Oxygenmeter YSZ-210
Sell Price: $5,400
Shipping cost: Free
Restocking Fee: Free (30 days), 10% (after 30
days)
Oxygenmeter YSZ-210 has two major functions: (1)
oxygen monitoring and (2) gas mixing. The Oxygenmeter YSZ210 contains an oxygen sensor that monitors the oxygen
pressure in a gas stream continuously. The detection of the
oxygen sensor ranges from 1.0 atm to 1.0 x 10-30 atm of
oxygen pressure. In addition, the Oxygenmeter YSZ-210
contains a two-flowtube flowmeter system to generate a gas
mixture from two different gases. With the capability of
oxygen monitoring, the gas mixture can be controlled to
achieve a specific oxygen pressure or to a desired gas ratio.
Features
Oxygen Monitoring
 Measures oxygen pressure from 1.0 atm to 1.0 x 10-30
atm.
 Fast response (99% of step change in less than 10
seconds)
 One-point calibration is sufficient for entire range
 Accuracy increases at lower oxygen concentrations
 Extremely stable sensor operation with months of
trouble-free service
 Low maintenance
 Stand-alone or cabinet mounted
Gas Mixing
 The flowmeter system contains two 65-mm flowtubes
 Both flowtubes have a flowrate of 5 SLPM of directreading of air
 Metering needle valve cartridges are used to control for
greater precision flow rates. The valve cartridge has 10
turns to control to the flow rate over the entire range
 The maximum flowrate through the oxygen sensor
reactor is 10 SLPM
 Standard flowtubes, 5 SLPM, can achieve gas ratios of
two gases from 1 : 1 to 1 : 0.01. By replacing one of the
flowtubes to 50 mL/min, the gas ratio can range from 1 :
0.01 to 1 : 0.0001
Applications
Oxygenmeter YSZ-210 is typically used in applications such
as:
 Semiconductor manufacturing processes
 Heat treatment and metallurgical processes
 Metal and ceramic research
 Air separation plants
 Glove boxes
 Inert gas purity
 Blanket gas purity
 Medical research
Operating
Oxygen Sensor: Pt-YSZ Cell
A voltaic cell of the concentration type is used to detect the oxygen pressure in a gas stream.
The voltaic cell contains an yttrium-stabilized zirconia (YSZ) solid electrolyte and two platinum
electrodes. At elevated temperatures the mobility of oxygen ions in the YSZ solid electrolyte is
high. This allows oxygen ions to migrate through the YSZ electrolyte when driven by differences
in the oxygen pressures. The migration of oxygen ions results in a voltage difference between
two platinum electrodes. The magnitude of the voltage difference increases as the difference of
oxygen pressures between two electrodes increases.
Operating Temperature and its control: 750°C
Normally, an YSZ oxygen sensor requires a minimum operating temperature of 500°C. A higher
operating temperature increases a higher oxygen ion mobility in the YSZ solid electrolyte and
has a shorter response time to achieve the oxygen pressure measurement. For the
Oxygenmeter YSZ-210, the operating temperature is set at 750°C.
Temperature control: Fuzzy Logic control
The operating temperature, 750°C, is preset and locked in a temperature controller. A fuzzy
logic with an auto-tuned program in the temperature controller is used to minimize the
temperature instability during the heating and the change of gas flowrates. A Type K
thermocouple positioned inside the YSZ tube is used to monitor and control the temperature of
the YSZ oxygen sensor. The Type K thermocouple is calibrated at 750°C against a Type S
thermocouple standard that was certified by NIST. Any temperature deviation of the Type K
thermocouple from the NIST standard is corrected in the temperature controller.
Oxygen detection Level: 1.0 atm to 1.0 x 10-30 atm
A process meter is used to convert a voltage generated by the YSZ oxygen sensor into a true
oxygen pressure. This process meter is calibrated at two voltages that cover a range of oxygen
pressure from 1.0 atm to 1.0 x 10-30 atm.
Digital LED Display of O2 Level: Log (PO2, atm)
Oxygen pressure displayed on the process meter is shown in the form of Log
(PO2, atm).
Some examples of oxygen pressure in the form of Log (PO2, atm) and PO2, atm are shown
below:
Log (PO2, atm)
PO2, atm
PO2, atm
-10.0
10-10.0
1.00 x 10-10
-10.5
10-10.5
3.16 x 10-11
-11.0
10-11.0
1.00 x 10-11
Gas Flow Controls: Up to 10 SLPM (21 SCFH)
A MTF multitube flow system contains two 65 mm direct-reading flowtubes. Each flowtube
carries a flow rate up to 5 SLPM. The flow system allows to blend two gases to produce a gas
mixture up to 10 SLPM. Two 10-turn, metering needle valve-cartridges are used to control the
precision of flow rates.
Examples of oxygen pressures from gas mixing:
Oxygen pressures, displayed in the form of Log
(PO2, atm), from gas mixing can range from
0.0 to -30.0. Examples of oxygen pressure from a mixture of two gases are shown below:
Gas Mixture
Gas Ratio
Log (PO2, atm)
PO2, atm
Ar/air
1 : 0.1
-1.72
1.91 x 10-2
Ar/O2
1 : 0.001
-3.00
1.00 x 10-3
-5.30
5.00 x 10-6
UHP Ar
CO2/CO
@750°C
1 : 0.01
-16.77
1.70 x 10-17
H2/H2O
@750°C
1 : 0.01
-23.53
2.95 x 10-24
Power: 115 VAC, 50/60 Hz, 800W maximum
Gas Connections: ¼ inch compression tube fitting
Calibrations:
Each Oxygenmeter YSZ-210 was calibrated by using a certified-grade of
UHP argon.
Ambient Requirements:
Temperature range: 14°F to 140°F (-10°C to 60°C)
Relative humidity: 90 RH%, non-condensing.
Dimensions: 19” W x 17” D x 9” H
Weight: 20 lbs
Performance
Accuracy: ± 2% of reading
Repeatability: ± 1% of reading
Warm-Up Time: 30 minutes nominal
System Warning and other limitations:
1) Before introducing any explosive gas, such as hydrogen gas, into the Oxygenmeter YSZ210, it requires to dilute the oxygen pressure in the system below 0.1% (or 10-3) atm to
avoid any rapid reaction or explosion in the YSZ reactor.
2) Measurements in the extreme-low range of oxygen pressure, such as in hydrogen gas or
in other reducing gases, may be limited by the trace amount of oxygen, water vapor, or
other hydrocarbon compounds in the gas input as well as the desorption of water vapor
and oxygen molecular from the interior surface of the system.
3) The YSZ sensor is sensitive to the contamination from foreign gas species, such as
hydrogen sulfide, hydrogen bromide, hydrocarbons and other compounds. Some precleaning procedures for the input gas will prolong the useful lifetime of the YSZ sensor.