Press Release
March 8th, 2010 – Watervliet, NY, USA
Yale University selects Vistec EBPG5000plus Electron-Beam
Lithography System for Advanced Nanotechnology Research
Vistec Lithography, Inc. announced today that Yale University, New Haven,
Connecticut, selected Vistec’s EBPG5000plus electron-beam lithography system
for its future nanotechnology research programs. As part of the Yale Institute for
Nanoscience and Quantum Engineering, it will enhance the effectiveness of
research and education at Yale in emerging nanotechnology and will encourage
multidisciplinary research involving Yale faculty, its students, and associated
world-wide research partners.
The Yale EBPG5000plus represents the continued development of the highly successful
EBPG product series. The high performance lithography system is based on reliable and
well-proven system architecture. With further enhancements in resolution, noise reduction
and beam stability, Yale’s Vistec EBPG5000plus is set to generate structures to less than
8nm on substrates up to 150 mm in diameter, including fragments and special substrates.
Its electron-optical column (TFE source) is rated for acceleration voltages of 20, 50, and
100kV. The system is equipped for true 100kV / 1mm performance under regular electronoptical conditions with a wide current capability for high throughput applications. The
pattern generator operates at up to 50MHz. The system incorporates an interactive
graphical user interface (GUI) that provides ease of use for diverse, multiuser, university
type environments.
“The acquisition of the Vistec EBPG5000plus will enable the Yale research community to
explore the expanding field of nanotechnology with a state-of-the-art electron-beam
lithography patterning system. We will utilize the system for a wide variety of applications
including Applied Physics, Electrical Engineering and Bio-technology. The Vistec system
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49(0)3641/651955
Fax: +49(0)3641/651922
ines.stolberg@vistec-semi.com
www.vistec-semi.com
Vistec Electron Beam GmbH
Goeschwitzer Straße 25
D-07745 Jena
Vistec Lithography, Inc.
125 Monroe Street
Watervliet, NY 12189 (USA)
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Press Release
will allow Yale to remain at the forefront of nanotechnology today and well into the future”
said Dr. Michael Rooks, Facilities Director of the Yale Institute for Nanoscience and
Quantum Engineering. “The EBPG system will provide the Yale community with not only
high quality nanolithography patterning, but with high flexibility and user friendliness for
our various multidisciplinary activities. Vistec’s system is perfect for our nanotechnology
requirements.”
“Vistec is pleased to be associated with Yale University. We look forward to our cooperation with Yale’s leading edge nanotechnology researchers and their programs,”
noted Rainer Schmid, General Manager Vistec Lithography, Inc. “Vistec’s association with
Yale and its electron-beam research scientists will hopefully lead to further software and
hardware enhancements for our highly successful EBPG series.”
Media information:
Yale Institute for Nanoscience and Quantum Engineering
The Yale Institute for Nanoscience and Quantum Engineering (YINQE) is a new initiative
at Yale University intended to provide nanofabrication, microscopy and materials
characterization to disparate scientific disciplines centered on nanoscale research
projects. YINQE builds on existing research strengths in engineering and the physical and
life sciences to broaden interdisciplinary activity among faculty and students across the
entire campus. The Institute provides improved nanomaterials fabrication capabilities,
together with centralized shared characterization. These facilities complement Yale’s
microelectronics clean room, computational facilities and materials synthesis laboratories.
See http://nano.yale.edu for more information.
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49(0)3641/651955
Fax: +49(0)3641/651922
ines.stolberg@vistec-semi.com
www.vistec-semi.com
Vistec Electron Beam GmbH
Goeschwitzer Strasse 25
D-07745 Jena (Germany)
Vistec Lithography, Inc.
125 Monroe Street
Watervliet, NY 12189 (USA)
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Press Release
Vistec Electron Beam Lithography Group
The Vistec Electron Beam Lithography Group is a global manufacturer and supplier of electronbeam lithography systems with applications ranging from nano and bio-technology to photonics
and industrial environments like mask making or direct writing for fast prototype development and
design evaluation. The Vistec Electron Beam Lithography Group combines Vistec Electron Beam
and Vistec Lithography.
Vistec Lithography
Vistec Lithography develops, manufactures, and sells electron-beam lithography equipment based
on Gaussian Beam technology. Their electron-beam systems are world-wide accepted in advanced
research laboratories and universities. The company is located in Watervliet, NY (USA), within the
Capital Region of New York.
Vistec Electron Beam
Vistec Electron Beam is providing electron-beam lithography equipment based on Shaped Beam
technology, which is used by leading semiconductor manufacturers and many research institutes
around the world. Their innovative electron-beam systems are used for microchip production and
integrated optics as well as for scientific and commercial research. The company is located in Jena
(Germany).
For downloads of all media releases and images in print quality please visit the website at
www.vistec-semi.com. If you require other formats or images please do not hesitate to
contact us.
Media contact:
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49(0)3641/651955
Fax: +49(0)3641/651922
Vistec Electron Beam GmbH
Goeschwitzer Strasse 25
D-07745 Jena (Germany)
Vistec Lithography, Inc.
125 Monroe Street
Watervliet, NY 12189 (USA)
Vistec Electron Beam GmbH
Goeschwitzer Strasse 25
D-07745 Jena (Germany)
Vistec Lithography, Inc.
125 Monroe Street
Watervliet, NY 12189 (USA)
pr@vistec-semi.com
www.vistec-semi.com
PR Agency
Tower PR
Leutragraben 1
D-07743 Jena (Germany)
Tel.: +49(0)3641/507081
vistec@tower-pr.com
Ines Stolberg
Manager Strategic Marketing Litho
Tel.: +49(0)3641/651955
Fax: +49(0)3641/651922
ines.stolberg@vistec-semi.com
www.vistec-semi.com
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