ELECTRONICS DEVICE Instructor Source : Prof. Dr. Ir. Djoko Hartanto, M.Sc. : Arief Udhiarto, M.T : U.C. Berkeley Schedule Lectures: K.301 Mon. 15:00-15.50 AM K.301 Wed. 13.00-14.50 AM Electrical Engineering Department University of Indonesia 2 Relation to Other Courses Prerequisite: Simple pn-junction, BJT and MOSFET theory; BJT and MOSFET circuit applications. Familiarity with the Bohr atomic model Relation to other courses: Electronics Circuit Electrical Engineering Department University of Indonesia 3 Reading Material Primary Text : Semiconductor Device Fundamentals : R. F. Pierret (Addison Wesley, 1996) References Text: Solid State Electronic Devices 4th Edition: B. G. Stretman, S. Banerjee (Prentice Hall, 2000) Device Electronics for Integrated Circuits 3rd Edition: R. Muller, T. Kamins (Wiley & Sons, 2003) Electrical Engineering Department University of Indonesia 4 SAP 1. Course : Electronics Device 2. Course Code 3. Instructor : EES 210804 SKS: 4 Semester: 3 : Prof. Dr. Ir. Djoko Hartanto M.Sc. (DH) Arief Udhiarto, M.T (AU) 4. Class System : Single 5. Course’s Objective : mastering in basic concept of integratedcircuit operation devices specially in siliconintegrated circuits 6. Grading System (%) : Homework (10) , MT (35) , Seminar (15) , FT (40) Electrical Engineering Department University of Indonesia 5 Miscellany Academic (dis)honesty Departmental policy will be strictly followed Collaboration (not cheating!) is encouraged Classroom etiquette: Arrive in class on time! Turn off cell phones, pagers, MP3/MP4 players, etc. No distracting conversations Ask question as much as possible Electrical Engineering Department University of Indonesia 6 Pre Test 1. 2. 3. What do you know about atom, electron, and hole? What are the differences between conductor and semiconductor? What is majority carrier related to semiconductor! 10 Minutes only Electrical Engineering Department University of Indonesia 7 Course Outline Semiconductor Fundamentals; Metal-Semiconductor Contact PN-Junction Diode Bipolar Junction Transistor IC Processing (other subject) MOSFET Electrical Engineering Department University of Indonesia 8 Overview of IC Devices and Semiconductor Fundamentals Reading Assignment : Pierret Chap 1, Chap 2 Electrical Engineering Department University of Indonesia 9 An IC consists of interconnected electronic components in a single piece ( chip ) of semiconductor material In 1958, Jack S. Kilby (Texas Instruments) showed that it was possible to fabricate a simple IC in germanium. Electrical Engineering Department University of Indonesia In 1959, Robert Noyce (Fairchild Semiconductor) demonstrated an IC made in silicon using SiO2 as the insulator and Al for the metallic interconnects. 10 Evolution of Bipolar Junction Transistors Point Contact BJT 1947 SiGe BJT 2000 Electrical Engineering Department University of Indonesia Si Nanowire BJT 2003 11 From a Few, to Billions By connecting a large number of components, each performing simple operations, an IC that performs very complex tasks can be built. The degree of integration has increased at an exponential pace over the past ~40 years. The number of devices on a chip doubles every ~18 months, for the same price. Electrical Engineering Department University of Indonesia 12 Electrical Engineering Department University of Indonesia 13 IC Technology Advancement Improvements in IC performance and cost have been enabled by the steady miniaturization of the transistor Electrical Engineering Department University of Indonesia 14 Advantages of Technology Scaling • More dies per wafer, lower cost • Higher-speed devices and circuits Electrical Engineering Department University of Indonesia 15 Today and Tomorrow Electrical Engineering Department University of Indonesia 16 The Nanometer Size Scale Electrical Engineering Department University of Indonesia 17 State-of-the-art Transistor Size 1µm = 10-6m = 10-4 cm = 1000 nm 1 nm =10 Å Electrical Engineering Department University of Indonesia 18 CZ Crystal Growth Electrical Engineering Department University of Indonesia 19 Si Bulk Wafer Specifications Bulk Wafer Specifications Electrical Engineering Department University of Indonesia 20 Purity of Device Grade Si 99.999999999 % (so-called “eleven nines” ) Maximum impurity allowed is equivalent to 1 mg of sugar dissolved in an Olympic-size swimming pool. Electrical Engineering Department University of Indonesia 21 Flatness deviation and particle sizes Dimensions are equivalent to 1/1000 of a baseball placed inside a sports dome. Electrical Engineering Department University of Indonesia 22 Crystallographic Planes Electrical Engineering Department University of Indonesia 23 Miller Indices Crystallographic Notation h: inverse x-intercept k: inverse y-intercept l: inverse z-intercept (Intercept values are in multiples of the lattice constant; h, k and l are reduced to 3 integers having the same ratio.) Electrical Engineering Department University of Indonesia 24 Crystallographic Planes and Si Wafers Silicon wafers are usually cut along the (100) plane with a flat or notch to orient the wafer during IC fabrication Electrical Engineering Department University of Indonesia 25 Bulk Si Wafer to IC Chip Electrical Engineering Department University of Indonesia 26 Bohr Model Electrical Engineering Department University of Indonesia 27 Electrical Engineering Department University of Indonesia 28 Silicon Atom 1s, 2s, 2p orbitals filled by 10 electrons 3s, 3p orbitals filled by 4 electrons The Si Atom 4 nearest neighbors unit cell length = 5.43Å 5 × 1022 atoms/cm3 The Si Crystal “diamond cubic ” structure Electrical Engineering Department University of Indonesia 29 Conduction Band and Valence Band Electron Potential Energy Electrical Engineering Department University of Indonesia 30 The Simplified Energy Band Diagram Electrical Engineering Department University of Indonesia 31 Semiconductors, Insulators, and Conductors • Totally filled band and totally empty bands do not allow current flow. (just as there is no motion of liquid in a totally filled or totally empty bottle • Metal conduction band is half-filled • Semiconductors have lower Eg’s than insulators and can be doped Electrical Engineering Department University of Indonesia 32 Compound Semiconductors •“Zincblende Structure” •III-V compound semiconductors : GaAs, GaP, GaN, etc. “important for optoelectronics and high speed ICs” Electrical Engineering Department University of Indonesia 33 Density of States Electrical Engineering Department University of Indonesia 34 Density of States at Conduction Band: The Greek Theater Analogy Electrical Engineering Department University of Indonesia 35 Concept of a “hole” An unoccupied electronic state in the valence band is called a “hole” Treat as positively charge mobile particle in the semiconductors Electrical Engineering Department University of Indonesia 36 Bond Model of Electrons and Holes Electrical Engineering Department University of Indonesia 37 Electrons and Holes Electrical Engineering Department University of Indonesia 38