Table of Contents
Table of Contents
1
The Research Laboratory of Electronics
PART I
Section 1
Chapter 1
Solid State Physics, Electronics and Optics
Materials and Fabrication
..
Heterostructures for High-Performance Devices ...................
7
Professor Clifton J. Fonstad, Jr.
*
*
*
*
1.1
1.2
1.3
1.4
1.5
1.6
1.7
1.8
1.9
1.10
1.11
1.12
1.13
1.14
1.15
1.16
1.17
1.18
1.19
Chapter 2
*
*
*
*
2.1
2.2
2.3
2.4
Chapter 3
..........
.......
...
Introduction........ ..............
.
High-Temperature Stability of GaAs Integrated Circuits . .................
High Peak-to-Valley Current Ratio Resonant-Tunneling Diodes on GaAs Substrates . .
Monolithic Integration of Resonant-Tunneling Diodes on GaAs Integrated Circuits . . . .
Phosphide-Based Optical Emitters for Monolithic Integration with GaAs MESFETS . . .
Monolithic Integration of LEDs and VLSI GaAs MESFET Circuits . ............
Development of an Epi-on-Electronics OEIC Technology . .................
Integrated Optics Circuits Based on Commercial GaAs Integrated Circuits ........
Growth of Distributed Bragg Reflector and Multiple Quantum Well Heterostructures
................
at Reduced Temperature ..................
Reactive Ion Etching of InGaAIAs and InGaAsP Heterostructures .............
.
..............
. .
Tunable Semiconductor Lasers . ................
Application of the Spectral Index Method to Laser Diode Design ..............
..................
Normal Incidence Quantum Well Infrared Photodetector
Fourteen-Band k * p Analysis of Intersubband Transitions in Conduction Band
.........................................
Quantum Wells
Study of Intersubband Transitions in Ultra-Narrow Quantum Wells . ...........
In-plane and Tilted Field Magneto-Tunneling Spectroscopy in Double
InGaAs/InAIAs Quantum Well Structures on [001] and [111]B InP Substrates ......
High-Frequency/High-Speed Characterization of Optoelectronic Devices and
.......................................
Integrated Circuits .
.
In-Situ Supersonic Beam Etching of Ill-V Heterostructures .. . . . . .........
.
.....................................
Publications .. ....
7
7
8
9
10
12
13
15
17
18
19
21
22
24
25
25
26
27
27
Physics of InAIAs/InGaAs Heterostructure Field-Effect Transistors ..........
Professor Jesus A. del Alamo
29
. . . .. .
... . . . . .. . . .
Introduction . . . . . . . . .. . . . . . . .
An Integratable S-passivation Process for the InAIAs/InGaAs System ...........
.
..... .
S-passivated InAIAs/InGaAs MODFETs ...................
.
Publications . ..........................................
29
30
30
33
Gas Source Molecular Beam Epitaxy of Compound Semiconductors
35
........
Professor Leslie A. Kolodziejski
* 3.1
* 3.2
3.3
* 3.4
*
......
.....
......
.....
. ...
Introduction .............
Gas Source Molecular Beam Epitaxy of ZnSe, ZnSe:CI and ZnSe:N . ..........
Novel Epitaxial Ill-V Buffer Layers for Wide Bandgap II-VI Visible Sources ........
Heterovalent Interfaces Composed of II-VI/IIIl-V Semiconductors . .............
Sponsored by the Joint Services Electronics Program
.
35
36
40
42
Table of Contents
3.5
3.6
3.7
3.8
Section 2
Chapter 1
S1.1
* 1.2
Chapter 2
*
*
*
*
*
*
*
*
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
Chapter 3
* 3.1
* 3.2
Chapter 4
4.1
4.2
4.3
4.4
4.5
4.6
4.7
4.8
4.9
4.10
Chapter 5
*
*
*
*
*
*
iv
5.1
5.2
5.3
5.4
5.5
5.6
(In,Ga)(As,P)/InP Semiconductor Waveguide Design for Synchronously Side-Coupled
Bragg Resonators .
.......................................
43
Phosphide-Based Optical Emitters for Monolithic Integration with GaAs MESFETs . . . 46
Photonic Bandgap Structures .. ....
. . . . ... .................
..
