MONA (Merging Optics and Nanotechnologies)

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IST-017255 MONA
Deliverable D0.4 (M30)
Project number: 017255
MONA
Merging Optics and Nanotechnologies
Instrument: Specific Support Action
Thematic priorities: IST & NMP
Final activity report
Period covered: from month 1 to month 30
Start date of project: 01.06.2005
Project coordinator name : Laurent FULBERT
Project coordinator organisation name : CEA
13/02/2016
Dissemination level : Public
Date of preparation: 20.12.2007
Duration: 30 months
Revision : 1
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Table of contents
SECTION 1 – PROJECT EXECUTION ............................................................................................................ 3
PROJECT OBJECTIVES ........................................................................................................................................... 3
LIST OF PARTICIPANTS ......................................................................................................................................... 3
COORDINATOR CONTACT DETAILS ....................................................................................................................... 3
WORK PERFORMED AND RESULTS ACHIEVED....................................................................................................... 4
INTENTION FOR USE AND IMPACT ...................................................................................................................... 10
SECTION 2 : DISSEMINATION AND USE ................................................................................................... 12
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Section 1 – Project execution
Project objectives
The goal of the MONA project (Merging Optics and Nanotechnologies) is to leverage synergies in
photonics and nanotechnologies, seeking to increase the impact and efficiency of investment on
European research.
There are three principal objectives for the MONA project:
 Create a common site for the exchange of information concerning research, networks of
excellence, and integrated projects in photonics and nanotechnologies.
 Promote the timely exchange of scientific results, market development, and technology needs
through MONA-developed workshops.
 Develop a European roadmap for photonics and nanotechnologies.
MONA will foster collaborations between photonics and nanotechnologies stakeholders and will help
preparing future research activities. A major outcome of MONA will be a consolidated scenario (time
horizon 5-10 years), setting out development and technology road maps.
The MONA project contributes directly to the development of synergies between
photonics/nanophotonics and nanomaterials/nanotechnologies. The challenge of mastering nanoelectronics and nano-photonics science and technologies at an industrial scale (i.e. aiming at low cost
mass production capability) is of utmost strategic importance for the competitiveness of the European
industry in a global context. Through the cooperative work between equipment manufacturers,
nanotechnologies and photonics experts, MONA will help to identify and address the most critical
manufacturing issues. This will ensure the building of a strategic comprehensive approach for the key
technologies in order to profit from this highly important area for the European Union.
List of participants
Partic.
Role
CO
CR
CR
CR
CR
CR
CR
CR
CR
CR
CR
Participant name
Commissariat à l’Energie Atomique
Interuniversitair Micro-Elektronica Centrum VZW
Acreo AB
Schott AG
ALCATEL-THALES III-V LAB
AIXTRON AG
ASM-International, N.V
European Photonics Industry Consortium
VDI Technologiezentrum GmbH
Opticsvalley
Yole Développement
Participant short
name
CEA
IMEC
Acreo
Schott
A-T
AIX
ASMI
EPIC
VDI-TZ
OV
YD
Country
F
B
S
D
F
D
NL
F
D
F
F
Coordinator contact details
Laurent FULBERT
CEA-LETI
17, rue des Martyrs
38054 GRENOBLE cedex 9
tel : (+33) 438 78 38 45
mailto:laurent.fulbert@cea.fr
FRANCE
http://www.ist-mona.org
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Work performed and results achieved
During the 30 months of the MONA project, all the partners have contributed to the fulfilment of the
objectives. The general organisation of the project is described below
At the beginning of the project, a joint frame of reference has been established to set the starting point
of the project. Then, a comprehensive study of nanophotonic materials/devices/applications/equipment
has been made through workshop and interaction with world-wide experts. The final synthesis of the
roadmapping activities has been edited as a report entitled “A European roadmap for photonics and
nanotechnologies”. For the whole duration of project, dissemination activities have been undertaken to
reach the nanophotonic/nanotechnologies community. A detailed description of the MONA activities
is made hereafter.
