Background Statement for SEMI Draft Document 4100
REVISION TO SEMI E85, SPECIFICATION FOR PHYSICAL AMHS
STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY
Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in
reaching an informed decision based on the rationale of the activity that preceded the creation of this document.
Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented
technology or copyrighted items of which they are aware and to provide supporting documentation. In this context,
“patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter
case, only publicly available information on the contents of the patent application is to be provided.
Note: Additions are indicated by underline and deletions are indicated by strikethrough.
Background:
There are technical and editorial errors in E85.
- Wrong datum plane is referenced for some dimension in Tables 1 and 2
- “Related Information 2” is referenced but it does not exist
Description of Changes


Correct referenced datum planes for A1, A6 and A8
of table 1 and 2.
Delete text related to “Related Information 2” from
table 1-2 and figure 3-4.
Related Sections Modified by Ballot
Revise table 1 and 2
Revise figure 3 and 4
The results of this ballot will be discussed at the next PIC committee meeting on March 1, 2005 in
conjunction with the NA Spring Standards Meetings in Austin, Texas.
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
DRAFT
SEMI Draft Document 4100
REVISION TO SEMI E85, SPECIFICATION FOR PHYSICAL AMHS
STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY
1 Modify E62 as follows:
 Correct referenced datum planes for A1, A6 and A8 of table 1 and 2.
 Delete text related to “Related Information 2” from table 1-2 and figure 3-4.
1.1 Revise Table 1 as indicated below with strikethrough and underline.
Table 1 Dimensional Requirements for 300 mm AMHS Interbay Load Ports (FOUP ONLY)
Dim
Definition
Option A
Option B
Option C
 (deg) tilt of the open cassette when placed
0
SEMI E15.1
0
to the load port
A1
minimum width of the load port
375 mm
N/A
600 mm for
cavity or cut-out in the stocker
HT only
measured from the facial bilateral
(See NOTE
datum plane to the nearest
1.)
obstruction on the stocker
A2
width of the exclusion zone for
213 +2/-0
N/A
213 +2/-0
center pickup using the secondary
mm
mm
kinematic coupling pins (symmetric
about the bilateral datum plane)
A3
Minimum width if the exclusion
N/A
N/A
225 mm
zone (starting at a distance D10
from the FDP) for center pickup
using the secondary kinematic
coupling pins (symmetric about the
bilateral datum plane)
A6
maximum protrusion of the interbay
N/A
SEMI E15.1
N/A
transport measured from the facial
bilateral datum plan plane of the
transport (start of the exclusion
volume for fork-lift or conveyor rail
transfer)
A8
minimum width of the exclusion
N/A
N/A
N/A
volume for the fork-lift or conveyor
rail transfer mechanism measured
from the facial bilateral datum
plane (end of the exclusion volume
for fork-lift or conveyor rail
transfer)
C3
height of the nearest stocker
150 mm SEMI E15.1
N/A
obstacle above the carrier during
transfer measured from the HDP of
the transportthe maximum height
of the carrier. This creates an
exclusion zone for use of the top
robotic flange.
Option D
0
Option E
0
Option F
N/A
N/A
N/A
N/A
213 +2/-0
mm
213 + 2/-0
225 mm
N/A
N/A
N/A
165 mm
N/A
N/A
245 mm
(80 wide)
N/A
N/A
N/A
N/A
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an offi cial or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 1
Doc. 4100  SEMI
LETTER (YELLOW) BALLOT
Document Number: 4100
Date: 3/6/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
D
D1
D5
Definition
distance from the facial datum
plane of the transport to the internal
stocker boundary
distance from the stocker boundary
to the facial datum plane on the
stocker load port (A,B)
maximum distance or protrusion of
any load port feature measured
from the facial datum plane on the
load port (inside the stocker cutout)
distance from the facial datum
plane of the interbay transport
system to the stocker boundary
Option A
Option B
N/A
SEMI E15.1
240 mm
150 mm
N/A
D6 (See minimum distance or length of the
N/A
NOTE center exclusion volume of the
2.)
