Literature Review: Introduction to Research MCEN 5028 Synthesis of carbon nanotubes by chemical vapor deposition Graduate student: Amit Khosla Graduate Advisor: Professor Roop. L. Mahajan 2/12/2016 1 Table of Contents: Abstract: .......................................................................................................... 3 Introduction:.................................................................................................... 3 Synthesis of Carbon nanotubes: ..................................................................... 5 Arc-Discharge and Laser Ablation: ................................................................................ 5 Synthesis by CVD Mechanism ....................................................................................... 6 Single-Walled Nanotube Growth and Optimization ...................................... 8 Directed Growth of Single-Walled Nanotubes............................................... 9 Conclusions ..................................................................................................... 9 References:...................................................................................................... 9 Figure References : ....................................................................................... 10 Table of Figures: Figure 1: Schematic of Arc Discharge method Figure 2: Schematic of Laser Ablation .................................................................... 6 Figure 3: CNT synthesis by laser ablation. ..................................................... 6 Figure 4: Schematic of CVD process ............................................................. 7 Figure 5: Growth process of CNT from nucleating spot ................................ 7 Figure 6: Graph of wetting of Fe by carbon atom .......................................... 7 Figure 7 ........................................................................................................... 8 Figure 8: Image of CNT generated by CVD process ..................................... 8 Figure 9: Structured pattern of SiO2 on Si wafer Figure 10: Directed growth of CNT on Pegs ............................................................ 9 2 Abstract: Carbon nanotubes with their extraordinary mechanical, thermal and electric properties hold a strong potential for future applications. This review discusses the various growth methods of carbon nanotubes with emphasis on chemical vapor deposition (CVD). CVD methods hold the advantage of producing high quality nanotubes in large scales. Their advantages over other forms of synthesizing CNT’s are discussed. In the lights of experimental and theoretical approaches, various mechanisms, for single and multi-wall nanotubes nucleation and growth are reviewed. A fundamental understanding of nanotube growth at the atomic level is probably one of the main issues to develop a nanotube mass production process. Techniques for building micro- and nano –scale architectures with carbon nanotubes using chemical vapor deposition have been studied. This controlled growth of CNT point to the strong possibility of the building nano scale devices. Introduction: Till1985 primary allotropes of carbon were diamond and graphite. In 1985 a new allotrope was discovered by a group (Smalley) at Rice University, called Bucky Ball or C60. It comprises of 60 carbon atoms combined to form a hollow closed sphere and resembles to that of soccer ball. It was in 1991, while working on the C60 structure, another allotrope of carbon, now known as carbon nanotube, was found accidentally by Sumiya IIjama. He first found carbon nanotube while examining soot from the arc discharge chamber used commonly to form C60. Since then these nanotubes have opened a new world of possibilities because of their amazing mechanical [1, 2, 3], thermal [4] and electric properties [5, 6]. Structurally carbon nanotubes consist of graphene sheet rolled up into a seamless, cylindrical tube. The side walls of the tubes are made of hexagons while the end caps are formed of heptagons or pentagons. The diameters of the nanotubes range from few nanotubes for single walled nanotubes (SWNTs) to several tens of nanometers for multi walled nanotubes (MWNTs). The mechanical property of carbon nanotube is attributed to the nature of their C-C bond strength and their seamless structure [1]. Carbon nanotubes are predicted to have far superior mechanical properties in comparison to carbon fibers. Young’s modulus of SWNT has been theorized to be ~1TPa [1]. Mechanical behavior of MWNTs is more complex than SWNTs due to the interaction between the multiple cylindrical layers. It is assumed that the individual layers in the MWNT should only interact by van der Walls forces [3]. This weak interaction may lead to the sliding of walls within one other thereby lowering the young modulus. CVD grown tubes had moduli ranging from 30-50 GPa. This could be because of many defects associated with CVD growth method. Another advantage of carbon nanotubes besides their high strength is their ability to undergo elastic deformation without breaking. The combination of high strength and flexibility