Frame of reference
The objective of WP1 is to set the starting point of the project MONA regarding its content. WP1
serves to provide a joint frame of reference for the subsequent work packages.
The work summarizes the state of the art in both of the fields:
 Nanostructuring technologies
 Nanophotonics
Each of these two fields are analysed with respect to:
 Materials and technologies
 Equipment and processes.
The main result is a report that analyses and assesses the various technologies with respect to their
potential for volume production. In particular the compatibility with CMOS processes will be
investigated.
The main topics addressed in the report are:
 Current Production Technologies in Photonics
 Nanostructuring Technologies
o Top-Down Technologies
o Bottom-Up Technologies
 Photonics
o New Approaches in Nanophotonics
o Nanotechnology in Photonic Devices
 Equipment
 Projects and Networks of Relevance
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Development of a roadmap: methodology
Instrumentation
/metrology
Photovoltaics
Displays
Sensors
Imaging
Data storage
Lighting
Datacoms
/Telecoms
Optical
Interconnects
The roadmapping process has been made into several major steps
1. Identification: Based on the first MONA workshop, on the work done the frame of reference,
as well as on different market studies, the consortium members have made a selection of the
most promising applications area of Nanophotonics devices. The bottom-up methodological
approach leads us to identify several families of nanostructures/nanomaterials that could have
an impact on photonics (see Table 1).
2. Assessment of the use of nanomaterials: At each crossing point of the materials/applications
matrix, the relevance of the nanophotonic devices (which will benefit from nanomaterials for
nanophotonic application) has been assessed (no potential use of the considered materials in
the application, maybe a potential use, identified use of the considered material/nanostructure
class in the application …). This has been done at each matrix crossing point
(nanomaterial/application) through desk research, market surveys, and experts’ interview.
3. Completion of segment roadmap templates: In a second step, a roadmap template has been
completed at each crossing taking into account materials, applications and equipment/process.
These individual segment roadmaps have been updated several times by collecting feedback
from experts through workshops 2 & 3 and through the public MONA website. Thus, by using
this process to have multiple validations from different sources, MONA has been able to
precisely building up the different roadmaps. Each of these roadmaps drafts describes the nano
technology, the application, the manufacturing process and required processes/equipments, as
well as the timeline of technological development. In addition, specific roadmaps related to
equipment/process have been established
4. Analysis of segment roadmaps, from the materials, equipment and applications viewpoint. In
each analysis, the impact, the maturity level, the challenges, the European position and/or the
potential for mass production have been discussed. Deliverables D2.1, D3.1 and D4.2 explain
this analysis
5. Final synthesis: the final synthesis is to a large extent based on the material, equipment and
application analysis. It highlights the major conclusions and recommendations of the MONA
project.
Semiconductor quantum dots&wires in silicon
including colloidal nanostructures
Semiconductor quantum dots&wires in III-V
including colloidal nanostructures
Semiconductor quantum dots&wires in II-VI
including colloidal nanostructures
Plasmonics/metallic nanostructures including
colloidal nanostructures (metal)
Photonic Crystals/High index contrast
nanostructures in silicon
Photonic Crystals/High index contrast
nanostructures in III-V
Photonic Crystals/High index contrast
nanostructures in other materials
Organic nanostructures
Carbon Nanotubes (CNT)
Integration of nanophotonic
materials/structures with electronic ICs/Silicon
Photonics
Nanoparticles in glass or polymer
Left-handed metamaterials
Table 1: materials/applications matrix. Black boxes indicate that no potential application has been
identified
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Assessment and feedback
For successful roadmapping, the process is as important as the technical quality. That means that the
two following points are essential:
 Real involvement of the right players in set-up and propagation of the roadmap
 Endorsement of its strategic relevance by the wider photonics community including industry
The MONA consortium has organised 3 different workshops to implement the roadmapping process.
As an example, the second workshops gathered more than 100 experts from 13 European countries,
including more than 40% industrial participants. During this event, the draft versions of the roadmaps
have been discussed and improved.
