Nanomotion Customer Presentation

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Piezo-Ceramic Servo Motors
Confidential
Page 1
Linear, Rotary or Spherical Motion
Confidential
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Agenda
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Corporate Overview
Theory of Operation
Product Features
Applications
Question / Answer
Confidential
Page 3
Corporate Introduction
Nanomotion
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Established in 1992 for the design, manufacture and marketing of
piezo-ceramic motors and electronics (for linear and rotary
motion)
Subsidiary of Johnson Electric ($2.5B, 38,000 employees, 3
million motors/day)
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Saia Burges (step motors, switches, solenoids)
Nihon Mini Motor (step & dc motors for camera & dvd)
Parlex (flex circuits and contract mfg)
Nanomotion is 65 people with ~35% in the engineering and R&D.
>75,000 motors in field
>10,000 linear axes in the field
>Shipping 700k motors in 2008, for cell phone auto focus
Confidential
Page 4
Nanomotion
Theory of Operation
Traditional Piezo VS
Reversed Piezo VS
Standing Wave
Confidential
Page 5
Piezo Direct and Reverse Effect
Confidential
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Poling a Piezo Element
Confidential
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Basic Structure of Nanomotion’s
Piezoelectric Element
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Nanomotion Motor Basics
Ultrasonic Standing Waves
Bending Mode
Longitudinal Mode
Simultaneous excitation of both modes
Creates motion at the tip of the motor finger
Slide
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PZT Element
Confidential
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Finite Element Simulation
Bending Mode Longitudinal Mode
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Page 10
“Ultrasonic Standing Wave”
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Motor Ellipse
 Amplitude of ellipse varies with voltage
 Slow speed – ellipse at the few nm level
 High speed- ellipse at the tens of microns
 The larger the ellipse, the more the mechanical
stress, the more the heat, the less the duty
cycle
Confidential
Page 12
Nanomotion Motor Basics
Rotary
Table
Linear Stage
PZT
Linear Motion
PZT
Rotary Motion
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Same Motor for Linear or Rotary Motion
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Motor Assembly
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Confidential
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Motor Features
 Standard motors for most operating environments
 Unlimited travel with small operating package (Drive
strips to 4m length)
 Superior move & settle & Slow speed CV
 Vacuum motors for high and UHV
– Up to 10-10 Torr
 Non-Magnetic motors / No EMI from motor
 No servo dither & no hysteresis
 Built in holding / braking without power consumption
 Wide range of dynamic performance
– (Resolution to 1nm, velocity from 1u/sec to
300mm/sec)
 Cost effective direct drive solution
Confidential
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Nanomotion Applications
Confidential
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Edge Motor & ASIC for
Optical Image Stabilization
Confidential
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The “EDGE”
 ‘High volume’ industrial motor.
– Low voltage
– Supported by ASIC based driver
– Low price in volume
 Performance Characteristics
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Max velocity: 150mm/sec
Max force: 30g (.3N)
Highest resolution: 1um
Requires straight slide (to 10um)
Confidential
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Nanomotion Applications
 Bio-Medical/Pharmaceutical
– Instrumentation
– Microscopy
– Hand-held devices and tools (pumps, endoscopes)
 Military/Security
– Aperture/Shutter Control
– Auto Focus
– Pan & Tilt
 Semiconductor
– SEM & ION beam
– Wafer Metrology
– Storage media
 Metrology and Assembly Automation
 Consumer Products (cell phone, digital camera)
Confidential
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Nanomotion Solution
Confidential
Page 22
ION Beam Etching of MEMs
 4 Axis (X/Y/Z/T)
Vacuum Rated
Low Magnetic Field
(VN motors, SS Bearings)
Spring Counterbalance in Z
Resolution of 100nm (available
to 10nm)
Confidential
Page 23
Multi Axis X Ray Inspection System
 2Axis (X/Y)
X-Ray Inspection
(radiation environment)
Demonstrated ability to use
vibration cancellation with
AB2/DC Mode.
Confidential
Page 24
Multi Axis Stage
 3 Axis (X/Z/T)
Laser assisted – Chemical
Micromachining for
Semicon & Biomedical
applications.
Confidential
Page 25
6 Axis Hexapod
 Travel in XYZ +
Pitch/Roll/Theta
 Parallel Kinematics
eliminating stacked
axis errors
 Equal stiffness in all
directions
Confidential
Page 26
Biomedical Application Base
 Cell Imaging (Cytopathology, Gene/DNA analysis)
– Microscopes
– Hand held imaging tools
 Surgical Robots & Manipulators (MRI compatible)
 Microfluidics (drug discovery & development)
– Pumps & Micro Pumps
 Proteomics & Dispensing
 End User Device Manufacturing (Angioplasty
balloons, implant devices)
Confidential
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Virtual Microscopy: Scan on-the-fly
 Digitized entire microscope
slide with line scan operation
 Motion system resolution to
50nm
 X: Index Axis
 Y: Scan Axis
 Z: Auto Focus Axis
 Constant Velocity for scanning
and integrated Z axis for
managing Cell Terrain
Table Top Machine
Confidential
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Cell Imaging: Move & Settle
Rapid scan & locates 22 areas of
interest (field of view) with step and
repeat motion
Slide imaged in 4 min/ 360 slides
per day.
