ISSUE 14-03-2011
The University of Florida
I.
DATE:
14-032011
PAGE:
1 OF 2
Advisor: Dr. Jacob Jones
Author: Sungwook Mhin
Title: Mass flow controller
PURPOSE
To establish a procedure for using readout with mass flow controllers when
making atmospheric conditions inside the tube furnace
II.
OUTLINE OF METHOD
The following instructions should be followed
III. Resources
The following is the necessary equipment that is needed for controlling
atmospheric conditions:
1.
2.
3.
4.
5.
Readout
2 Mass flow controller
Flow meter
3 gases (Ar, O2, Ar balanced with H2)
Tube furnace
IV. Safety
1. Don’t flow the Ar balanced H2 with O2 gas together.
2. The outlet of tube furnace should be inside the ventilating system.
V. PROCEDURE
Follow the following steps:
1. Turn on the readout (power – on)
2. When you want to use Ar balanced with H2, O2 and Ar gas, use the
channel 1, channel 2 and flow meter, respectively.
3. When you want to see how much gases are flown, please, see the flow
display. When you start to operate, it shows 000.
4. After setting the channel display jog to the channel what you want to use,
hold the Set pt. bar (You can see how much gases will be flown through
the mass flow controller through the display.) When you hold the set pt.
bar, change the value of flow using the Set pt. jog. (The ‘-‘ screw driver
can be used.) The value will be displayed with red colors. When you
release the Set pt. bar, it goes back to original point and display shows the
value how much gases flow through the mass flow controller.
ISSUE 14-03-2011
DATE:
14-032011
The University of Florida
PAGE:
2 OF 2
Advisor: Dr. Jacob Jones
Author: Sungwook Mhin
Title: Mass flow controller
5. Turn on the gases using regulators.
6. Open the valves next to the mass flow controller.
7. Before flowing the gases, confirm the value is ‘000’. If it is not zero,
change the value to 0 using ‘Z’ jog.
8. After all the procedure, turn on the channel (1or 2). The flow display
shows increasing the values up to what you set up. (Before doing
experiment, please, warm up the mass flow controller for a few minutes.)
9. The amount of gases flown through the each mass flow controller is
shown in the display.
10. After experiments, turn off the channel and turn off the power. After that,
close the valve and gases.
Open valve
Regulator
Power on
Channel 1
Flow display
Power on bar
Channel display jog
Set pt. jog
Set pt. bar
ISSUE 14-03-2011
The University of Florida
DATE:
14-032011
PAGE:
3 OF 2
Advisor: Dr. Jacob Jones
Author: Sungwook Mhin
Title: Mass flow controller
Valve