The third workshop has been organized during one of the major international conference in photonics
in the US. This workshop has included comparison of several roadmapping activities in Japan, Korea,
Taiwan, US and Europe.
A continuous updating of the documents has been made until autumn 2007. Feedback from the wider
nanophotonics community as well as industrial players has been encouraged. As an example,
interviews have been made with Photonics21 workgroup leaders to consolidate the final synthesis. The
following companies have been interviewed to get their feedback on the MONA final synthesis (the
objective was to cover most of the application field covered by MONA roadmap):
 Bookham
 FhG IPMS
 KTH
 Novaleds
 Philips
 Sagem
The general consensus from the interviewed people is that they agree with the recommendations of the
MONA synthesis.
MONA final document: “A European roadmap for photonics and
nanotechnologies”
A final document based on D5.1 “Report on final synthesis & recommendations” has been edited and
will be broadly distributed. It gives a synthetic and comprehensive picture of the fields of
nanophotonics by highlighting the key materials, applications and equipment.
It gives first an overview of the impact of nanophotonics for various application fields (see an example
in Figure 1)
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Total market size
$100B
FP Displays
II-VI QD & wires
Nanoparticles in
glass/polymers
CNT
Organic
nanostructures
$50B
Photovoltaics
$10B
Imaging
Si QD & wires
CNT
II-VI QD & wires
Organic
nanostructures
Nanoparticles in
glass/polymers
III-V QD & wires
III-V QD & wires
Electronics/photonics
integration
Plasmonic
III-V QD & wires
$7B
II-VI QD (CdSe)
Nanoparticles
in glass/polymers
LED/lighting
II-VI QD & wires (ZnO)
High index III-V
nanostructures
Plasmonics
Organic nanostructures
Strong
Medium
Low
Technical impact
Figure 1 : Technical impact for nano materials for nanophotonics applications
It also analyses the impact of equipment, as shown in Figure 2
Technical impact on nanophotonic devices performance
Very large
CNT CVD
MOCVD, Colloidal chemical synthesis
Nanophosphor fabrication
Large
Deep UV/EUV
Sol gel, etching
OVPD
SiOx CVD,
Direct nanoparticle deposition,
Laser ablation,
Electrodeposition
Pyrolisis,
TiO2 nanoparticle formation,
Pulsed laser ablation
Medium
PECVD
NIL
X ray litho
Ebeam litho
FIB litho
MBE, Si nanowire CVD
Key processes & type
of equipments for
nanophotonic
HVPE
Potential for mass
production
Vapor phase ZnO
Medium
Large
Spin coating
Inkjet printing
Low
Medium
Large
Very large
Very large
Effort required to
come to maturity
for nanophotonic
Figure 2 : Processes and types of equipment with high technical impact for nanophotonics
A comprehensive synthesis presenting the situation in each application field has been made, showing
the development timelines of most promising devices (see an example in Figure 3).
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Application
Flat panel displays (FPDs)
Market forecast
The total FPD market is forecasted to be $90B in 2009
Impact value
Low
Medium
1. Nanoparticles in
glass/polymers for AR
coatings
Sol-gel
Nanophotonic materials
Key required type of
equipment process
Strong
1.II-VI QD OLEDs for
active FPD
Pyrolisis
2.OLEDs
Printing
3.II-VI QD
nanophosphors
1.CNT for FED, LCD
backlighting & SED
CVD
CNT FED (low complexity) :
2007
2008
2009
2010
2011
2012
2013
2014
2015
2009
2010
2011
2012
2013
2014
2015
2009
2010
2011
2012
2013
2014
2015
CNT for LCD backlighting :
Time lines for key
nanomaterials/devices
2007
2008
CNT for SED :
2007
2008
Figure 3 : Synthesis per application: example of FPDs
At the end of the report, the technical recommendations have been organized according to the
perceived risk and nanophotonics benefits.
