The physics and technology of QMS

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The physics and technology of QMS

J H Batey

Workshop on measurement characteristics and use of quadrupole mass spectrometers for vacuum applications

Bled, Slovenia, April 10–13, 2012

Paul & Steinwedel 1956 DE 944900

Examples of quadrupole construction

Typical quadrupole RGAs from c. 1982

Anavac SX200

Modern RGAs

Typical analytical quadrupole from c. 1990

A novel geometry: circular axis to make a compact instrument

1

Liverpool microquadrupole mass filter

Rods 0.5 mm diameter r0 0.22 mm

Length 20 mm

2

Mass filters come in a wide range of sizes …

1: ICP-MS

L: 230mm r0: 5.5mm

2: RGA (SX200)

L: 125mm r0: 2.7mm

3: RGA (Anavac)

L: 50mm r0: 2.7 mm

4: Microquad

L: 20mm r0: 0.22 mm

1 2 3 4

Isotope separators: quadrupoles on an altogether different scale!

Finlan, Sunderland & Todd,

Nucl. Inst & Methods,

195 (1982), 447-456

Von Zahn,

Zeitschrift fur Physik,

168 (1962), 129-142 r

0

: 13.5mm

L : 3 metres r

0

: 35mm

L : 5.86 metres

Early mass spectrometer: Dempster 1918

Recognizable components:

• Vacuum system

• Source

• Mass analyzer

• Detector

Isotope studies on alkali metals

Main components of a mass spectrometer

Main components can be identified in

Dempster’s system

Quadrupole mass spectrometer

Ion source

Electron-impact source is the commonest. The design can be quite complex for analytical mass spectrometers.

Filament; source electrode; extraction optics

Source voltage; electron energy

Repeller; collimating magnets

RGA source

For an RGA the source is of relatively simple construction – it resembles an extractor ion gauge.

Source

General requirements :

• Physical size

- usually “small enough”

• Sensitive

- typically 10 -4

• Robust

• Linear

A/mbar

- beware of log/log plots

• Reproducible

• Serviceable

- easy to dismantle/reassemble

• Low power; low voltage

• Non-invasive;

- that is, operating the mass spectrometer should not alter the vacuum composition

Desirable features

• Keep electrons confined to source

- avoid electron background signal

• Variable electron energy

- helps separate some species

• Low outgassing

- minimise materials

• Avoid trapped volumes

memory effects

• Closed or open?

- depends on application

• Choice of filament material

- tungsten, thoria, yttria

Linearity: beware of “log-log” plots!

Which would you rather have?

Source

General requirements :

• Physical size

- usually “small enough”

• Sensitive

- typically 10 -4

• Robust

• Linear

A/mbar

- beware of log/log plots

• Reproducible

• Serviceable

- easy to dismantle/reassemble

• Low power; low voltage

• Non-invasive;

- that is, operating the mass spectrometer should not alter the vacuum composition

Desirable features

• Keep electrons confined to source

- avoid electron background signal

• Variable electron energy

- helps separate some species

• Low outgassing

- minimise materials

• Avoid trapped volumes

memory effects

• Closed or open?

- depends on application

• Choice of filament material

- tungsten, thoria, yttria

Electron energy

Reduce electron energy to

40eV: eliminates interferences due to Ar2+

Better detection limit for water in argon

Source

General requirements :

• Physical size

- usually “small enough”

• Sensitive

- typically 10 -4

• Robust

• Linear

A/mbar

- beware of log/log plots

• Reproducible

• Serviceable

- easy to dismantle/reassemble

• Low power; low voltage

• Non-invasive;

- that is, operating the mass spectrometer should not alter the vacuum composition

Desirable features

• Keep electrons confined to source

- avoid electron background signal

• Variable electron energy

- helps separate some species

• Low outgassing

- minimise materials

• Avoid trapped volumes

memory effects

• Closed or open?

- depends on application

• Choice of filament material

- tungsten, thoria, yttria

Filaments

Tungsten

• Simple

• Mechanically robust

• Affected by oxidising/reducing gas

• Runs hot, so outgassing problems

• Rapid burn-out if vacuum leak

• OK with halogens

Thoria-coated iridium

• Coating is delicate

• More stable in oxidizing/reducing gas

• Cooler, so less outgassing

• Resistant to burn-out

• Not good for halogens

• Weak a emitter – possible health issues?

Yttria-coated iridium

• Generally similar to thoria, with no radiation worries.

Detector

Faraday plate/collector

Simple and robust.

Electron background and/or secondary electron emission may be a problem

(easily prevented).

Electron multiplier

Higher sensitivity; needs high voltage supply; more prone to calibration drift; not suitable for coarse vacuum

Discrete dynode multiplier; SCEM; micro-channel plate

QUADRUPOLE

Hyperbolic electrodes to give 2D hyperbolic field. Though in practice round rods are often used.

F

(x,y,z) =

F

0

. (x 2 – y 2 )

2r

0

2

Here

F

0 is 20V

QUADRUPOLE

“Saddle” shaped 3D field plot.

X field is proportional to the X co-ordinate

Y field is proportional to the Y co-ordinate.