47
Heteroepitaxy of GaAs onto Corrugated Surfaces of Si . .............
..
...
49
Quantum-Effect Devices
Statistical Mechanics of Quantum Dots
Professor Boris L. Altshuler
Project Description
Publications .
...................
. . . . . . . 53
...................................................
.........................................
Artificial Atoms ...................
Professor Marc A. Kastner
53
. 54
...
...................
55
Goals and Objectives . ........
.....
..
.....
..........
. 55
Quantization of Energy and Charge .......
. . ..........
.......
. . . 56
Spectroscopy of Artificial Atoms: the Three Energy Scales . ...............
57
Criterion for Single-Electron Effects .........
. ...... .............
59
Crossover from Single to Multilevel Transport . . . . . . . ...........
...
61
Ground State of the Artificial Atom in Strong Magnetic Fields . .
....
.. ...
.
62
Development of Process for Si Single Electron Transistors . ..
...
... . ... .
65
Publications .........
. . . . . ..................
................
66
Coulomb Blockade in a Quantum Dot
Professor Patrick A. Lee
Project Description ...................
Publications . ..................
...................
.......
....
..................
.......
Superconducting and Quantum-Effect Devices . . . . . . .........
Professor Terry P. Orlando
. . . .67
. . . . .
.
. 67
68
. . . . . . . 69
Simulations of Vortices in Arrays of Josephson Junctions . ..........
. . . .
Superconducting Transmission Lines ....................
...
.. . .
Discrete Superconducting Vortex Flow Transistors ..........
..
.
.. . .
Fiske Modes in One-Dimensional Parallel Josephson-junction Arrays . . . . . . . . . . .
Novel Mesoscopic Superconducting Devices .............. . . . . .
......
. . .
Single Charging Effects and Tunneling in Quantum Dot Nanostructures ........
.
One-dimensional Parallel Josephson-junction Arrays as a Tool for Diagnostics .....
Nonlinear Dynamics of Discrete Josephson Rings . ..
....
...
.. . . .
Discrete Underdamped Vortex Flow Devices .........................
. .
Publications . ..................
........
. .....
.........
.
69
70
70
71
71
72
72
72
73
73
Nanostructures Technology, Research, and Applications . . . . . .....
Professor Henry I. Smith
. . . . . . . 75
NanoStructures Laboratory . ..... .
..........................
Scanning Electron Beam Lithography ...........
.
.................
Spatial-Phase-Locked Electron-Beam Lithography ...................
X-Ray Nanolithography . ..................
....
.......
Improved Mask Technology for X-Ray Lithography ...................
A High-Precision Mask Alignment System ...................
75
75
...
76
. . .
. 77
.. 78
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. . 81
RLE Progress Report Number 137
Table of Contents
* 5.7
* 5.8
* 5.9
5.10
* 5.11
* 5.12
* 5.13
* 5.14
5.15
* 5.16
* 5.17
* 5.18
Chapter 6
83
...
..........
Interferometric Lithography ...................
85
.
...................
Ion-Beam Lithography ................
High-Performance Self-aligned Sub-100 nm MOSFETs Using X-ray Lithography . . . . 85
89
Fabrication of T-gate Devices using X-ray Lithography . ..................
Studies of Coulomb Charging Effects and Tunneling in Semiconductor
90
....
...................
Nanostructures ...................
92
Superconductor/Semiconductor Interface of V3Si and Si . .................
Laterally-Coupled Distributed-Feedback Lasers Fabricated by X-Ray Lithography . . . . 93
Combined Spatial-Phase-Locked Electron-Beam, X-ray, and Optical Lithography for
95
.....
Channel-Dropping Filters ...............................
High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray
99
.....
...................
Spectroscopy ...................
Submicrometer-Period Transmission Gratings for X-ray and Atom-Beam Spectroscopy
. . . 100
.....................
. .....
and Interferometry .............
100
.....
GaAs Epitaxy on Sawtooth-Patterned Silicon ...................
101
....
...................
Publications ...................
Single-Electron Spectroscopy ...................
............
103
Professor Raymond Ashoori
*
*
*
*
*
*
6.1
6.2
6.3
6.4
6.5
6.6
Section 3
Chapter 1
..................
.
Goals and Objectives ................