Improve Sensitivity & Specificity
(false positive)
Confidential
Page 29
Multi Layer Tissue Imaging
 Cross sectional imaging for
women’s health
 Lower cost diagnosis than pap
smear and can be made widely
available to under developed
countries.
 Miniature motion system to move
lenses inside the body
Confidential
Page 30
Cell Imaging Benefit
 Ability to achieve high move & settle rate due to
inherent motor braking capability
 Higher resolution, faster moves for increased
throughput and image accuracy.
 Ability to track autofocus, on-the-fly.
 Highest performance in smallest motor/stage
package
 Simple drive assembly (2 piece construction)
 Cost effective technology compared to other devices
Confidential
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Auto Focus Axis
 Resolution from
10nm to 100nm
 DuraMotor option for
continuous step
operation
 Spring counterbalance for optics
 Anti-migration
crossed rollers for
vertical operation
 Available with a
variety of motor sizes
Confidential
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neuroArm
neuroArm robotic system is a 2
robotic arms, each with 6
degrees of freedom for extra &
intra-cranial functions
(ultimately for spinal surgery)
Confidential
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Biomedical Device Applications
MRI Process (with
non-magnetic motors
Robotic arm for micro
surgery of the brain
MRI breast biopsy
Other diagnostic tools
Confidential
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MRI Probes (Brain & Prostate)
Confidential
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MR Tumor Ablation
A
B
C
Prostate Boundary
Target
Boundary
Spatial
Heating
Pattern
Direction
of rotation
Heating
Applicator
Confidential
Page 36
Biomedical / Bioprocessing Automation
 Automation for Drug
Discovery/Development
 Motion modules for precise
dispensing of syringes,
capable of reaching 9mm
pitch
 Laboratory Robots for DNA
Analysis
 Chromatography
Confidential
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Biomedical /Pharmaceutical
 Flow Cytometry
 Cell Analysis
 Medical Robot (end of arm
tooling / grippers)
 Micro-Fluidics
 Dispensing
 Pumps
Confidential
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Miniature Motors for Drug Delivery Pumps
Precise Dosage
from the smallest available
non-magnetic servo motors
Confidential
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Non-Consumer Vision Applications
 Industrial Vision Applications for:
Security identification
Medical imaging
Part inspection
Confidential
Page 40
Gastro- Pill & Endoscope Auto Focus
 Nanomotion’s expertise in
combining miniature motors
with small optics and
electronics lends itself
exceptionally well to medical
devices used on the surface or
internal to the body.
 Miniature motor embedded in
an optics module provides
focus capability for
gastrointestinal camera
 Miniature motor/optics module
for focus of endscopy
Confidential
Page 41
Military/Security Application Base
 Aperture/Shutter Control
 Auto Focus
 Pan & Tilt
Confidential
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Aperture & Shutter Control
 Aperture/Shutter
Control
– Light weight
– Fast response
– Low power
consumption
– Built in
holding/braking
without power
Confidential
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Auto Focus
 Focus & Zoom
capability
– Ability for rapid
moves
– Capability to hold
position with high
shock load
– Small package for
auto focus
Moving lens A
Moving lens B
Linear guide
Fixed lens
Confidential
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Pan & Tilt Assemblies
Platform used for:
 Satellite tracking
 XRay beam focus
 Optics positioning
Confidential
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Competitive Large Volume Application
 Small motors deliver
performance in a restricted
package. It pans a full 360º
(non-continuous) and tilts
90º, giving you more
coverage than multiple fixed
cameras.
 No Noise
 Position Stability
 Long Distance focal
capability
Confidential
Page 46
Semicon Application Base
 Ebeam /Ion Beam wafer processing
 Mask correction machines
 Surface analysis equipment
 Wafer inspection, processing, and packaging
 Hard disk drive certification
 Other storage media
Confidential
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(13) ST Motors on Nanotechnology tool
Confidential
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(24) ST Motors+ Closed loop XYZ assembly
Confidential
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Semiconductor / Electronics
 E-Beam writing &
inspection
 Wafer Metrology
 Thin Film Measurement
 Head Testing
 Storage Media testing/
writing
Confidential
Page 50
Disk Media Testing
 Hard Disk Certification
 2000 Tracks per hour
 Moves 1 to 15 um in
5msec & settle to
100nm.
 Inspection rates
increase to 3000 and
4000 tracks per hour
next year
Confidential
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Scan and Step
Confidential
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7 Axis SEM Motion Platform
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X Axis
Tilt Axis
Y Axis
Rotary Axis (& 3 point leveling)
Uses round bodied motor
Bottom axis moves 65kg
All motors vacuum/nonmagnetic
Confidential
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Aerospace Application Base
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 Space Vehicles
 Spectrometers
 Sensors
Confidential
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Custom Motion Platform
 Vacuum and UHV
motion systems
 Providing high
resolution positioning
and stability
 Complete multi-axis
system with drive and
control
Confidential
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Metrology
3-Axis system for Optical Surface Scanning,
Confidential
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Assembly / Automation
 Long Travel Actuation
(Travel to 4 meters)
 Inspection Device
 Pick & Place
assemblies
Confidential
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Summary
 Ceramic Servo Motors deliver the most force
per motor volume over conventional motor
technology, making it well suited to a diverse
application base of motion requirements.
 Ceramic Servo Motors are robust, with the
ability to work in wide range of challenging
environments.
 Nanomotion’s motors & amps can be used
with any servo control, providing flexibility in
applications.
Confidential
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