Background Statement for SEMI Draft Document 5781
Reapproval of SEMI G75.1-0698 (Reapproved 0706), Test Method for
Measurement of Ionic Impurities in Leadframe Tape
Notice: This background statement is not part of the balloted item. It is provided solely to assist the recipient in
reaching an informed decision based on the rationale of the activity that preceded the creation of this Document.
Notice: Recipients of this Document are invited to submit, with their comments, notification of any relevant
patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this
context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the
latter case, only publicly available information on the contents of the patent application is to be provided.
Background
SEMI G75.1 is due for 5-year review. At the meeting of the Japan Assembly & Packaging TC Chapter Meeting on
September 29, 2014, the committee agreed to ballot SEMI G75.1 for reapproval without changes.
Review and Adjudication Information
Group:
Date:
Time & Timezone:
Location:
City, State/Country:
Leader(s)/Author(s):
Standards Staff:
Task Force Review
Packaging 5 Year Review Task Force
TBD
TBD
SEMI Japan
Tokyo, Japan
Kazunori Kato (AiT)
aitkato@attglobal.net
Naoko Tejima (SEMI Japan)
81.3.3222.5804
ntejima@semi.org
Committee Adjudication
Japan Assembly & Packaging TC Chapter
2015/01/20
15:00-17:00
SEMI Japan
Tokyo, Japan
Kazunori Kato (AiT)
Masahiro Tsuriya (iNEMI)
Yutaka Koma (Consultant)
Naoko Tejima (SEMI Japan)
81.3.3222.5804
ntejima@semi.org
This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Please
contact Standards staff (Naoko Tejima at ntejima@semi.org) for confirmation.
Semiconductor Equipment and Materials International
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SEMI Draft Document 5781
Reapproval of SEMI G75.1-0698 (Reapproved 0706), Test Method for
Measurement of Ionic Impurities in Leadframe Tape
This standard was technically approved by the global Assembly & Packaging Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on May 16, 2006. It was available
at www.semi.org in June 2006 and on CD-ROM in July 2006. Originally published June 1998.
1 Summary of Method
1.1 Ionic impurities are extracted from sample tape by water at 100°C or 121°C and quantitatively analyzed by ion
chromatography and flame photometry or atomic absorption spectrometry. The pH and electrical conductivity of
the extracted solutions are also measured.
1.2 If sample tape needs the cure before the extraction, vender should inform the customer of the necessity of curing
and report the impurity data after cure.
1.3 Ion chromatography is used to determine the presence and concentration of the following ionic species: Na +,
NH4+, K+, NO3-, Cl-, Br-, SO42-, PO43-.
1.4 Flame photometry or atomic absorption spectrometry is used to determine the concentration of Na + and K+ ions.
1.5 pH and conductivity measurements are also described.
2 Referenced Standards and Documents
2.1 SEMI Standards
SEMI G29 — Test Method for Trace Contaminants in Molding Compounds
SEMI G59 — Test Method for Measurement of Ionic Contamination on Leadframe Interleafing and the
Contamination Transferred from the Interleafing to the Leadframes
2.2 ASTM Standards1
ASTM D 1125 — Standard Test Methods for Electrical Conductivity and Resistivity of Water
ASTM D 1193 — Standard Specification for Reagent Water
ASTM D 4327 — Standard Test Method for Anions in Water by Ion Chromatography
ASTM E 70 — Standard Test Method for pH of Aqueous Solutions with the Glass Electrode
2.3 JIS Specifications2
JIS K 0121 — General Rules for Atomic Absorption Spectrochemical Analyses
JIS Z 8802 — Method for Determination of pH of Aqueous Solutions
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
3 Interferences
3.1 All the sample preparations and measurements must be carried out in clean containers which have been washed
in deionized water in order to reduce any spurious readings.
3.2 Electrodes and syringes must be similarly cleaned before each test.
3.3 Contamination from the sampling process may also affect the results.
4 Equipment
4.1 Ion Extraction Vessels-Parr bomb with Teflon liner.
1
American Society for Testing and Materials, 100 Barr Harbor Drive, West Conshohocken, Pennsylvania 19428-2959, USA.
Telephone: 610.832.9585, Fax: 610.832.9555; Website: www.astm.org
2
Japanese Standards Association, 1-24, Akasaka 4 Chome, Minato-ku, Tokyo, Japan
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5781
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Ion chromatograph for anion and cation analysis (see SEMI G59).
Flame photometer or atomic absorption spectrometer.
Standard solution preparation vessels, balance and volumetric dispensers (see SEMI G29 and SEMI G59).
pH meter.
Microconductivity cell and meter.