Traps Created by Disorder and Impurities in Semiconductor Structures .........
.. ...
.................
Artificial Atoms ...................
..........
Spatially Resolved Charge Sensing ...................
.....
Single-Electron Transistors for Spectroscopy ...................
....
...................
Publications ...................
103
104
104
105
105
105
Optics and Devices
Optics and Quantum Electronics ...................
..........
109
Professor Hermann A. Haus, Professor Erich P. Ippen, Professor James G. Fujimoto,
Professor Peter L. Hagelstein, Dr. Brett E. Bouma, Dr. Joseph A. Izatt
* 1.1
1.2
1.3
1.4
1.5
* 1.6
* 1.7
* 1.8
* 1.9
* 1.10
* 1.11
* 1.12
* 1.13
1.14
1.15
1.16
1.17
1.18
1.19
.
...................
Fiber Ring Lasers ...................
................
...
....
Fiber Storage Ring ......
.........
Long-Distance Fiber Communications ...................
.........................
.........................
Squeezing
...........
Optical Channel Dropping Filters ...................
........
Overdriven Additive Pulse Modelocking ...................
A Broadband-Tunable Femtosecond Source for 1.55 pm Diagnostics ..........
..
Ultrafast Nonlinearities in Active Semiconductors ...................
Nonlinear Interactions of Continuous and Pulsed Light in Optical Fibers ........
Intensity Autocorrelation of Light Sources for Fiber Optical Gyroscopes .........
Wavelength Shifting by Four-Wave Mixing in Passive Semiconductor Waveguides . .
.. .
Ultrashort Pulse Generation in Solid State Lasers ..................
....
Ultrafast Phenomena in Materials and Devices ...................
........
....
...............
Laser Medicine ................
.....
Optical Coherence Tomography Technology ...................
...................
EUV Laser Studies ................
Collisional and Recombination Schemes at Longer Wavelength . ............
.......
Toward a Novel End-Pumped EUV Laser ...................
Photon Operators and Photon Configuration-Space Equations . .............
109
111
111
112
113
114
115
116
117
119
119
120
122
125
125
130
134
136
137
Table of Contents
1.20
1.21
Chapter 2
2.1
2.2
2.3
2.4
Chapter 3
Neutron Hopping .........
........
.....................
Possible Phonon Laser Driven by Exothermic Desorption . ................
Optical Propagation and Communication ...................
Professor Jeffrey H. Shapiro, Dr. Robert H. Rediker, Dr. Ngai C. Wong
Introduction ..............
.........................
Nonlinear and Quantum Optics ...................
Multiresolution Laser Radar Range Profiling ...................
Optical Frequency Division and Synthesis ...................
139
140
.....
143
143
143
145
146
...........
.....
......
High-Frequency (>100 GHz) and High-Speed (<1 ps) Electronic Devices ......
149
Professor Qing Hu
3.1
3.2
3.3
3.4
3.5
Section 4
Chapter 1
.........
.
Introduction ......................
..
.............
Micromachined Millimeter-wave Devices ...................
.......
Far-infrared and Picosecond Time-resolved Transport Studies of Quantum-effect
Devices ...................
..........................
Intersubband Transitions in Coupled Double Quantum-well (DQW) Structures .....
Publications .
. .......
..........
...................
....
. .
149
150
152
158
163
Surfaces and Interfaces
Synchrotron X-Ray Studies of Surface Disordering . .................
167
Professor Robert J. Birgeneau
* 1.1
* 1.2
* 1.3
Chapter 2
................
Introduction ............
...
.......
Stability of Vicinal Si(111) Surfaces Under Metal Surface Studies . ...........
Publications ...................
...................
Semiconductor Surface Studies ...................
...
.
167
167
169
171
...........
Professor John D. Joannopoulos
*
*
*
*
2.1
2.2
2.3
2.4
Chapter 3
* 3.1
* 3.2
* 3.3
* 3.4
PART II
Section 1
Chapter 1
Step Structures and Epitaxy on Semiconductor Surfaces
Professor Simon G.J. Mochrie
...
...
....
171
171
174
176
177
. .............
...................
Introduction ...................
Phase Behavior of Stepped Si(113) Surfaces . ..................