makes carbon nanotubes an ideal choice for use in structural reinforcements. Beyond their mechanical properties, carbon nanotubes also possess unique electrical properties. Depending on the nanotubes helicity, how the carbon atoms wrap around the nanotube, nanotubes can be metallic or semi conducting [7,8]. Due to their nanometer size, carbon nanotubes are one dimensional (I-D) conductors, meaning that the electrons 3 only flow in one direction, along the axis of the tube. The electrical properties of carbon nanotubes can be modified by doping of the tube’s lattice with other elements. The addition of dopants alters the local structure of the nanotube [9]. Adding defects not only allow for the combination of two or more different types of nanotubes but they can also facilitate the attachment of carbon nanotubes with biological structures like DNA , which assist in self assembly of carbon nanotubes. This may lead to the future possibilities of integrated structures on the order of a few nanometers with the nanotube acting as the transistor and/or metal interconnect . The thermal properties of nanotubes like the mechanical and electrical are also unique. The thermal conductivity of carbon nanotubes is higher than most known materials at moderate temperatures. This is primarily due to the phonon contribution at all temperature ranges [4]. Thermal conductivity values of aligned ropes of SWNTs at room temperature have been measured to be greater than 200W/mK while mats of nanotubes possess a thermal conductivity of ~35 W/mK [4]. This property of carbon nanotubes can be exploited for the development of thermal interface material. The main hindrance to employing carbon nanotubes in real world devices is the inability to control the growth of the nanotube (direction and location) and to synthesize them in bulk quantities. There are primarily three main methods to grow carbon nanotubes: arc discharge [5], laser ablation [5] and chemical vapor deposition (CVD) [10, 11]. The first two methods are high temperature processes, (2500oC) that yield high quality but poor density of carbon nanotubes. The CVD technique has the ability to grow bulk amounts of carbon nanotubes, but these nanotubes contain defects along the length of tubes due to the relatively low synthesis temperatures of 600-1200oC. There are also problems with the ability to selectively grow carbon nanotubes at specific sites. Some progress however have been done in that area by forming micro- nano patterns of nanotubes on structured substrates using conventional lithography and E-beam writing. However, much research is still required for the selective growth of SWNTs. No one, as of yet has been able to grow aligned SWNTs on a substrate or consistently control the direction of the SWNT growth. My research shall discuss detailed studies towards understanding the factors that contribute to the growth of SWNTs and MWNTs during the thermal decomposition of acetylene gas in the presence of liquid precursor, ferrocene. A fundamental knowledge of the process would help in finding applications of MWNTs and SWNTs in real world devices. This work would try to determine what operating properties promote the growth of SWNTs. A first approach would be done by utilizing extensive literature in this area. The established ideal growth parameters i.e. the gas type, metal catalyst and flow rate would be kept constant. After these variables have been determined a close examinations of the effect of temperature, growth time, ferrocene concentration and growth pressure shall be carried out to optimize the process. 4 Synthesis of Carbon nanotubes: Now that the brief overview of the mechanical, electric and thermal properties of carbon nanotubes has been provided, the synthesis of CNTs and the previous work done shall be discussed. There are three main methods to fabricate carbon nanotues: arc discharge, laser ablation, chemical vapor deposition. Arc-Discharge and Laser Ablation: Arc-discharge and laser ablation methods for the growth of nanotubes have been actively pursued in the past ten years. Both methods involve the condensation of carbon atoms generated from evaporation of solid carbon sources. The temperatures involved in these methods are close to the melting temperature of graphite, 3000–4000oC. In arc-discharge, carbon atoms are evaporated by plasma of helium gas ignited by high currents passed through opposing carbon anode and cathode [fig 1]. Arc-discharge has been developed into an excellent method for producing both high quality multi-walled nanotubes and single-walled nanotubes. MWNTs can be obtained by controlling the growth conditions such as the pressure of inert gas in the discharge chamber and the arcing current .In 1992, a breakthrough in MWNT growth by arc-discharge was first made by Ebbesen and Ajayan who achieved growth and purification of high quality MWNTs at the gram level [5]. The synthesized MWNTs have lengths on the order of ten microns and diameters in the range of 5-30nm. The nanotubes are typically bound together by strong van der Waals interactions and form tight bundles. MWNTs produced by arc-discharge are very straight, indicative