5 Reagents and Materials
5.1 Deionized water, conductivity of less than 1.0 µ S/cm at 25°C per ASTM D 1193.
5.2 Eluents and regenerants for specific chromatograph columns prepared per chromatograph equipment
manufacturer’s recommendations so that the water peak can be separated from the ionic peaks.
5.3 Compounds for Standard Solutions
5.3.1 Cations — NaCl, NH4Cl, KCl
5.3.2 Anions — NaCl, Na2HPO412H2O, NaBr, NaNO3, K2SO4
NOTE 1: All compounds to be reagent grade.
5.4 pH standard solutions.
6 Sampling
6.1 Personnel handling the tape must wear double-layered cotton gloves and polyethylene outer gloves in order to
avoid additional sample contamination.
6.2 The sampling is one sample per one lot. The vendor must report the definition of lot, if customer requires it.
7 Preparation of Standard Solution and Equipment Calibration
7.1 Preparation of Standard Solutions and Chromatograph Calibration
7.1.1 Refer to SEMI G59, § 9 and ASTM D 4327.
7.2 Preparation of Standard Solutions and Flame Photometer or Atomic Absorption Spectrometer Calibration
7.2.1 Refer to SEMI G29 and JIS K 0121.
7.3 Preparation of Standard Solutions and pH Meter Calibration
7.3.1 Refer to ASTM E 70 or JIS Z 8802.
7.3.2 Using the standard pH solutions, calibrate the pH meter according to the manufacturer's instructions.
7.4 Preparation of Standard Solutions and Conductivity Cell Calibration
7.4.1 Refer to ASTM D 1125.
8 Measurement
8.1 Procedure for Impurity Extraction
8.1.1 Remove the protective film from the sample of tape. Cure the tape per tape manufacturer's recommendation,
if necessary.
 Cut the sample of tape so that it becomes smaller than 2 × 2 cm.
8.1.3 Place 5 ± 0.1 grams of the tape sample into the Parr bomb, and add 50 ± 0.5 grams of deionized water.
8.1.3.1 In a second bomb, add deionized water only so that a blank solution may be obtained for measurement of
the ionic contributed by the bomb.
NOTE 2: It may be necessary to perform the blank test on both bombs in order to leach out excessive extractable ionic species.
8.1.4 Seal the caps and heat the bombs in an oven set at 100 ± 2°C, for 20 ± 0.25 hours.
NOTE 3: The oven temperature may be set at 121 ± 2°C for 20 hours, if specified.
8.1.5 Allow the bombs to reach room temperature.
8.1.6 Open the bombs just before the measurements are to be made. Measurements must be made within eight
hours of the completion of the sample preparation.
8.2 Quantitative Analysis by Ion Chromatography
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
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4.2
4.3
4.4
4.5
4.6
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Document Number: 5781
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8.2.1 Prepare the chromatograph for operation by regenerating the columns according to the manufacturer’s
recommendations.
8.2.2 Run the eluent through the chromatograph until a stable baseline calibration is established.
8.2.3 Inject the recommended sample size of test solution into the chromatograph and record the ion chromatogram.
8.2.4 Repeat for all the samples and also run the background sample.
8.2.5 Determine the ionic type and concentration from the calibration curves.
8.2.6 Results
8.2.6.1 The concentration of ionic species in the leadframe tape is given by:
A=
(B  C)  50
5
where :
A is the ionic content of the leadframe
tape (ppm)
B is the ionic content on the extracted
solution, determined from the calibration
curves (ppm)
C is the ionic concentration of the back ground sample (ppm)
8.3 Quantitative Analysis by Flame Photometer or Atomic Absorption Spectrometer
8.3.1 Set a specific operational condition for an apparatus.
8.3.2 Introduce the recommended sample size of test solution into a flame.
8.3.3 Repeat for all the samples and also introduce the background sample.
8.3.4 Determine the concentration from calibration curves.
8.3.5 Results
8.3.5.1 The concentration of ionic species in the leadframe tape is given by:
A=
(B  C)  50
5
where :
A is the ionic content of the leadframe
tape (ppm)
B is the ionic content on the extracted
solution, determined from the calibration
curves (ppm)
C is the ionic concentration of the back ground sample (ppm)
8.4 pH Measurements
8.4.1 Place the pH electrode into the sample solution and record the pH after one minute.
8.5 Electrical Conductivity Measurements
8.5.1 Place the conductivity cell into the sample solution and record the conductivity after one minute.
This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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9 Related Documents
NOTE 4:
Additional information relating to test methods for these ionic species may be found in the following specifications:
9.1 ASTM Specifications
ASTM D 512 — Standard Test Methods for Chloride Ion in Water
ASTM D 1293 — Standard Test Methods for pH of Water
9.2 JIS Specification
JIS K 0102 — Testing Methods for Industrial Wastewater
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This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline.
Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document
development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.
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Document Number: 5781
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