interbay transport system measured
backwards from the facial datum
plane of the interbay transport
system to allow for stocker pick up
using the secondary kinematic pins
D10 distance measured from the facial
N/A
datum plane (FDP) where the depth
of the center exclusion zone lowers
from H2 to H4 in the interbay
transport system (C,D)
H
Height of the horizontal datum
TBD
plane of the interbay load port
(See
(stocker) or interbay transport
NOTE 1.)
system determined by user and
and must
supplier
be
adjustable
by ± 10
mm
H2
depth of exclusion zone below the
130 mm
horizontal datum plane (HDP) of
the stocker load port (A,B) OR the
interbay transport system (C,D)
H4
depth of the exclusion zone below
N/A
the horizontal datum plane (HDP)
of interbay transport system (C,D)
starting at a distance D10 from the
facial datum plane (FDP)
S
distance between the bilateral
450 mm
datum plane of two adjacent load
ports
T3
height of the open volume in that it
N/A
allows the interbay transport system
to enter the stocker the transport.
This exclusion zone is occupied by
the transport itself, the maximum
height of the carrier, a clearance
Option C
250 ± 50
mm
Option D
N/A
Option E
N/A
Option F
250 ± 50
mm
SEMI E15.1
250 +0/-10
mm
SEMI E15.1
200 +10/-4
mm
N/A
N/A
N/A
N/A
N/A
N/A
N/A
TBD
SEMI E15.1
N/A
250 ± 50 mm
250 ± 50
mm
N/A
SEMI E15.1
90 mm
90 mm
TBD
TBD
SEMI E15.1 150 mm or
230 mm
(See NOTE
1.)
TBD
(See NOTE
1.) and must
be
adjustable
by ± 10 mm
150 mm or
230 mm
(See NOTE
1.)
150 mm or 150 mm or
230 mm
230 mm
(See NOTE (See NOTE
1.)
1.)
TBD
TBD
TBD
TBD
(See NOTE (See NOTE (See NOTE (See NOTE
1.) and must 1.) and must 1.) and must 1.) and must
be
be adjustable
be
be
adjustable
by 10 mm
adjustable
adjustable
by ± 10 mm
by 10 mm
by 10 mm
SEMI E15.1
100 mm
100 mm
100 mm
100 mm
N/A
170 mm
170 mm
170 mm
170 mm
505 mm
N/A
N/A
N/A
N/A
N/A
800 mm or
1150 mm
(See NOTE
1.)
N/A
N/A
N/A
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an offi cial or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 2
Doc. 4100  SEMI
LETTER (YELLOW) BALLOT
Dim
C5
DRAFT
Document Number: 4100
Date: 3/6/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
Definition
above carrier, and a clearance
below the transport.
Option A
Option B
Option C
Option D
Option E
Option F
NOTE 1: User to specify which dimension (see Section 6).
NOTE 2: See Related Information 2 of this document.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an offi cial or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 3
Doc. 4100  SEMI
LETTER (YELLOW) BALLOT
Dim
DRAFT
Document Number: 4100
Date: 3/6/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
DRAFT
Document Number: 4100
Date: 3/6/2016
LETTER (YELLOW) BALLOT
1.2 Revise Figure 3 as indicated below with strikethrough and underline.
Active Transport Delivers a Carrier to an Internal Stocker Position
Top View
NOTE 1: Carrier rests on the primary set of
kinematic pins while on the transport.
C5
NOTE 2: Transport must maintain
same exclusion zones as
depicted in Figure 1.
Option C
(Drive Through)
Side View (Suspended Type)
Front View
Side View (Over the Rail)
Stocker
Stocker
D
10
T3
HDP
T3
HDP
H
2
H2
Vehicle
C5
H2 (min)
(See
NOTE 2.)
100
Open
Cassette
110
(See
NOTE 1.)
H4
(min)
170
A1
(min)
N/A
A2
(range)
213 +2/-0
A3
(min)
225
170
N/A
213 +2/-0
225
C5
(range)
250 ±
50
250 ±
50
4
C5
NOTE 3: Transport vehicle uses
primary set of kinematic pins.
Option C
(Drive
Through)
FOUP
H
Vehicle
A2
NOTE 4: Transport vehicle uses
primary set of kinematic pins.
D10 (max)
(See
NOTE 1.)
