Hello all,
I can’t believe that I am writing this
Wafer Flatness test for ASML
This test is done on the Rock/Granite/table of the Ultratech machine
Clean the Right side of the table with IPA and wipes.
Put your wafer on the table/granite if the wafer SLIDE, the wafer is FLAT if not then is
NOT flat. If the wafer is not flat you should wait and check with Binder, Linda, Gary or I.
Please do not take a chance by running wafers that are not FLAT off hours as every one
is working on this issue and trying to come up with a solution.
I have put two wafers on the Granite/ table which are labeled Flat and NOT FLAT for
you to see the difference. Wafers are courtesy of Rshyam (thank you).
Mahnaz