The Table 2 below is an extract of the tables with applications/key devices/risks, technical
recommendations and benefits for nanophotonics.
isplays
($90 B)
CNT for
field
emission
display,
LCD
backlighting

H

Organic
LED

L

Improved manufacturability for CNT (low
cost, high reproducibility and purity, large
size deposition): this is more engineering
than R&D challenge.
Biggest issues are to increase lifetime
and display size of the device.
Sensitivity to water and oxygen
contamination must be reduced to
improve lifetime.
For flexible displays, encapsulation is a
bottleneck and flexible encapsulation
technique are being developed



CNT will give less power consumption, better image quality
CNT is a better electron emitter than standard microtips
(silicon or tungsten)
CNT are well adapted to field emission due to their very
high aspect ratio (lower threshold of field emission). The
current density is one of the key parameter for display
application.

OLEDs allows manufacturing of flexible and thinner displays
Table 2 : example of recommendations for Displays
Conclusion
The MONA project has highlighted the major challenges in nanophotonics for Europe. For each of the
key devices, actions would need to be taken to:
1. Improve the European Industrial position by supporting the technological transfer from labs to
industry (entrepreneurs and start-up support, venture capital facilitation, funding of device
development projects with R&D labs, SME, large companies….).
2. Answer to nanomaterial challenges: fundamental research, production scaling, toxicity,
foundry access, industry standard.
3. Support the key related equipment.
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One of the nanophotonics’ challenges would be to mutualise the efforts in order to create synergies
between different applications. This could be done by doing common work for nanophotonic devices
which are similar for different final application fields. We have identified potential synergies resulting
from commonalities between devices.
 For display and lighting applications, the objective is to generate and distribute light with a
high brightness and efficiency. In both fields, there is an increasing requirement to reduce
power consumption and meet Kyoto protocol goals. The main devices under development
which will be impacted by nanophotonics are LEDs, CNT Field emission displays and
OLEDs.
 The second identified synergy is for optical interconnect and data telecom. Nanophotonics will
allow improvement of data telecom devices to reach data rates higher than 40 Gb/s, whereas it
will be the “must have” in the optical interconnect small dimension world. However, in the
latter case, a very harsh competition with copper electrical links exists and low cost, high
volume fabrication processes (e.g. CMOS compatible process) are mandatory in order that
photonic devices should supersede electrical counterparts.
 There are also synergies between organic solar cells and OLEDs as challenges related to
encapsulation and lifetime are similar. As for displays, these two applications fields are facing
similar manufacturing challenges related to the fabrication and positioning of nanostructures
on very large area substrates. The situation is thus different from nanoelectronics where the
wafer and the device size is kept about one order of magnitude smaller (e.g. cm² range for
device, dm² for the wafer).
Although the position of Europe for nanophotonic devices manufacturing is not so strong (except for
LEDs with Philips and Osram) and the majority of the manufacturing of semiconductor or photonic
devices is done outside Europe, there is a strong equipment industry in Europe. This is the case for
MBE, MOCVD, lithography, ALD, etching, OVPD, CNT CVD equipment, but also for equipment
that is required for more exotic processes.
Dissemination and communication
Dissemination of the results and communication with other nanotechnologies and photonics activities
are key objectives of MONA. The following actions have been made during the project:
 The MONA website http://www.ist-mona.org has been attractively designed and attracts more
than 1000 visitors per day every day of the year. We keep continuing to improve the visibility
of the MONA site by cross-linking the MONA site with related sites around the world. The
public in over 90 countries around the world have visited the MONA website
 8 newsletters have been issued and broadly distributed, and 9 press articles reporting on
MONA have been made. Reviews of the Roadmap have appeared in both scientific and
general-interest publications, like Nature Photonics, Small Times, and Optics.org
 MONA has participated to national, European and international conferences and scientific
events, as the EOS Annual Meeting, The Wroclaw Symposium, the IEEE conferences in
Korea, Photonics West in the USA, and Laser Munich. An exchange mission to Taiwan has
been made with extensive two-way exchanges of information on nanotechnologies and
photonics activities in European and in Taiwan. A CD-ROM on optics and nanotechnologies
in Europe and in Taiwan has been edited and disseminated afterwards.
