nanophotonics o Nanotechnology in Photonic Devices Equipment Projects and Networks of Relevance 13/02/2016 Dissemination level : Public Page 4/13 IST-017255 MONA Deliverable D0.4 (M30) Development of a roadmap: methodology Instrumentation /metrology Photovoltaics Displays Sensors Imaging Data storage Lighting Datacoms /Telecoms Optical Interconnects The roadmapping process has been made into several major steps 1. Identification: Based on the first MONA workshop, on the work done the frame of reference, as well as on different market studies, the consortium members have made a selection of the most promising applications area of Nanophotonics devices. The bottom-up methodological approach leads us to identify several families of nanostructures/nanomaterials that could have an impact on photonics (see Table 1). 2. Assessment of the use of nanomaterials: At each crossing point of the materials/applications matrix, the relevance of the nanophotonic devices (which will benefit from nanomaterials for nanophotonic application) has been assessed (no potential use of the considered materials in the application, maybe a potential use, identified use of the considered material/nanostructure class in the application …). This has been done at each matrix crossing point (nanomaterial/application) through desk research, market surveys, and experts’ interview. 3. Completion of segment roadmap templates: In a second step, a roadmap template has been completed at each crossing taking into account materials, applications and equipment/process. These individual segment roadmaps have been updated several times by collecting feedback from experts through workshops 2 & 3 and through the public MONA website. Thus, by using this process to have multiple validations from different sources, MONA has been able to precisely building up the different roadmaps. Each of these roadmaps drafts describes the nano technology, the application, the manufacturing process and required processes/equipments, as well as the timeline of technological development. In addition, specific roadmaps related to equipment/process have been established 4. Analysis of segment roadmaps, from the materials, equipment and applications viewpoint. In each analysis, the impact, the maturity level, the challenges, the European position and/or the potential for mass production have been discussed. Deliverables D2.1, D3.1 and D4.2 explain this analysis 5. Final synthesis: the final synthesis is to a large extent based on the material, equipment and application analysis. It highlights the major conclusions and recommendations of the MONA project. Semiconductor quantum dots&wires in silicon including colloidal nanostructures Semiconductor quantum dots&wires in III-V including colloidal nanostructures Semiconductor quantum dots&wires in II-VI including colloidal nanostructures Plasmonics/metallic nanostructures including colloidal nanostructures (metal) Photonic Crystals/High index contrast nanostructures in silicon Photonic Crystals/High index contrast nanostructures in III-V Photonic Crystals/High index contrast nanostructures in other materials Organic nanostructures Carbon Nanotubes (CNT) Integration of nanophotonic materials/structures with electronic ICs/Silicon Photonics Nanoparticles in glass or polymer Left-handed metamaterials Table 1: materials/applications matrix. Black boxes indicate that no potential application has been identified 13/02/2016 Dissemination level : Public Page 5/13 IST-017255 MONA Deliverable D0.4 (M30) Assessment and feedback For successful roadmapping, the process is as important as the technical quality. That means that the two following points are essential: Real involvement of the right players in set-up and propagation of the roadmap Endorsement of its strategic relevance by the wider photonics community including industry The MONA consortium has organised 3 different workshops to implement the roadmapping process. As an example, the second workshops gathered more than 100 experts from 13 European countries, including more than 40% industrial participants. During this event, the draft versions of the roadmaps have been discussed and improved. The third workshop has been organized during one of the major international conference in photonics in the US. This workshop has included comparison of several roadmapping activities in Japan, Korea, Taiwan, US and Europe. A continuous updating of the documents has been made until autumn 2007. Feedback from the wider nanophotonics community as well as industrial players has been encouraged. As an example, interviews have been made with Photonics21 workgroup leaders to consolidate the final synthesis. The following companies have been interviewed to get their feedback on the MONA final synthesis (the objective was to cover most of the application field covered by MONA roadmap): Bookham FhG IPMS KTH Novaleds Philips Sagem The general consensus from the interviewed people is that they agree with the recommendations of the MONA synthesis. MONA final document: “A European roadmap for photonics and nanotechnologies” A final document based on D5.1 “Report on final synthesis & recommendations” has been edited and will be broadly distributed. It gives a synthetic and comprehensive picture of the fields of nanophotonics by highlighting the key materials, applications and equipment. It gives first an overview of the impact of nanophotonics for various application fields (see an example in Figure 1) 13/02/2016 Dissemination level : Public Page 6/13 IST-017255 MONA Deliverable D0.4 (M30) Total market size $100B FP Displays II-VI QD & wires Nanoparticles in glass/polymers CNT Organic nanostructures $50B Photovoltaics $10B Imaging Si QD & wires CNT II-VI QD & wires Organic nanostructures Nanoparticles in glass/polymers III-V QD & wires III-V QD & wires Electronics/photonics integration Plasmonic III-V QD & wires $7B II-VI QD (CdSe) Nanoparticles in glass/polymers LED/lighting II-VI QD & wires (ZnO) High index III-V nanostructures Plasmonics Organic nanostructures Strong Medium Low Technical impact Figure 1 : Technical impact for nano materials for nanophotonics applications It also analyses the impact of equipment, as shown in Figure 2 Technical impact on nanophotonic devices performance Very large CNT CVD MOCVD, Colloidal chemical synthesis Nanophosphor fabrication Large Deep UV/EUV Sol gel, etching OVPD SiOx CVD, Direct nanoparticle deposition, Laser ablation, Electrodeposition Pyrolisis, TiO2 nanoparticle formation, Pulsed laser ablation Medium PECVD NIL X ray litho Ebeam litho FIB litho MBE, Si nanowire CVD Key processes & type of equipments for nanophotonic HVPE Potential for mass production Vapor phase ZnO Medium Large Spin coating Inkjet printing Low Medium Large Very large Very large Effort required to come to maturity for nanophotonic Figure 2 : Processes and types of equipment with high technical impact for nanophotonics A comprehensive synthesis presenting the situation in each application field has been made, showing the development timelines of most promising devices (see an example in Figure 3). 13/02/2016 Dissemination level : Public Page 7/13 IST-017255 MONA Deliverable D0.4 (M30) Application Flat panel displays (FPDs) Market forecast The total FPD market is forecasted to be $90B in 2009 Impact value Low Medium 1. Nanoparticles in glass/polymers for AR coatings Sol-gel Nanophotonic materials Key required type of equipment process Strong 1.II-VI QD OLEDs for active FPD Pyrolisis 2.OLEDs Printing 3.II-VI QD nanophosphors 1.CNT for FED, LCD backlighting & SED CVD CNT FED (low complexity) : 2007 2008 2009 2010 2011 2012 2013 2014 2015 2009 2010 2011 2012 2013 2014 2015 2009 2010 2011 2012 2013 2014 2015 CNT for LCD backlighting : Time lines for key nanomaterials/devices 2007 2008 CNT for SED : 2007 2008 Figure 3 : Synthesis per application: example of FPDs At the end of the report, the technical recommendations have been organized according to the perceived risk and nanophotonics benefits. The Table 2 below is an extract of the tables with applications/key devices/risks, technical recommendations and benefits for nanophotonics. isplays ($90 B) CNT for field emission display, LCD backlighting H Organic LED L Improved manufacturability for CNT (low cost, high reproducibility and purity, large size deposition): this is more engineering than R&D challenge. Biggest issues are to increase lifetime and display size of the device. Sensitivity to water and oxygen contamination must be reduced to improve lifetime. For flexible displays, encapsulation is a bottleneck and flexible encapsulation technique are being developed CNT will give less power consumption, better image quality CNT is a better electron emitter than standard microtips (silicon or tungsten) CNT are well adapted to field emission due to their very high aspect ratio (lower threshold of field emission). The current density is one of the key parameter for display application. OLEDs allows manufacturing of flexible and thinner displays Table 2 : example of recommendations for Displays Conclusion The MONA project has highlighted the major challenges in nanophotonics for Europe. For each of the key devices, actions would need to be taken to: 1. Improve the European Industrial position by supporting the technological transfer from labs to industry (entrepreneurs and start-up support, venture capital facilitation, funding of device development projects with R&D labs, SME, large companies….). 2. Answer to nanomaterial challenges: fundamental research, production scaling, toxicity, foundry access, industry standard. 3. Support the key related equipment. 13/02/2016 Dissemination level : Public Page 8/13 IST-017255 MONA Deliverable D0.4 (M30) One of the nanophotonics’ challenges would be to mutualise the efforts in order to create synergies between different applications. This could be done by doing common work for nanophotonic devices which are similar for different final application fields. We have identified potential synergies resulting from commonalities between devices. For display and lighting applications, the objective is to generate and distribute light with a high brightness and efficiency. In both fields, there is an increasing requirement to reduce power consumption and meet Kyoto protocol goals. The main devices under development which will be impacted by nanophotonics are LEDs, CNT Field emission displays and OLEDs. The second identified synergy is for optical interconnect and data telecom. Nanophotonics will allow improvement of data telecom devices to reach data rates higher than 40 Gb/s, whereas it will be the “must have” in the optical interconnect small dimension world. However, in the latter case, a very harsh competition with copper electrical links exists and low cost, high volume fabrication processes (e.g. CMOS compatible process) are mandatory in order that photonic devices should supersede electrical counterparts. There are also synergies between organic solar cells and OLEDs as challenges related to encapsulation and lifetime are similar. As for displays, these two applications fields are facing similar manufacturing challenges related to the fabrication and positioning of nanostructures on very large area substrates. The situation is thus different from nanoelectronics where the wafer and the device size is kept about one order of magnitude smaller (e.g. cm² range for device, dm² for the wafer). Although the position of Europe