QUADRUPOLE

The quadrupole structure can be used as a static device (that is, one in which the applied voltage

F

0 is constant) for steering and shaping an ion beam, with no mass selection. But for a mass filter, the potential

F an alternating component. Specifically

0 consists of a constant and

F

0

= U – V cos (2 p f (t-t

0

) ) where

U is the constant (“DC”) potential

V is the alternating (“RF”) potential f is the frequency of the RF supply t is the time t

0 is the initial phase of the RF component

QUADRUPOLE

Influenced by this field, the ions travel on complex trajectories in the X and Y directions, with a constant drift along the Z axis.

QUADRUPOLE

Mathieu equation

QUADRUPOLE

The significance of the stability region becomes clearer when it is plotted in terms of

V and U for a particular case r

0

= 6 mm f = 2x10 6 Hz

(typical values for a quadrupole ICP-MS)

QUADRUPOLE

Conceptual mass spectra, deduced from the stability diagram.

QUADRUPOLE

These peak shapes have been calculated using numerical integration of the Mathieu equation.

Field radius (r0): 6 mm

Radio frequency: 2 MHz

Field length:

Input radius:

200 mm

1 mm

Exit radius:

Ion energy:

6 mm

5 eV

Beam divergence 5 degrees

Ion masses 1, 2, 3, 4 & 5 amu

QUADRUPOLE

A basic quadrupole model is provided with the Simion package.

The dynamic voltages are programmed using the Lua language.

SIMION QUADRUPOLE

Round rods give a field that is essentially hyperbolic near the axis, but well away from the axis, the field is quite different.

10V

+10V +10V

10V

10V

+10V

10V

+10V

-10V

Potential contours at intervals of 2V

+10V +10V

-10V

-10V

+10V +10V

-10V

Gradient contours, at intervals of 1V/mm

Quadrupole field in X and Y directions

DC constant +20V. No RF applied.

r

0

= 2.76 mm

RF 0V, DC 20V: potential well in X direction

20

-3 -2 -1

0

0

-5

-10

-15

-20

15

10

5

V(x) dV(x)/dx r0

1 2 3

RF 0V, DC 20V: potential hill in Y direction

20

-3 -2

15

10

-1

5

0

0

-5

-10

-15

-20

V(y) dV(y)/dy r0

1 2 3

Ion motion in RF & DC quadrupole field

X component of ion motion.

Vary RF amplitude.

DC + 20V

RF = 0 r

0

= 2.76 mm

F = 2 MHz

M = 40 amu

RF = 0

DC - 20V

RF = 103

DC - 20V

RF = 145

DC - 20V

RF = 78

RF = 60

RF = 79

RF = 70

RF = 104 RF = 105

RF = 146 RF = 147

SIMION QUADRUPOLE

Plot the values of RF and

DC that give stable and unstable X trajectories.

SIMION QUADRUPOLE

Now add stability for Y trajectories (mirror image about DC = 0 axis).

The ion motion is stable for RF and DC values within the region bounded by the four coloured lines.

SIMION QUADRUPOLE

A Simion model, using parameters as listed by Taylor & Gibson. Hyperbolic rods (but note

T&G used round rods).

S Taylor & JR Gibson,J Mass Spectrom 2008; 43: 609–616

S Taylor & JR Gibson,J Mass Spectrom 2008; 43: 609–616

SIMION QUADRUPOLE

4%

2%

0%

39.7

12%

10%

8%

6%

39.8

39.9

amu

Peak

40.0

40.1

Mathieu stability region and scan line

Hyperbolic electrodes. The 50% peak with is 0.117 amu, corresponding to a resolution of

343. The peak is shifted to lower mass by 0.015 amu; presumably a smaller grid size would give a smaller shift.

SIMION QUADRUPOLE

Now we change to round rods …

S Taylor & JR Gibson,J Mass Spectrom 2008; 43: 609–616

SIMION QUADRUPOLE

Mathieu stability region and scan line Peak

SIMION QUADRUPOLE: 3D

2D

3D model with fringing field: transmission is increased and the lowmass tail is reduced

3D

SIMION QUADRUPOLE: 3D

The previous slide showed an unusually narrow peak. Usually a quadrupole is tuned to give a wider peak. This is data from the same Simion model, but with the scan line set to give a peak width 1 amu at 50% height. The peak is much smoother, and there is no lowmass tailing. This would be an excellent performance for an analytical quadrupole, such as an ICP-MS, for which abundance sensitivity of 1 ppm or better is needed. The flat peak top is rarely seen in practice, though examples have been reported.

Flat-topped peaks!

Some very early quadrupole papers showed flat-topped peaks. Is there still room for improvement from 21 st century manufacturers?

W Paul, HP Reinhard & U von Zahn,

Zeitschrift fur Physik,152 (1958), 143-182

Brubaker,

Recent developments in Mass Spectrometry,

Proc. Int. Conf. on Mass Spectrosc., Kyoto,

Japan, 1969, Pub Univ. of Pank, Baltimore, 1970

R = 1.16 R0 (for round comparison)

L = 25.4 cm; r0 = 6.55 mm

Hyperbolic, 1.414 MHz, 1 eV, aperture 1.27 mm

SUMMARY

• Quadrupole: versatile – wide range of design possibilities

• The mechanical design of current RGAs mostly follows longestablished design principles …

• … but there is increasing interest in smaller devices

• Simulation (e.g. with Simion) allows theoretical performance to be investigated in considerable detail.

AREAS NOT COVERED (in this talk).

• Electronics

• Data systems

• Calibration

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