Faceting Kinetics of Stepped Si(113) Surfaces: Self-Assembled Nano-Scale
.
.......................
Gratings ...................
...................
Publications ...................
.....
....
177
178
....
180
181
Applied Physics
Atomic, Molecular and Optical Physics
Quantum Optics and Photonics ...................
Professor Shaoul Ezekiel
vi
.....
...................
Introduction ...................
...................
Chemisorption ...................
Cross-sectional Scanning Tunneling Microscopy ...................
...................
Publications ...................
RLE Progress Report Number 137
...........
187
Table of Contents
1.1
1.2
1.3
1.4
1.5
1.6
1.7
Chapter 2
Distributed Fiberoptic Sensor for Quench Detection in Superconducting Tokamak
. . . . ..
M a g nets . . . . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . ..
Measurement of Liquid Helium Flow in Superconducting Tokamak Magnets ......
Efficient, Low-Intensity Optical Phase Conjugation using Coherent Population Trapping
in Sodium .................
...........................
Highly Selective Nonspatial-Filters Using Porous Matrix Based Thick Holograms . . .
Cache Memory using Optically Induced Spin Echo . . . . . . . . . . . . . . . . . . . .
Doppler Cooling in Traveling Wave Velocity Selective Coherent Population Trapping .
.
Near-perfect Squeezing in a Folded Three-Level System . . . . . . . . . . . .....
187
188
190
192
194
196
198
201
Basic Atomic Physics ....................................
Professor Daniel Kleppner, Professor David E. Pritchard
*
*
*
*
*
2.1
2.2
2.3
2.4
2.5
Section 2
Chapter 1
1.1
1.2
1.3
Section 3
Chapter 1
Studies in Quantum Chaos: High Resolution Periodic Orbit Spectroscopy .......
. . . . . ...
. . . . . . .
Determination of the Rydberg Frequency ........
...........................
Precision Mass Spectrometry of Ions .
.....................................
Atom Interferometry .
...........................
Cooling and Trapping Neutral Atoms .
201
205
208
211
215
Plasma Physics
223
Plasma Dynamics ......................................
Professor George Bekefi, Professor Abraham Bers, Professor Bruno Coppi,
Professor Jonathan S. Wurtele, Dr. Stefano Migliuolo, Dr. Abhay K. Ram,
Dr. Linda E. Sugiyama
Relativistic Electron Beams .......................
Plasma Wave Interactions - RF Heating and Current Generation
- -- - Physics of Thermonuclear Plasmas ..................
- -
223
229
237
Electromagnetics
245
Electromagnetic Wave Theory and Applications .........
Professor Jin Au Kong, Dr. Kung Hao Ding, Dr. Robert T. Shin, Dr. Y. Eric Yang
1.1
S1.2
1.3
1.4
Section 4
Chapter 1
245
246
247
247
Remote Sensing of Earth Terrain ...................
Electromagnetic Waves in Multilayer Media . . . . . .
Simulation of Electromagnetic Wave Scattering . ..........
Publications . . . . . . .
Radio Astronomy
Radio Astronomy ..................
.......
251
Professor Bernard F. Burke, Professor David H. Staelin, Professor Jacqueline N.
Hewitt, Dr. Philip W. Rosenkranz
Extragalactic Radio Source Studies .
..........................
Studies of Gravitational Lenses .
............................
The Detection of Astronomical Radio Transients ....................
Algorithms for Advanced Microwave Sounding Unit Operational Use .. ......
Earth Observing System: Advanced Microwave Sounding Unit . ..........
High-Resolution Passive Microwave Imaging of Atmospheric Structure .......
Reduction of Variation ................
.
.................
251
252
254
255
255
256
256
Table of Contents
PART III
Section 1
Chapter 1
Systems and Signals
Computer-Aided Design
Custom Integrated Circuits ...................
..............
263
Professor Jonathan Alien, Professor John L. Wyatt, Jr., Professor Jacob White,
Professor Srinivas Devadas
1.1
1.2
1.3
1.4
1.5
1.6
1.7
1.8
1.9
1.10
Chapter 2
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10
2.11
2.12
2.13
2.14
2.15
Section 2
Chapter 1
.. .. ........
.
...
Custom Integrated Circuits ...............
