Super High-Resolution TEM/STEM Analysis in Materials Science Recently, both transmission electron microscope(TEM) and scanning transmission electron microscope(STEM) have made huge progress owing to a stable field emission gun (FEG) and sophisticated lens designing technologies. Also, a spherical aberration corrected (Cscorrected) lens is now becoming widely spread as commercial instrument. In this paper, very high-resolution (atomic scale) image observation and elemental analysis were successively applied to nanometals, with Cs-corrected TEM and STEM. Instruments of Atomic Scale analysis used in this investigation were the JEM-2100F (200 kV FEG TEM/STEM) equipped Cs-correctors for imaging and probe forming lenses. In the lecture, atomic resolution TEM image analysis and atomic order resolution EELS-maps are introduced. It is ascertained that the JEM-2100F/Cs-correctors is able to realize an atomic resolution nano-analysis.