Optics in
micromanufacturing
Prof. Yong-Gu Lee
Email: lygu@gist.ac.kr
Phone: 062-715-2396
Course web site:
https://210.107.176.1/wiki/pages/V0b5M5F/optics_in_micromanufacturing.html
Password for protected zip files: xxxx
1
Motivation
• Silicon manufacturing was a great success
leading to integrated circuits, sensors (ex:
gyroscopes, accelerometers), actuators (ex:
DMD)
• Normally, manufacturing is done in batch
processes without visual monitoring
• Optics allows real time monitoring of objects
comparable to the wavelength of light
(400nm~800nm)
• Sophisticated sensing, manipulation and
manufacturing can be realized using optics
2
Micromanufacturing,
micromanipulation and sensing
Sun et al, Elastic force analysis of functional polymer submicron oscillators, 3
Appl. Phys. Lett. 79, 3173 (2001); http://dx.doi.org/10.1063/1.1418024
Course Outline
• Optics is an important subject in manufacturing
micrometer scale devices and sensors. The goal of
this course is to learn practices and the theory of
optics used in micromanufacturing. Firstly,
microscopy is covered as it is the basic tool used
in examining micromanufacturing processes.
Secondly, actuated stages and cameras used in
advanced microscopes are covered. Thirdly,
techniques for introducing lasers into microscopes
and steering the laser and measuring the scattering
of laser from particles are covered. Lastly,
applications that utilize the instruments and theory
covered in the courses are covered that include
optical tweezers and microsterolithography.
4
Course focus
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Light microscopy (2 weeks)
– basic light microscopy
– phase contrast and darkfield microscopy
– properties of polarized light and polarization microscopy
– DIC, fluroscence, confocal microscopy
Microscope stages (2 weeks)
– Motorized stages
– Piezo stages
– Linear displacement sensors
– SW control
Microscope image acquisition (2 weeks)
– CCD, CMOS cameras
– SW control
Laser steering in microscope (2 weeks)
– Laser safety
– Tilt mirrors
– Spatial light modulators
– SW control
Laser scattering in microscope (2 weeks)
– Theory
– Quadrant Photo Diodes
– SW control
Force measurements (2 weeks)
– Particle tracking
– Optical Tweezers and Trap stiffness
Microstereolithorgraphy
Final examination (1 week)
Term project presentations (1 week)
5
Syllabus
Weekly Course Schedule
Calendar
Remarks
Description
1st week Introduction
2nd week Light microscopy
3rd week Motorized stages
4th week Piezo stages
Assignment #1
th
5 week Linear displacement sensors
6th week CCD cameras/CMOS cameras
7th week Mid term examination
8th week Laser steering with tilt mirrors
9th week Laser steering with spatial light modulators
Assignment #2
10th week Laser scattering
11th week Laser scattering measurements
12th week Optical Tweezers and Trap stiffness
13th week Force measurements
14th week Microstereolithography
15th week Final exam
16th week Term project presentation
Term project proposal due
Term project progress report
6
Understandings
• Grades
Assignments
10
Term project
30
Mid exam
20
Final exam
30
Class attendance
10
_____________________
100
• A,B,C,F
A
B
C,F
~40%
~40%
~20%
*Subject to change
If you fail to attend more than 1/3 of the classes, you disqualify
for taking any examinations further scheduled.
Regulations on Courses, ART 25 (3) 7
Understandings
• Attendance
–No excuses for absence
•Business trip
•Sick
–Attendance credit
• Assignments
–Penalties for late
submissions
–No credit for copied
submissions,
(original and copies)
•Not to be later than 15
minutes
•No early leave
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