150 or 230
D6 (min)
(See
NOTE 2.)
112
150 or 230
112
T3 (min)
(See
NOTE 1.)
800 or
1150
800 or
1150

(deg)
0
2
NOTE 1: User to specify which dimension (see Section 6.3.1).
NOTE 2: See Related Information 2 of this document.
Figure 3
AMHS Interbay Load Port Option C (Drive Through)
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an offi cial or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 4
Doc. 4100  SEMI
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
DRAFT
Document Number: 4100
Date: 3/6/2016
LETTER (YELLOW) BALLOT
1.3 Revise Figure 4 as indicated below with strikethrough and underline.
Active Transport Delivers a Carrier to an Internal Stocker Position
Top View
NOTE 1: Carrier rests on the primary set of
kinematic pins while on the transport.
C5
NOTE 2: Transport must maintain
same exclusion zones as
depicted in Figure 1.
Option C
(Horizontal Transfer)
Side View (Suspended Type)
Front View
Side View (Over the Rail)
Stocker
Stocker
D
10
T3
T3
HDP
HDP
H
2
H2
Vehicle
C5
H2 (min)
(See
NOTE 2.)
100
Open
Cassette
110
(See
NOTE 1.)
H4
(min)
170
A1
(min)
600
170
600
A2
(range)
213 +2/0
213 +2/0
A3
(min)
225
225
C5
(range)
250 ±
50
250 ±
50
4
C5
NOTE 3: Transport vehicle uses
primary set of kinematic pins.
Option C
(Horizontal
Transfer)
FOUP
H
Vehicle
A2
D10 (max)
(See
NOTE 1.)
150 or
230
150 or
230
NOTE 4: Transport vehicle uses
primary set of kinematic pins.
D6 (min)
(See
NOTE 2.)
112
112
T3 (min)
(See
NOTE 1.)
800 or
1150
800 or
1150


(deg)
0
2
NOTE 1: User to specify which dimension (see Section 6.3.1.)
NOTE 2: See Related Information 2 of this document.
Figure 4
AMHS Interbay Load Port Option C (Horizontal Transfer)
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an offi cial or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 5
Doc. 4100  SEMI
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
DRAFT
1.4 Revise Table 2 as indicated below with strikethrough and underline.
Table 2 Dimensional Requirements for 300 mm AMHS Interbay Load Ports (Open Cassette Only)
Dim
Definition
Option A
 (deg) tilt of the open cassette when placed
2
to the load port
A1
minimum width of the load port cavity 375 mm
or cut-out in the stocker measured
from the facial bilateral datum plane
to the nearest obstruction on the
stocker
A2
width of the exclusion zone for center 213 +2/-0
pickup using the secondary kinematic
mm
coupling pins (symmetric about the
bilateral datum plane)
A3
Minimum width if the exclusion zone
N/A
(starting at a distance D10 from the
FDP) for center pickup using the
secondary kinematic coupling pins
(symmetric about the bilateral datum
plane)
A6
maximum protrusion of the interbay
N/A
transport measured from the facial
bilateral datum plan plane of the
transport (start of the exclusion
volume for fork-lift or conveyor rail
transfer)
A8
minimum width of the exclusion
N/A
volume for the fork-lift or conveyor
rail transfer mechanism measured
from the facial bilateral datum plane
(end of the exclusion volume for forklift or conveyor rail transfer)
C3
Height of the nearest stocker obstacle
100 mm
above the carrier during transfer
measured from the HDP of the
transport the maximum height of
the carrier. This creates an exclusion
zone for use of the top robotic flange.
C5
distance from the facial datum plane
N/A
of the transport to the internal stocker
boundary
D
distance from the stocker boundary to 270 mm
the facial datum plane on the stocker
load port (A,B)
D1
maximum distance or protrusion of
150 mm
any load port feature measured from
the facial datum plane on the load port
(inside the stocker cut-out)
Option B
SEMI E15.1
Option C
2
Option D
2
Option E
2
Option F
2
N/A
600 mm for
HT only
(See NOTE
1.)
