Thin Film Growth Applications
-The Art of laying apples► Jarrod
G Collins
► Klein Forest High
School, Houston TX
► Klein ISD
► Faculty Mentor: Dr.
Haiyan Wang,
Assistant Professor
Electrical Engineering
How is thin film fundamental to our
lives?
Energy
► Protection
► Electronics
► Decoration
► Conducting
► Storage
►
What kinds of research?
Types of Engineering
1. Electrical Engineering
2. Materials Science
3. Mechanical Engineering
►
Background on research area
Thin Film Deposition: It is a thin
layer of coating on a substrate or
template.
►Research areas:
1. Microelectronics
2. Solid oxide fuel cells
3. Solar Panels
4. Super conductors
5. Structure Applications
Dr. Haiyan Wang, Assistant
Professor
Dr. Haiyan Wang
Assistant Professor
Electrical and Computer Engineering
Texas A & M University
wangh@ecetamu.edu
Phone: 979-845-5082
Office: 723 Brown
►
1.
2.
3.
4.
5.
Education and appointments:
B.S. and M.S. in Materials Science and Engineering in China
Ph.D. in Materials Science and Engineering, 2002, North Carolina State
University (Raleigh, NC)
Postdoc (03-04) and Staff Member (05) at Los Alamos National
Laboratory
Assistant Professor in Electrical and Computer Engineering (Jan. 2006August 2010)
Staff Member at Los Alamos National Lab (summer 2006)
Real World
Applications of thin
film technology
Microelectronics
(cpu processors, cell
phones, ipod, watches)
Solar Panels, Fuel Cells
AR (anti-reflective
coatings)On cars,
jewelry, mirrors, night
vision goggles
Corrosion/oxidation
resistance on cutting
tools, chemical factories
Research Objective
► Synthesis
of Thin film using (PLD)
► Microstructure characterization using (TEM)
► Property characterization using other tools
such as SEM, XRD, VMS
► Our
objective is to prepare thin film samples
on clean single crystal substrates and utilize
(PLD) to deposit thin film layers and analyze
growth patterns
Overview of Thin Film Deposition
Techniques
PVD (Physical Vapor Deposition)
Thermal Evaporation
Electro-deposition
Magnetron sputtering (DC, RF)
Pulsed Laser Deposition
MBE (molecular beam epitaxy)
Solution based deposition techniques
Sol-gel
PAD (Polymer assisted deposition)
CVD (Chemical Vapor
Deposition)
APCVD (atmospheric CVD)
LPCVD (low-pressure CVD)
PECVD (Plasma-enhanced CVD)
LECVD (Laser-enhanced CVD)
MOCVD (Metal-organic CVD)
The art of laying apples
The research is designed to grow thin films in an ordered pattern with similar
arrangement and symmetry. When following the ordered pattern, a mismatch is
not likely to occur.
What causes thin film to grow?
Kinetic Energy
Pressure
Temperature
Laser Energy
Laser Frequency
Type of material
Type of Substrate
The following Parameters will result in a
desired organized, carefully placed, high
quality layer of thin film
Research Cycle (Data Generation)
Structure &
Property Correlation
Characterization
Synthesis
Overview of Methods
Synthesis
Pulsed Laser Deposition
Laser absorbs energy
Laser evaporates target
and deposits to substrate
Characterization
In-Situ TEM nanoindentation
Make TEM sample
make indentation (inside microscope)
Analyze characteristics
Structure &
Property Correlation
► Vibrating
sample magnetometer
used to measure magnetic properties
► Physical
property measurement system
view film properties & make a decision as to what changes need to be made in
order to get higher quality films
Structure & Property Correlation
► X-ray
Diffraction (XRD)
Method of determining the arrangement of atoms in a crystal
► Scanning
Electron Microscope (SEM)
Powerful type of microscope, which can see objects 10,000 bigger
Summary
The goal of our research is to grow high quality thin films by sustaining
an ordered foundation. The substrate needs to be a high quality single
crystal with the same lattice structure and the same arrangement
pattern at the right time under right conditions.
Classroom ideas
thin film creation
sunscreen concept experiment
painting display experiment
Acknowledgements
National Science Foundation
Nuclear Power Institute (NPI)
Texas Workforce Commission (TWC)
Chevron corporation
Texas A&M University Engineering department
Dr. Wang and Dr. Zhang
Zhenxing Bi Ph.D. Candidate
Joon Hwan Lee Ph.D. Candidate
Logan Lu Ph.D. Candidate
Chenfong Tsai Ph.D. Candidate
The entire E3 faculty
All of the E3 Participants
Any Questions?