Analog VLSI Systems for Integrated Image Acquisition and Early Vision Processing
.......
Parallel Algorithms for Device Simulation ...................
Numerical Simulation of Short Channel MOS Devices . . . . . . . . . . . . . . .....
Coupled Simulation Algorithms for Microelectromechanical CAD (MEMCAD) ......
Numerical Techniques for Simulating Josephson Junction Arrays ............
Efficient 3-D Interconnect Analysis ...................
...........
Adaptive Gridding Techniques for Multipole-Accelerated Solution of Integral
Equations .....................
................
Circuit Simulation Algorithms ...................
..............
Techniques for High-Performance Low-Power Embedded System Design .......
263
266
273
274
274
275
276
Computer-Integrated Fabrication System Structure ..................
Professor Donald E. Troxel
285
Introduction ...................
..................
.....
CAFE Applications ......................................
Organization of Data and Algorithms for Factory Design and Control ..........
Statistical Process Control Charts for the Computer-Aided Fabrication Environment .
Run-by-Run Control: Interfaces, Implementations, and Integration ............
......
Hardware Setup for a Remote Microscope ..................
.......
First-Order Model for Remote Fabrication ...................
Estimating the Lead Time Distribution of Priority Lots in a Semiconductor Factory ...
................
Factory Display Software ...................
...
Message Passing Tools for Software Integration ...................
CAFE at MIT Lincoln Laboratory ...................
............
..............
Error Handling Within CAFE ...................
Semiconductor Manufacturing Process Flow Representation ...............
.........
Computer-Aided Technology Design ...................
....
...................
Publications ...................
285
285
286
286
286
288
288
289
289
289
290
291
291
293
295
278
278
280
Digital Signal Processing
Digital Signal Processing Research Program ...................
...
299
Professor Alan V. Oppenheim, Professor Arthur B. Baggeroer,
Professor Gregory W. Wornell
1.1
1.2
1.3
1.4
1.5
1.6
1.7
1.8
1.9
1.10
1.11
1.12
1.13
1.14
viii
Introduction .............................
....
.......
Single Mode Excitation in the Shallow Water Acoustic Channel .............
Self-Synchronization of Chaotic Systems: Analysis, Synthesis, and Applications . . . .
Algebraic and Probabilistic Structure in Fault-Tolerant Computation ...........
Signal Processing Applications of Chaotic Dynamical Systems ..............
Wavelet-Based Representation and Algorithms for Generalized Fractal Signals . . . .
Approximate Signal Processing ...................
............
CDMA for Digital Storage .................
................
Estimation and Detection of a Class of Chaotic Signals ..................
Real Time Active Noise Cancellation ...................
.........
State and Parameter Estimation with Chaotic Systems . .................
............
Model Based Analysis of Music ...................
........
Nonlinear Models for Signal Processing ...................
Environmental Robustness in Automatic Speech Recognition . .............
RLE Progress Report Number 137
299
300
300
301
301
302
302
303
303
303
304
305
305
305
Table of Contents
1.15
1.16
Chapter 2
Active Noise Cancellation ...........................
Oceanographic Signal Processing ......................
306
306
Advanced Telecommunications and Signal Processing Program
309
Professor Jae S. Lim
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10
2.11
2.12
2.13
Chapter 3
Introduction ...................................
ATRP Facilities ...............
Signal Representations for Very-low-bit-rate Video Compression . . . .
.....
Constant Quality Video Coding ...................
Signal Representations in Audio Compression . .............
Pre-Echo etection and Reduction ......................
Video Source Coding for High-Definition Television ............
Transmission of HDTV Signals in a Terrestrial Broadcast Environment .
Position-Dependent Encoding ........................
MPEG Compression ..............................
HDTV Transmission Format Conversion and the HDTV Migration Path
Removing Degradations in Image Sequences ...............
..........
Speech Enhancement ...................
309
309
310
310
311
312
312
313
313
313
314
314
314
Combined Source and Channel Coding for High-Definition Television . .
317
Professor William F. Schreiber
3.1
3.2
3.3
3.4
3.5
PART IV
Section 1
Chapter 1
317
318
318
318
319
Project Description . . . . . . .
Technology .............................
Current Status ...........................
Future Plans ............................
Publications ............................