for nanophotonic devices manufacturing is not so strong (except for LEDs with Philips and Osram) and the majority of the manufacturing of semiconductor or photonic devices is done outside Europe, there is a strong equipment industry in Europe. This is the case for MBE, MOCVD, lithography, ALD, etching, OVPD, CNT CVD equipment, but also for equipment that is required for more exotic processes. Dissemination and communication Dissemination of the results and communication with other nanotechnologies and photonics activities are key objectives of MONA. The following actions have been made during the project: The MONA website http://www.ist-mona.org has been attractively designed and attracts more than 1000 visitors per day every day of the year. We keep continuing to improve the visibility of the MONA site by cross-linking the MONA site with related sites around the world. The public in over 90 countries around the world have visited the MONA website 8 newsletters have been issued and broadly distributed, and 9 press articles reporting on MONA have been made. Reviews of the Roadmap have appeared in both scientific and general-interest publications, like Nature Photonics, Small Times, and Optics.org MONA has participated to national, European and international conferences and scientific events, as the EOS Annual Meeting, The Wroclaw Symposium, the IEEE conferences in Korea, Photonics West in the USA, and Laser Munich. An exchange mission to Taiwan has been made with extensive two-way exchanges of information on nanotechnologies and photonics activities in European and in Taiwan. A CD-ROM on optics and nanotechnologies in Europe and in Taiwan has been edited and disseminated afterwards. The MONA consortium has organised 3 workshops to implement the roadmapping process. o After having sent questionnaires to European experts, the first workshop in April 2006 gathered few experts, one per field of expertise, to approve/disapprove/discuss the different issues raised by the questionnaires. o The second one organized in Nov 2006 in Grenoble gathered more than 100 experts from 13 European countries, including more than 40% industrial participants. During this event, the draft versions of the roadmaps have been discussed and improved. o The third workshop has been organized during Photonics West in January 2007 in the US. This workshop has included comparison of several roadmapping activities in Japan, Korea, Taiwan, US and Europe. 13/02/2016 Dissemination level : Public Page 9/13 IST-017255 MONA Deliverable D0.4 (M30) Two symposia have been organised. The first one in November 2006 in Grenoble together with workshop 2 presented the results of the 13 main FP6 projects in photonics/nanophotonics. The second one at Laser World 2007 on June 17, 2007 has been used to present the Nanophotonics roadmap soliciting contributions and criticism from the community. Speakers included MONA partners presenting the nanophotonics roadmaps, representatives from Research and from industry presenting their vision, as well as representatives from the European Commission and Photonics21. Links have been established with other European projects related to nanophotonics/nanotechnologies as PHOREMOST. It has been decided to line up the activities and make a combined effort in order not to duplicate efforts and come up with the best possible outcome. Photonics21: A direct contact between MONA and Photonics21 has been established. MONA has contributed to Photonics21 events (eg presentation of MONA at Photonics21-WG6 meeting) and vice-versa (presentation of Photonics21 at MONA symposia, assessment of MONA roadmap by Photonics21 WG leaders) Intention for use and impact MONA has produced tangible results for the benefit of the European Community. The main end results are roadmaps of technologies / processes / applications / research. OPERA 2015 & Photonics21: One of the most important events in the field of photonics during the last years was the launch of the European Technology Platform Photonics21. One of the objectives of the platform is to pave the way for Europe’s scientific, technological and economic leadership in Photonics and, in the long run, to make Europe the number one knowledge-based economic area in the world. Although several MONA consortium members play already an important role in the PHOTONICS21 Technology platform, a direct contact between the two activities has been established. A first document “Contribution of MONA to Photonics21”, based on the frame of Reference report as well as internal discussion between the partners has been provided. PHOTONICS21 could play an important role for utilising the MONA roadmaps in the planning of research programmes. Cross participation to meetings and workshops has been established. The potential contribution from MONA to Photonics21 is described in Figure 4. Photonics21 MONA WG6 Optical Components and Systems WG5 Security, Metrology and Sensors WG1 Information and Communication WG2 Industrial Manufacturing and Quality SRA is a living document WG3 Life Sciences and Health applications Become part of Photonics21, e.g providing nanophotonic roadmaps for application oriented and cross-sectoral working groups of Photonics21 WG7 Research, Education and Training WG4 Lighting and Displays cross-sectoral issues Figure 4 : contribution from MONA to Photonics21 13/02/2016 Dissemination level : Public Page 10/13 IST-017255 MONA Deliverable D0.4 (M30) Dissemination of MONA results In the project completion phase, MONA focussed on direct distribution of the roadmap on one hand, and high-profile presentations at two or three conferences to accompany the distribution of the roadmap vision. This would include at Photonics Europe 2008, even though the