School of Electronics, Electrical Engineering and Computer Science Final Year Project 2006/2007 Title: Room Temperature Bonding of Silicon Chip to Heat Sink Supervisor: Prof HS Gamble Moderator: Dr SJN Mitchell Consultants:- Dr P Rainey, Dr R Dickie Indexing terms:- Microelectronics Silicon devices for several different applications need to be kept cool. However, the dissipated power density, which can be quite high and is continually increasing as devices complexity grows. The high power chips are normally attached to packages by either thermal compression bonding or by epoxy. The former can be uneven and requires quite a high temperature, while the latter provides poor conductivity to the heat sink. The Microelectronics research group is engaged in a collaborative research project on SiGe quantum cascade lasers. These consist of multiple thin layers of silicon and silicon germanium and the structure is very sensitive to temperature. Thus they need to be provided with a heat sink preferably at a temperature below 400C. One method being investigated is to join the laser chip to the heat sink by copper electrolytic plating. This is a room temperature process and if successful could be used for heat sinking in many applications. The aim of the project is to investigate various techniques of copper plating silicon chips to copper heat sinks and to determine the thermal conductivity of the bond. The student will be required to: Carry out the copper plating Use Scanning Microscopy to view cross sections of the copper bonding Design and fabricate aluminium resistors on silicon Calibrate the resistance value as a function of temperature Calculate thermal resistance for the copper bonds