5504A
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SEMI Draft Document 5504A REVISION OF SEMI E52-0912 PRACTICE FOR REFERENCING GASES, GAS MIXTURES AND VAPORIZABLE MATERIALS USED IN DIGITAL MASS FLOW CONTROLLERS Background Statement Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document. Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. Additional gases and mixture gases codes were requested. This ballot is to assign subsequent codes in tables in E52. Added codes will facilitate the production and use of digital mass flow device. Review and Adjudication Information Group: Date: Time & Timezone: Location: City, State/Country: Leader(s): Standards Staff: Task Force Review MFC Task Force Monday, July 8, 2013 11:00 AM- 12:00 PM San Francisco Marriott Marquis San Francisco, CA Mohamed Saleem (Fujikin) John Krell (Brooks Instrument) Kevin Nguyen, knguyen@semi.org Committee Adjudication NA Facilities & Gases Committees Tuesday, July 9, 2013 9:00 AM- Noon San Francisco Marriott Marquis San Francisco, CA Tim Volin (Parker Hannifin) Steve Lewis (CH2M Hill) Kevin Nguyen, knguyen@semi.org This meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation. Telephone and web information will be distributed to interested parties as the meeting date approaches. If you will not be able to attend these meetings in person but would like to participate by telephone/web, please contact Standards staff. Check www.semi.org/standards on calendar of event for the latest meeting schedule. For question on the ballot, contact SEMI Staff, Kevin Nguyen at knguyen@semi.org Note: Additions are indicated by underline. Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone:408.943.6900 Fax: 408.943.7943 SEMI Draft Document 5504A REVISION OF SEMI E52-0912, PRACTICE FOR REFERENCING GASES, GAS MIXTURES AND VAPORIZABLE MATERIALS USED IN DIGITAL MASS FLOW CONTROLLERS Add subsequent gases and gas mixtures codes shown in table 1 through 5 as follows: Table 1 Gases Sorted by Code Code -- Gas Name -------- Symbol Formula ---- --- Synonym -- Ref -- 372 Nitroethane C2H5NO2 C2H5NO2 373 Pentamethyl Silanamine C5H15NSi C5H15NSi N,N-Dimethylamino Trimethylsilane 15 15 374 Dimethylethanolamine C4H11NO C4H11NO N,N-Dimethylethanolamine 15 Symbol Formula -------- ---- --- 372 Nitroethane C2H5NO2 C2H5NO2 373 Pentamethyl Silanamine C5H15NSi C5H15NSi N,N-Dimethylamino Trimethylsilane 15 374 Dimethylethanolamine C4H11NO C4H11NO N,N-Dimethylethanolamine 15 Table 2 Gases Sorted by Name Code -- Gas Name Synonym -- Ref -15 Table 3 Gases Sorted by Symbol Code -- Gas Name -------- Symbol Formula ---- --- Synonym -- Ref -- 372 Nitroethane C2H5NO2 C2H5NO2 373 Pentamethyl Silanamine C5H15NSi C5H15NSi N,N-Dimethylamino Trimethylsilane 15 15 374 Dimethylethanolamine C4H11NO C4H11NO N,N-Dimethylethanolamine 15 This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 1 Doc. 5504A SEMI LETTER (YELLOW) BALLOT DRAFT Document Number: 5504A Date: 2/16/2016 Semiconductor Equipment and Materials International 3081 Zanker Road San Jose, CA 95134-2127 Phone:408.943.6900 Fax: 408.943.7943 Table 4 Mixed Gases Sorted by Code Mixed Gas Name Symbol Code ………………………………………………………………………………. ……………. ……. 2%Ge2H6/H2 38%SiCl4/O2 20%H2S/20%CO2/N2 20%SiH2Cl2/H2 0.1%Cl2/N2 1%HCl/N2 3%BCl3/N2 18%NO/N2 9%NO/41%N2/H2 20%H2/Ar %C3H6/N2 0985 0986 0987 0988 0989 0990 0991 0992 0993 0994 0995 Mixed Gas Name Symbol Code ………………………………………………………………………………. ……………. ……. 2%digermane/hydrogen 2%Ge2H6/H2 0985 2%digermane/hydrogen 38%Silicon Tetrachloride / Oxygen 20%Hydrogen Sulfide/20%Carbon Dioxide/Nitrogen 20%Dichlorosilane/Hydrogen 0.1%Chlorine/Nitrogen 1%Hydrogen Chloride/Nitrogen 3%Boron Trichloride/Nitrogen 18%Nitric Oxide/Nitrogen 9%Nitric Oxide/41%Nitrogen/Hydrogen 20%Hydrogen/Argon 5%Propylene/Nitrogen Table 5 Mixed Gases Sorted by Percentage 38%Silicon Tetrachloride / Oxygen 20%Hydrogen Sulfide/20%Carbon Dioxide/Nitrogen 20%Dichlorosilane/Hydrogen 38%SiCl4/O2 0986 20%H2S/20%CO2/N2 0987 20%SiH2Cl2/H2 0988 0.1%Chlorine/Nitrogen 0.1%Cl2/N2 0989 1%Hydrogen Chloride/Nitrogen 1%HCl/N2 0990 3%Boron Trichloride/Nitrogen 3%BCl3/N2 0991 18%Nitric Oxide/Nitrogen 18%NO/N2 0992 9%NO/41%N2/H2 0993 20%Hydrogen/Argon 20%H2/Ar 0994 5%Propylene/Nitrogen %C3H6/N2 0995 9%Nitric Oxide/41%Nitrogen/Hydrogen NOTICE: SEMI makes no warranties or representations as to the suitability of the standard(s) set forth herein for any particular application. The determination of the suitability of the standard(s) is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature respecting any materials or equipment mentioned herein. These standards are subject to change without notice. By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such rights are entirely their own responsibility. This is a draft document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted standard. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited. Page 2 Doc. 5504A SEMI LETTER (YELLOW) BALLOT DRAFT Document Number: 5504A Date: 2/16/2016
