Recipes for laboratory exercises 1 - 4 in course FFF110, 2015
Done by supervisor:
• Growth of ~30 nm In0.53Ga0.47As (Si doped to ~2e17 cm-3) on S.I. InP substrate
1st exercise
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
Acetone 3min ultra sonic 100V
IPA 3min ultra sonic 100V
Hotplate 190°C for > 3 min
LOR 10B 5000rpm 63sec (Program 5)
Hotplate 190°C 5 min
S1813 5000rpm 63sec (Program 5)
Hot plate with lid 115°C 90s
UV litho, soft contact, 6sec (based on an intensity of around 9,5mW/cm2)
MF-319 50s (careful agitation/swirling), H2O 60s, N2
Verify result in optical microscope
Finally, for a spin-coated, unexposed, Si practice sample:
11. UV litho, soft contact, 6sec, Note: Use the mask that exposes the edges of the sample
12. MF-319 50s (careful agitation/swirling), H2O 60s, N2
13. UV litho, soft contact, 6sec Note: Use the same mask as in step 8.
14. MF-319 50s (careful agitation/swirling), H2O 60s, N2
15. Compare the double-exposed sample with a single-exposed sample in the optical microscope
Done by supervisor after exercise:
16. Plasma Preen 60s with Faraday cage
17. HCl:H20 (1:1) 60 s, H20 90s.
18. 200 Å Ti + 400 Å Pd + 2000 Å Au.
2nd exercise
Group A
1. Hot acetone + ultra sonic bath (if needed), until desired effect. IPA
2. Verify result in optical microscope
3. Hot (50°C) mr REM 400, ultra sonic bath (if needed). H2O
4. Verify result in optical microscope
5. HCl:H2O 1:1, 1 min. H2O rinse
6. ALD 200°C Al2O3+HfO2 (10+100 cycles) Hf 75°C, Substrate holder 200°C, 20 sccm N2.
Group B
• Side activities (learning about cleaving/cleaning, sputtering etc.)
Recipes for laboratory exercises 1 - 4 in course FFF110, 2015
3rd exercise
1.
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
Ellipsometry
Hotplate 190°C for > 3 min
LOR 10B 5000rpm 63sec (Program 5)
Hotplate 190°C 5 min
S1813 5000rpm 63sec (Program 5)
Hot plate with lid 115°C 90s
UV litho, soft contact, 6sec (based on an intensity of around 9,5mW/cm2)
MF-319 50s (careful agitation/swirling), H2O 60s, N2
Verify result in optical microscope
Stripping of dummy samples
Plasma Preen 60s with Faraday cage, 5 mbar O2.
Done by supervisor after exercise:
12. AVAC 50Å Pd + 2000Å Au.
13. Hot (50°C) mr REM 400, ultra sonic bath if needed. H2O.
4th exercise
Group A
• SEM
Group B
• Probe-station