N/A
N/A
N/A
SEMI E15.1
213 +2/-0
mm
213 +2/-0
mm
213 +2/-0
mm
213+2/-0
mm
N/A
225 mm
225 mm
N/A
N/A
SEMI E15.1
N/A
N/A
123 mm
N/A
N/A
N/A
N/A
203 mm
(80 wide)
N/A
SEMI E15.1
N/A
N/A
N/A
N/A
SEMI E15.1
250 ± 50
mm
N/A
N/A
250 ± 50
mm
250 +0/-10
mm
N/A
N/A
N/A
N/A
SEMI E15.1
200 +10/-4
mm
N/A
N/A
N/A
TBD
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an offi cial or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 6
Doc. 4100  SEMI
LETTER (YELLOW) BALLOT
Document Number: 4100
Date: 3/6/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
Definition
Option A
distance measured from the facial
N/A
datum plane (FDP) where the depth of
the center exclusion zone lowers from
H2 to H4 in the interbay transport
system (C,D)
D5
distance from the facial datum plane
N/A
of the interbay transport system
(vehicle) to the stocker boundary
D6 (See distance of the inner cavity or cut-out
N/A
NOTE of the interbay transport system as
2.)
measured from the facial datum plane
of the interbay transport system to
allow for stocker pick up using the
secondary kinematic pins
H
Height of the horizontal datum plane
TBD
of the interbay load port (stocker) or
(See
interbay transport system (vehicle)
NOTE 1.)
determined by user and supplier
and must
be
adjustable
by ± 10
mm
H2 (See depth of exclusion zone below the
140 mm
NOTE horizontal datum plane (HDP) of the
2.)
stocker load port (A,B) OR the
interbay transport system (C,D)
H4
depth of the exclusion zone below the
N/A
horizontal datum plane (HDP) of
interbay transport system (C,D)
starting at a distance D10 from the
facial datum plane (FDP)
S
distance between the bilateral datum
450 mm
plane of two adjacent load ports
T3
Height of the open volume in that it
N/A
allows the interbay transport system to
enter the stocker the transport. This
exclusion zone is occupied by the
transport itself, the maximum height
of the carrier, a clearance above
carrier, and a clearance below the
transport.
Option B
Option C
Option D
Option E Option F
SEMI E15.1 150 mm or 150 mm or 150 mm or 150 mm or
230 mm
230 mm
230 mm
230 mm
(See NOTE (See NOTE
(See
(See
1.)
1.)
NOTE 1.) NOTE 1.)
SEMI E15.1
N/A
250 ± 50
mm
250 ± 50
mm
TBD
SEMI E15.1
90 mm
(See NOTE
2.)
TBD
TBD
TBD
TBD
(See NOTE
1.) and must
be
adjustable
by ± 10 mm
TBD
(See NOTE
1.) and must
be
adjustable
by ± 10 mm
SEMI E15.1
100 mm
N/A
170 mm
180 mm
180 mm
170 mm
SEMI E15.1
N/A
N/A
N/A
N/A
N/A
800 mm or
1150 mm
(See NOTE
1.)
N/A
N/A
N/A
TBD
TBD
TBD
(See NOTE
(See
(See
1.) and must NOTE 1.) NOTE 1.)
be
and must and must
adjustable
be
be
by ± 10 mm adjustable adjustable
by ± 10
by ± 10
mm
mm
110 mm
50 mm
100 mm
NOTE 1: User to specify which dimension (see Section 6).
NOTE 2: See Related Information 2 of this document.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an offi cial or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 7
Doc. 4100  SEMI
LETTER (YELLOW) BALLOT
Dim
D10
DRAFT
Document Number: 4100
Date: 3/6/2016
Semiconductor Equipment and Materials International
3081 Zanker Road
San Jose, CA 95134-2127
Phone:408.943.6900 Fax: 408.943.7943
DRAFT
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant
literature, respecting any materials or equipment mentioned herein. These standards are subject to change without
notice.
By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights are entirely their own responsibility.
This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an offi cial or adopted standard. Permission is granted to
reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other
reproduction and/or distribution without the prior written consent of SEMI is prohibited.
Page 8
Doc. 4100  SEMI
LETTER (YELLOW) BALLOT
Document Number: 4100
Date: 3/6/2016