SCANNING ELECTRON MICROSCOPE
MANUFACTURER: HITACHI
MODEL: S2300
APPLICATION:
Scanning electron microscopy (SEM) is a method for high-resolution imaging of
surfaces. The SEM uses electrons for imaging, as optical microscopes use
visible light. The advantages of SEM over optical microscopy include greater
magnification (up to 100,000x) and higher depth of field.
An incident electron beam is raster-scanned across the sample's surface, and
the resulting electrons emitted from the sample are collected to form an image
of the surface. Imaging is typically obtained using secondary electrons for a
better resolution of fine surface topographical features. Alternatively, imaging
with backscattered electrons gives contrast based on atomic number, which
solves microscopic composition variations, and gives topographical information.
TECHNICAL SPECIFICATIONS:
The main characteristics of the SEM HITACHI S2300 are:
Resolution
4.5 nm. (x20 – x200.000)
Electron optical system
Filament: Tungsten
Accelerating Voltaje: 0.5-30 kV
3 lens reduction system
2-stage electromagnetic deflection
system
Objective lens aperture: 0.1-0.4 mm
Specimen stage
X Traverse: 0 – 80 mm
Y Traverse: 0 – 40 mm
Tilt angle: -20º a 90º
Work distance: 5 – 35 mm
Rotation angle: 360º
Evacuating system
1 Oil difusión pump: 400l/sec
1 Oil rotatory pump: 160/min
P=10-5 Torr.
Ambient conditions
Temperature: 15 – 30ºC
Humidity < 70%
Vibration < 5 Hz