Application of Vacuum Technologies for Photovoltaic Systems, Flat Panel Display and Solid-State Lighting International Workshop 2010 All invited speakers (in alphabetic order) Dr. Frank Fenske received the M.S. and Ph.D. degrees in physics in 1974 and 1980, respectively. From 1974 to 1981 he worked on interface problems in MIS structures at the Academy of Sciences. Later he focused research on silicides and multilayer contact systems to silicon. Since 1991 he has been with the Hahn-Meitner-Institut Berlin (now HelmholtzZentrum Berlin), where he is working on a variety of problems related to the physics and technology of silicon based thin film solar cells. Areas of special interest are properties of transparent conducting oxides and absorber films in close relation to their preparation conditions by physical vapour deposition techniques. Prof. Dr. Michael Heuken, born Oberhausen, Germany, 17 Nov. 1961. Dipl.-Ing./Dr.-Ing. degree in Electrical Engineering, Duisburg University, Germany in 1985/1989. Senior engineer, RWTH Aachen (IHT), in the field of metalorganic vapor phase epitaxy for electronic and optoelectronic devices. 1994 finished Habilitation in semiconductor technology and devices with a thesis on ZnSSe based optoelectronic devices. Since 1997 joined AIXTRON AG Aachen, Germany, presently as Vice President Corporate Research and Development. 1999, honored as Professor at RWTH Aachen. Author and co-author of more than 400 publications. President of DGKK from 2002 to 2005, Councilor of IOCG (International Organization of Crystal Growth) representing Germany, board member of EPIC (European Photonics Industry Consortium), board member of OptechNet e.V and member of VDE/ITG. Referee for international journals. Several granted patents in the field of MOVPE technology. Dr. Alexander Lawerenz is head of the photovoltaics department at the CiS Research Institute for Microsensors and Photovoltaics in Erfurt, Germany. He studied physics at the Universities of Konstanz and Hamburg. In 2002 he achieved his PhD degree in Freiberg, Germany with a thesis on the interaction of dislocations and oxygen and their influence on carrier recombination in multicrystalline silicon. One year later he joined the CiS Forschungsinstitut working on the fields of mechanical and electrical properties of silicon wafers and on process engineering of silicon solar cells. Prof Dr. Frank Richter is Professor of Solid State Physics at Chemnitz University of Technology, Germany. After obtaining his PhD in 1974, he worked for 15 years at the Institute for Semiconductor Physics (IHP) in Frankfurt (Oder), Germany, and did research in microelectronic technology, particularly silicon epitaxy and silicides for intereconnects and con- 2 tacts. In 1989, he moved to Chemnitz University. Since then, his scientific interest has been directed towards plasma-assisted thin film deposition and surface engineering. Current activities are focused on in-situ characterization of pulsed plasmas, process modeling, and mechanical characterization of thin films. He has published more than 100 refereed articles in high-level international journals as well as book chapters. Prof. Frank Richter is presently the President of the German Vacuum Society and is an elected member of the Review Board of Condensed Matter Physics of the German Research Foundation. Prof. Dr. Carsten Ronning is full professor and currently director of the Institute of Solid State Physics at the Friedrich-Schiller-University of Jena, Germany. He studied physics at the Universities of Bremen and Konstanz, and completed his PhD thesis entitled “Diamond-like materials prepared via mass selected ion beam deposition” in 1996. After holding a post-doc position at the North-Carolina State University (USA), he performed intense research at the University of Göttingen on thin films, semiconductor physics as well as on semiconductor nanowires. His position today at the University Jena includes the heading of a Photovoltaics group specialised on the preparation of CdTe and CIGS thin film solar cells. Dr. Johannes Struempfel is working as Chief Scientist at VON ARDENNE Company in Dresden. This company which enjoys a long tradition is a leading manufacturer for industrial vacuum coating equipments globally. Particularly focused on large area coatings deposited on glass, metal strips and webs VON ARDENNE applies PVD technologies for production using magnetron sputtering and high-rate electron beam evaporation. After his studies at Dresden Technical University, Dr. Struempfel was graduated as physicist. Since more than 35 years he is