Substrate cleaning SOP
All sonication should be done in beakers, with your substrates in your assigned substrate holder!
Some notes on where to find things:
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ITO substrates are in drawer 20C-09 or 20C-10
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Beakers (the short, fat ones) can be found in the laminar flow hood that contains the
sonicator or drying off in the 2020 fumehoods
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Solvents for cleaning are in E5-2020 under the laminar flow hood that contains the
sonicator
-
Funnels for each solvent are labeled and are stored above the 2020 sink. Please do not mix
them up!
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Detergent (Fisherbrand VersaClean) is located on the counter by the sink. It is an orange
fluid in a 1-liter bottle. If this bottle is empty, you can find more in drawer 20C-02.
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Detergent should be diluted with DI water in a ratio of 1:10 to 1:40 in your beaker for
cleaning
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Green-handled plastic swabs are in drawer 20C-07
1. Retrieve only as many substrates as you need from the drawers.
2. With diamond scribe, label (on the non-ITO side) each substrate with your identification letter
and the substrate number
3. Place scribed substrates into your assigned substrate holder. Small white holders can hold
up to 42 substrates and large white holders can hold up to 60 substrates.
4. Sonicate for 15 minutes in either Step 1 acetone or Step 1 IPA. When complete, pour used
solvent back into Step 1 bottle and blow off substrates with nitrogen gun.
5. (Required for LEDs) Scrub both sides of each substrate with diluted detergent using a greenhandled swab.
6. Sonicate substrates for 20 minutes in diluted detergent. When complete, pour used detergent
into the sink.
7. Sonicate substrates for 20 minutes in DI water. When complete, pour used water into the
sink.
8. Repeat Step 7
9. Sonicate substrates for 15 minutes in Step 3 acetone and pour used solvent back into the Step
3 bottle
10. Sonicate substrates for 15 minutes in Step 4 IPA and pour used solvent back into the Step 4
bottle