meeting lies beyond the finishing date of the project. We know that there is still no replacement for a hard copy, and MONA will print 300 copies. Hardcopies will be mailed to the ministries of research of each European Community state, plus associate members like Switzerland and Turkey. Additional hard copies will be distributed to the European Commission. The MONA project will urge the Commission to organise a technology consultation in this area, where MONA can present its roadmap to the R&D community. Of course the web site plays an important role by serving as a download site for the roadmap, but MONA will ask many organisations to do the same from their websites, too. The MONA roadmap has been developed in the context of world-wide contributions and competition. Strategic cooperation with roadmapping activities in Japan, Korea, Taiwan and the USA has ensured the overall relevance of the roadmap. MONA should serve as an informed input for the future FP7 workprogrammes. In particular, the MONA results can be used to build upcoming strategic research agendas for both nanomaterials and photonics. To be useful, a roadmap has to be alive and evolving. The MONA roadmap will be regularly updated through the MONA website (www.ist-mona.org). It allows the nanophotonics community to stay informed on the research and industrial evolution of nanophotonics. 13/02/2016 Dissemination level : Public Page 11/13 IST-017255 MONA Deliverable D0.4 (M30) Section 2 : Dissemination and use The dissemination of the major outcomes of the project have been made through several channels and media: 1. The dissemination of the roadmap is essential to the success of the project. A detailed dissemination plan is described in the report 2. A database of relevant European RTD projects within the past five years, providing convenient contact information regarding laboratories and industries working at the cutting edge of MONA-related science and technology. This database is available to the general public. 3. Links have been set up to and from the MONA website, and the websites of principal active RTD projects, NoE and other coordination/support actions in the photonics and nanotechnologies. Special attention was paid to link MONA and the Photonics 21 Technology Platform. 4. A detailed Dissemination Calendar has been prepared with successful contacts. It has been updated during the project. 5. A final MONA Symposium has been organised and presented. It served as the forum to present the coordinated vision of Photonics and nanotechnologies in FP-7. The preparation of a technology and applications roadmap for nanophotonics is the principal product of the MONA project. The document provides the first comprehensive guide for industry, academia and the European Commission regarding the development of nanophotonics in Europe. Dissemination of the roadmap as a work-in-progress, as well as a finished document is paramount to the success of the project. The over all dissemination strategy for the roadmap is divided into three phases: 1. Announcement 2. Synthesis 3. Completed project In the announcement phase, MONA communicated through all available means that there is a need for a roadmap, how the roadmap work would proceed, and to extend a broad invitation for participation and involvement in the project. MONA made presentations about the roadmap in both Eastern (OPERA2015 symposium in Wroclaw) and Western Europe (EOS meeting in Paris) in October 2006. Subsequently, presentations about the project were made in Korea, Taiwan and Japan in order to help gather information concerning R&D priorities in Asia. In January 2007, a workshop was organised at Photonics West in the USA with a similar objective. The roadmap project was the subject of articles appearing in newsletters 3 and 4, reporting the progress and soliciting both comments and involvement. These newsletters have been published in Optics and Laser Europe through a subcontract arrangement with the European Optical Society. In the synthesis phase, MONA issued quarterly progress reports. These have been incorporated into newsletters 5 through 7. In addition, a summary of the project progress has been made available on the MONA site. All participating organisations were asked to put a link on their own site to this summary. The roadmapping project has been an important focus of MONA Symposium 1. The symposium represented a significant opportunity to recruit participants in the roadmap project. MONA tried to place an article or an interview in the major European trade magazines to raise interest. MONA explored the possibility of a high-profile presentation at Laser Munich. In the project completion phase, MONA focussed on direct distribution of the roadmap on one hand, and high-profile presentations at two or three conferences to accompany the distribution of the roadmap vision. This would include at Photonics Europe 2008, even though the meeting lies beyond 13/02/2016 Dissemination level : Public Page 12/13 IST-017255 MONA Deliverable D0.4 (M30) the finishing date of the project. We know that there is still no replacement for a hard copy, and MONA will print 300 copies. Hardcopies will be mailed to the ministries of research of each European Community state, plus associate members like Switzerland and Turkey. Additional hard copies will be distributed to the European Commission. The MONA project will urge the Commission to organise a technology consultation in this area, where MONA can present its roadmap to the R&D community. Of course the web site plays an important role by serving as a download site for the roadmap, but MONA will ask many organisations to do the same from their websites, too. 13/02/2016 Dissemination level : Public Page 13/13