Bioelectronics
Genetic Analysis
Genosenor Technology Development
. . . . . . . . . . . . . . . . . . . . . . . . . .
325
Dr. Mark Hollis, Dr. Daniel J. Ehrlich, Dr. Dennis D. Rathman
1.1
1.2
1.3
PART V
Section 1
Chapter 1
. .. ..
Introduction . . . . . . . . . . . . . . . . . . . . . . . . ....
. . . . ...
Development of Genosensor Arrays for DNA Decoding . . . . . . .
Microdetection Technology for Automated DNA Sequencing . . . . . . . . . . . .
325
325
328
Language, Speech and Hearing
Speech Communication
333
Speech Communication ...................................
Professor Kenneth N. Stevens, Dr. Joseph S. Perkell, Dr. Stefanie Shattuck-Hufnagel
1.1
1.2
1.3
1.4
1.5
1.6
1.7
Section 2
Chapter 1
Studies of Normal Speech Production ............................
. . . . . . .
Speech Research Relating to Special Populations ....
Speech Production Planning and Prosody .........................
Studies of the Acoustics, Perception, and Modeling of Speech Sounds
Models for Lexical Representation and Lexical Access . . . . . . .
Development of Computer and Data Processing Facilities . . . . . . .
. . . . .
Publications .
. . . . ...
. . . . . . . . .
. . . . ...
. . . . . . . ..
. . . . .
334
336
340
342
344
344
345
Sensory Communication
Sensory Communication ..................................
349
Table of Contents
Professor Louis D. Braida, Nathaniel I. Durlach, Dr. William M. Rabinowitz,
Dr. Charlotte M. Reed, Dr. Mandayam A. Srinivasan, Dr. Thomas E.v. Wiegand,
Dr. David Zeltzer, Dr. Patrick M. Zurek
1.1
1.2
1.3
1.4
1.5
Section 3
Chapter 1
Research on Hearing, Hearing Aids, and Tactile Communication of Speech ......
Haptics Research .. . . . . . ..................
.....
......
. ..
Virtual Environment Technology for Training ...................
.....
Research on Improved Sonar Displays: A Human/Machine Processing System . . . .
Development of Inertial Head-Tracking Technology ...................
.
349
360
372
376
378
Auditory Physiology
Signal Transmission in the Auditory System . ..................
383
...
Professor Lawrence S. Frishkopf, Professor Nelson Y.S. Kiang, Professor William T.
Peake, Professor William M. Siebert, Professor Thomas F. Weiss, Dr. Bertrand Delgutte,
Dr. Donald K. Eddington, Dr. Dennis M. Freeman, Dr. John J. Guinan, Jr.,
Dr. John J. Rosowski
1.1
1.2
1.3
1.4
1.5
1.6
1.7
Section 4
Chapter 1
Introduction ..................
.........
............
Signal Transmission through the External and Middle Ear . ...............
Cochlear Mechanisms ................
..................
Stimulus Coding in the Auditory Nerve and Cochlear Nucleus . .............
Interactions of Middle-Ear Muscles and Olivocochlear Efferents . ............
Cochlear Efferent System ...................
..............
...................
Cochlear Implants ...................
..
.
383
383
385
387
390
390
392
Linguistics
Linguistics ...........................................
397
Professor Noam Chomsky, Professor Morris Halle
1.1
1.2
Introduction
.....................
Abstracts of Doctoral Dissertations
.........................
...................
397
397
..........
APPENDICES
Appendix A
A.1
A.2
A.3
A.4
A.5
RLE Publications and Papers Presented ...................
Meeting Papers ....................................
Journal Articles ...................
...................
..............
Books/Chapters in Books ...................
RLE Publications . ..................
.........
......
RLE Theses ...................
...................
Appendix B
Current RLE Personnel
Appendix C
Milestones ...........................................
C.1
C.2
C.3
C.4
Appendix D
New Faculty and Staff ...................
Promotions ......................
Appointments ...................
Awards and Honors ...................
RLE Research Support Index
RLE Progress Report Number 137
. .
..
..
. ..
....
...................................
401
401
412
421
422
423
427
433
................
.
................
...................
.................
...............................
Project Staff and Subject Index .............................
x
......
..
..
.. ..
.. .
..
433
433
433
433
435
439