 The MONA consortium has organised 3 workshops to implement the roadmapping process.
o After having sent questionnaires to European experts, the first workshop in April 2006
gathered few experts, one per field of expertise, to approve/disapprove/discuss the
different issues raised by the questionnaires.
o The second one organized in Nov 2006 in Grenoble gathered more than 100 experts
from 13 European countries, including more than 40% industrial participants. During
this event, the draft versions of the roadmaps have been discussed and improved.
o The third workshop has been organized during Photonics West in January 2007 in the
US. This workshop has included comparison of several roadmapping activities in
Japan, Korea, Taiwan, US and Europe.
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Deliverable D0.4 (M30)
Two symposia have been organised. The first one in November 2006 in Grenoble together
with workshop 2 presented the results of the 13 main FP6 projects in
photonics/nanophotonics. The second one at Laser World 2007 on June 17, 2007 has been
used to present the Nanophotonics roadmap soliciting contributions and criticism from the
community. Speakers included MONA partners presenting the nanophotonics roadmaps,
representatives from Research and from industry presenting their vision, as well as
representatives from the European Commission and Photonics21.
Links have been established with other European projects related to
nanophotonics/nanotechnologies as PHOREMOST. It has been decided to line up the
activities and make a combined effort in order not to duplicate efforts and come up with the
best possible outcome.
Photonics21: A direct contact between MONA and Photonics21 has been established. MONA
has contributed to Photonics21 events (eg presentation of MONA at Photonics21-WG6
meeting) and vice-versa (presentation of Photonics21 at MONA symposia, assessment of
MONA roadmap by Photonics21 WG leaders)
Intention for use and impact
MONA has produced tangible results for the benefit of the European Community. The main end
results are roadmaps of technologies / processes / applications / research.
OPERA 2015 & Photonics21:
One of the most important events in the field of photonics during the last years was the launch of the
European Technology Platform Photonics21. One of the objectives of the platform is to pave the way
for Europe’s scientific, technological and economic leadership in Photonics and, in the long run, to
make Europe the number one knowledge-based economic area in the world.
Although several MONA consortium members play already an important role in the PHOTONICS21
Technology platform, a direct contact between the two activities has been established. A first
document “Contribution of MONA to Photonics21”, based on the frame of Reference report as well as
internal discussion between the partners has been provided. PHOTONICS21 could play an important
role for utilising the MONA roadmaps in the planning of research programmes. Cross participation to
meetings and workshops has been established. The potential contribution from MONA to Photonics21
is described in Figure 4.
Photonics21
MONA
WG6
Optical
Components
and Systems
WG5
Security,
Metrology
and Sensors
WG1
Information and Communication
WG2
Industrial Manufacturing and Quality
SRA is a living document
WG3
Life Sciences and Health
applications
Become part of Photonics21,
e.g
providing
nanophotonic
roadmaps for application oriented
and cross-sectoral
working groups of Photonics21
WG7
Research,
Education
and Training
WG4
Lighting and Displays
cross-sectoral issues
Figure 4 : contribution from MONA to Photonics21
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Dissemination of MONA results
In the project completion phase, MONA focussed on direct distribution of the roadmap on one hand,
and high-profile presentations at two or three conferences to accompany the distribution of the
roadmap vision. This would include at Photonics Europe 2008, even though the meeting lies beyond
the finishing date of the project. We know that there is still no replacement for a hard copy, and
MONA will print 300 copies. Hardcopies will be mailed to the ministries of research of each
European Community state, plus associate members like Switzerland and Turkey. Additional hard
copies will be distributed to the European Commission. The MONA project will urge the Commission
to organise a technology consultation in this area, where MONA can present its roadmap to the R&D
community. Of course the web site plays an important role by serving as a download site for the
roadmap, but MONA will ask many organisations to do the same from their websites, too.