working at VON ARDENNE in both Thin Film and Plasma Technologies. He is specialized in advanced developments of optical coatings for large area applications. In a very early stage he realized the control of highly productive reactive sputter processes for deposition of low and high index oxides. His particularly experiences are related to transparent conductive oxides TCO and cleaning of surfaces by plasma impact respectively. As an author of numerous papers and publications Dr. Struempfel is committed to several conference committees or boards within the international and German plasma community. Prof. Dr. Dietrich R. T. Zahn Dietrich R. T. Zahn received a diploma in Physics from the RWTH Aachen in 1986 and a Ph.D. in Physics from the University of Wales Cardiff in 1988. After a post-doc period at the Technical University in Berlin, he became Professor of Semiconductor Physics at the Chemnitz University of Technology in 1993. His research focuses on the spectroscopic characterization of semiconductor interfaces and thin films, with particular emphasis on organic/inorganic hybrid systems, low dimensional systems, e.g., quantum dot superlattices, as well as advanced interconnects in micro-/nanoelectronics. He is author or co-author of more than 400 related publications. Since 2006 he has been chairman of the Thin Film Division of the German Physical Society and Vice President for Research at the Chemnitz University of Technology. 3 Prof. Sun Zhuo, the professor of East China Normal University, and director of Engineering Research Center for Nanophotonics & Advaced Instruments, MOE, China; the co-founder of a few nanotechnology companies (Nanocs, Nanoking, Sunlights). Dr Sun is also the Director of LED chapter, Shanghai Optoelectronics Association; and Deputy Director of Shanghai Solid State Lighting Research Center. He was obtained Ph.D from Lanzhou University in 1995, then worked as a Research Fellow in Shanghai Jiaotong University (1995) and Nanyany Technological University (Singapore) (1996-2003), respectively. Dr. Sun's research interesting includes thin film/nanostructred materials processing and applications, vacuum/plasma systems, LED, FED, solar cells, etc. As a principal investigator, he has been responsible for a few key research projects on nanotechnology related to flat panel display, high efficiency light source, thin film solar cell, vacuum systems supported by Singapore and China. He has published over 200 articles in renowned international journals/conferences, and filed over 40 patents, and awarded as “Shanghai Sci&Tech Youth Creative Talent Award” and “Shanghai IT Youth Top 10”, etc. He is a member of Society of Information Display (SID), the Excutive Chair of “Asia Display 2007”, and has been awarded 2007 SID “Presidential Citation”. He is also the Excutive Chair of IEEE “International Nanoelectronics Conference 2008”. Prof. Dr. Junhao Chu, Member of Chinese Academy of Sciences, Expert of Semiconductor Physics and Devices He is born at YiXin city in JiangSu province in March 1945, graduated from Physics Department in Shanghai Normal University in 1966, and got Master degree and PhD degree from Shanghai Institute of Technical Physics, CAS in 1981 and 1984, respectively, elected as Member of Chinese Academy of Sciences in 2005. He is professor in Shanghai Institute of Technical Physics in CAS, and Director of Research center for Solar cells in CAS, he is also Dean of School of Information Science and Technology in East China Normal University, and Chief Editor of Chinese Journal of Infrared and Millimeter Waves. He had been the director of National Laboratory for Infrared Physics from 1993 to 2003. He has made a systematically investigation on the infrared opto-electronic materials and devices such as narrow gap semiconductors and ferroelectric thin films. He presented widely used expressions for energy band gap, absorption coefficient etc. for HgCdTe, set up a theoretical model to describe the two-dimensional electron subband structures in the MIS structure of narrow gap semiconductors. He found the properties of fundamental optoelectronic transitions, determined opto-electric territorial for HgCdTe materials and devices. He developed researches on the physics of ferroelectric thin film materials and devices, fabricated PZT and BST uncooled infrared detectors to realize thermal imaging. He has published more than 300 papers, and 3 books. He is also an author for Landolt-Boernstein “Numerical Data and Functional Relationships in Science and Technology”. He acquired the second class Awards of Natural Science in China (2005).