GUIDE TO CYMER ELS 5400
Outline
1
Introduction
2
Operation
2.1 Turn on laser
2.2 Setup and Fire
2.3 Measure intensity
2.4 Turn off laser
3
Maintenance
3.1 Gas refill
3.2 Replace nitrogen cylinder
4
Trouble Shooting
5
Contact
6
Update
Ver 1.1
Call Xinyu Gu at (512)744-8453 if you have any questions.
Introduction
CYMER ELS 5400 is one of the earliest models of KrF laser among CYMER’s products.
This laser is a single chamber and outputs 248 nm light. The laser in our lab was generously
donated by CYMER Inc.
1. Getting Start
1.1 Turn on laser
There are three modes in CYMER ESL 5400, i.e. long off, standby and on. In the long off
mode, laser is off. In the standby mode, the memory and log could be read by an external PC.
In the on mode, the laser is running.
a)
Open the main valve on the nitrogen cylinder. (at the corner of the room between New
yellow and Old yellow) Do NOT touch the regulator unless the pressure is not between
60 and 90 psi.
b) Open the main valve on the water line.
c) Open the bottom red valve.
d) Switch on the alarm light for New yellow lab.
e) Push “on” button on the remote control paddle. The laser goes into standby mode.
f) Push “on” button again. The laser goes into on mode.
1.2 Setup and Fire
a) Push “Burst Count” button, enter the number of pulses you need and press “enter”.
b) Push “Rep Rate” button, enter the number of pulse frequency you need and press
“enter”. To keep the laser running safely and consistently, set the REP RATE below 100
Hz.
c) Place your sample above the smelling face and close the door on the exposure box.
d) Push “Shutter” button to open the electric shutter in the laser. “OO” will be shown on
the right top corner of the display screen on the remote control paddle instead of
“##”.
e) Push the rod switch at the outlet of the laser to open the mechanical shutter. Both the
mechanical shutter and the electrical shutter need to be opened for firing laser.
f) Look around and make sure that everybody has protection goggle on.
g) Push “Fire” to shoot laser on your sample.
1.3 Measure intensity
a)
Plug the smaller photo sensor (J-10MB-LE) onto the photometer (Coherent Field MAX
b)
c)
d)
e)
f)
g)
h)
i)
j)
k)
l)
m)
II).
Plug the power cord onto the photometer.
Long press the illumination button to turn on the meter.
Open the cap on the photo sensor.
Place the sensor in the center of the laser beam. (Do NOT fire the laser right now)
Close the door on the exposure box and leave a crack for the wire to the sensor.
Set the Burst Count to ZERO and the Rep Rate to FIVE. (ZERO means infinite
number of pulses.)
Fire the laser.
Push “↑” and “↓” to adjust the maximal scale of the meter. (Usually 300 μJ and keep in
mind that trigger threshold is 8% of the maximal scale)
Push “Stat” button to switch between statistics mode and real time mode. (Statistics
mode collects the energies of 30 pulses and calculates the MAX, MIN, MEAN and
STDV)
Push “Zero” to redo the statistics again.
Write down the average energy and make sure that the standard deviation is less than
5%.
Calculate the real intensity on your sample. ( usually thin films on wafers)
Exposure box
D=10 mm
L=10.7 cm
H0=1 cm
4 Emean  L  H 0 
Intensity 


D 2  L 
1.4 Measure intensity
a)
b)
c)
d)
Close both the mechanical and electric shutters.
Press “Off ” twice to switch to long off mode.
Close the main valve on the nitrogen cylinder.
Close the valve on the cooling water line.
2. Maintenance
2
2.1 Gas refill
As the laser runs for long time, the composition of the gases in the chamber deviates from
the ideal values, which lowers the laser performance. Therefore, we have to refill the gas in
the chamber in the laser. During the refilling process, the machine first pumps down to
exhaust all the old gas to the fume hood and then receives the gases from the cylinders.
In gas room:
a) Open nitrogen.
b) Open the main valve on the Helium cylinder in the blue cabinet.
c) Open the main valves on the right two cylinders which contain Krypton.
In New Yellow:
d) Make sure that the Helium is connected to CYMER laser. Check the valves above the
ArF laser machine.
e) Make sure the laser is off.
f) Press “Gas Refill” button on the right bottom corner of the control paddle until the
screen shows GAS REFILL.
g) Press “Enter”.
h) Wait until the screen returns back to the initial state and the gas request light comes off
on the panel.
In gas room:
i) Close all the mail valves that you just opened in the blue cabinet.
2.2 Replace nitrogen cylinder
The nitrogen runs out very fast when the laser is being used. Remember to CLOSE the main
valve on the nitrogen cylinder after you are done.
To replace the empty nitrogen cylinder:
a) Disassemble the regulator and put the safety cap back on.
b) Take a cart from the basement.
c) Ask Xinyu for the password to buy the nitrogen gas.
d) Carry the cylinder to RLM 3.104 and get new nitrogen.
e) Put everything back on and return the cart.
Trouble Shooting
Refer to CYMER Manual.
Contact
Israel Gracia
Technical support
Cymer, Inc.
Austin, TX
Cell: (512) 705-4359
Pager: (512) 205-1433
Alpha: 5122051433@usamobility.com
Email: Israel_Gracia@cymer.com
Update
Xinyu Gu, Version 1.0, June 29th 2009
Xinyu Gu, Version 1.1, July 15th 2009