The MONA roadmap has been developed in the context of world-wide contributions and competition.
Strategic cooperation with roadmapping activities in Japan, Korea, Taiwan and the USA has ensured
the overall relevance of the roadmap.
MONA should serve as an informed input for the future FP7 workprogrammes. In particular, the
MONA results can be used to build upcoming strategic research agendas for both nanomaterials and
photonics. To be useful, a roadmap has to be alive and evolving. The MONA roadmap will be
regularly updated through the MONA website (www.ist-mona.org). It allows the nanophotonics
community to stay informed on the research and industrial evolution of nanophotonics.
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Section 2 : Dissemination and use
The dissemination of the major outcomes of the project have been made through several channels and
media:
1. The dissemination of the roadmap is essential to the success of the project. A detailed
dissemination plan is described in the report
2. A database of relevant European RTD projects within the past five years, providing
convenient contact information regarding laboratories and industries working at the cutting
edge of MONA-related science and technology. This database is available to the general
public.
3. Links have been set up to and from the MONA website, and the websites of principal
active RTD projects, NoE and other coordination/support actions in the photonics and
nanotechnologies. Special attention was paid to link MONA and the Photonics 21 Technology
Platform.
4. A detailed Dissemination Calendar has been prepared with successful contacts. It has
been updated during the project.
5. A final MONA Symposium has been organised and presented. It served as the forum to
present the coordinated vision of Photonics and nanotechnologies in FP-7.
The preparation of a technology and applications roadmap for nanophotonics is the principal product
of the MONA project. The document provides the first comprehensive guide for industry, academia
and the European Commission regarding the development of nanophotonics in Europe. Dissemination
of the roadmap as a work-in-progress, as well as a finished document is paramount to the success of
the project. The over all dissemination strategy for the roadmap is divided into three phases:
1. Announcement
2. Synthesis
3. Completed project
In the announcement phase, MONA communicated through all available means that there is a need for
a roadmap, how the roadmap work would proceed, and to extend a broad invitation for participation
and involvement in the project. MONA made presentations about the roadmap in both Eastern
(OPERA2015 symposium in Wroclaw) and Western Europe (EOS meeting in Paris) in October 2006.
Subsequently, presentations about the project were made in Korea, Taiwan and Japan in order to help
gather information concerning R&D priorities in Asia. In January 2007, a workshop was organised at
Photonics West in the USA with a similar objective.
The roadmap project was the subject of articles appearing in newsletters 3 and 4, reporting the
progress and soliciting both comments and involvement. These newsletters have been published in
Optics and Laser Europe through a subcontract arrangement with the European Optical Society.
In the synthesis phase, MONA issued quarterly progress reports. These have been incorporated into
newsletters 5 through 7. In addition, a summary of the project progress has been made available on the
MONA site. All participating organisations were asked to put a link on their own site to this summary.
The roadmapping project has been an important focus of MONA Symposium 1. The symposium
represented a significant opportunity to recruit participants in the roadmap project. MONA tried to
place an article or an interview in the major European trade magazines to raise interest. MONA
explored the possibility of a high-profile presentation at Laser Munich.
In the project completion phase, MONA focussed on direct distribution of the roadmap on one hand,
and high-profile presentations at two or three conferences to accompany the distribution of the
roadmap vision. This would include at Photonics Europe 2008, even though the meeting lies beyond
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the finishing date of the project. We know that there is still no replacement for a hard copy, and
MONA will print 300 copies. Hardcopies will be mailed to the ministries of research of each
European Community state, plus associate members like Switzerland and Turkey. Additional hard
copies will be distributed to the European Commission. The MONA project will urge the Commission
to organise a technology consultation in this area, where MONA can present its roadmap to the R&D
community. Of course the web site plays an important role by serving as a download site for the
roadmap, but MONA will ask many organisations to do the same from their websites, too.
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