of their high crystallinity. For as grown materials, there are few defects such as pentagons or heptagons existing on the sidewalls of the nanotubes. The by-product of the arc-discharge growth process is multi-layered graphitic particles in polyhedron shapes. Purification of MWNTs can be achieved by heating the as grown material in an oxygen environment to oxidize away the graphitic particles [11]. The polyhedron graphitic particles exhibit higher oxidation rate than MWNTs; nevertheless, the oxidation purification process also removes an appreciable amount of nanotubes. For the growth of single-walled tubes, a metal catalyst is needed in the arc-discharge system. The first success in producing substantial amounts of SWNTs by arc-discharge was achieved by Bethune and coworkers in 1993 [12].They used a carbon anode containing a small percentage of cobalt catalyst in the discharge experiment, and found abundant SWNTs generated in the soot material. The growth of high quality SWNTs at the 1–10 g scale was achieved by Smalley and coworkers using a laser ablation (laser oven) method [Fig 2.] [5]. The method utilized intense laser pulses to ablate a carbon target containing .05 atomic percent of nickel and cobalt. The target was placed in a tube-furnace heated to 1200oC. During laser ablation, a flow of inert gas was passed through the growth chamber to carry the grown nanotubes downstream to be collected on a cold finger. The produced SWNTs are mostly in the form of ropes consisting of tens of individual nanotubes close-packed into hexagonal crystals via van der Waals interactions[Fig3 ]. The optimization of SWNT growth by arc-discharge was achieved by Journet and coworkers using a carbon anode containing 10 atomic percentage of yttrium and 42 at % of nickel as catalyst [5]. In SWNT growth by arc-discharge and laser ablation, typical byproducts include fullerenes, graphitic polyhedrons with enclosed metal particles, and amorphous carbon in the form of particles or over coating on the sidewalls of nanotubes. 5 A purification process for SWNT materials has been developed by Smalley and coworkers [5] and is now widely used by many researchers. The method involves refluxing the as-grown SWNTs in a nitric acid solution for an extended period of time, oxidizing away amorphous carbon species and removing some of the metal catalyst. Figure 1: Schematic of Arc Discharge method [1] Figure 2: Schematic of Laser Ablation[2] Figure 3: CNT synthesis by laser ablation [3] Synthesis by CVD Mechanism Chemical vapor deposition (CVD) methods have been successful in making carbon fiber, filament and nanotube materials since more than 10–20 years ago [16, 17, 18, 19]. A schematic experimental setup for CVD growth is depicted in [Fig 4]. The growth process involves heating a catalyst material to high temperatures in a tube furnace and thereafter flow a hydrocarbon gas through the tube reactor for a period of time. Materials grown over the catalyst are collected upon cooling the system to room temperature. The key parameters in nanotube CVD growth are the hydrocarbons, catalysts and growth temperature. The active catalytic species are typically transition-metal nanoparticles formed on a support material such as silicon. The general nanotube growth mechanism [Fig 5] in a CVD process involves the dissociation of hydrocarbon molecules catalyzed by the transition metal, and dissolution and saturation of carbon atoms in the metal nanoparticle. The precipitation of carbon from the saturated metal particle leads to the formation of tubular carbon solids in sp2 structure. Tubule formation is favored over other forms of carbon such as graphitic sheets with open edges. This is because a tube contains no dangling bonds and therefore is in a low energy form. For MWNT growth, most of the CVD methods employ ethylene or acetylene as the carbon feedstock and the growth temperature is typically in the range of 550–750C. Iron, nickel or cobalt nanoparticles are often used as catalyst. The rationale for choosing these metals as 6 catalyst for CVD growth of nanotubes lies in the phase diagrams[Fig 6] for the metals and carbon. At high temperatures, carbon has finite solubility in these metals, which leads to the formation of metal-carbon solutions and therefore mentioned growth mechanism. Noticeably, iron, cobalt and nickel are also the favored catalytic metals used in laser ablation and arc- Figure 4: Schematic of CVD process [4] discharge. A major pitfall for CVD grown MWNTs has been the high defect densities in their structures. The defective nature of CVD grown MWNTs remains to be thoroughly understood, but is most likely be due to the relatively low growth temperature, which does not provide sufficient thermal energy to anneal nanotubes into perfectly crystalline structures. Growing perfect MWNTs by CVD remains a challenge to this day. Figure 5: Growth process of CNT from nucleating spot [5] Figure 6: Graph of wetting of Fe by carbon atom [6] 7 Single-Walled Nanotube Growth and Optimization For a long time, arc-discharge and laser-ablation have been the principal methods for obtaining nearly perfect single-walled nanotube materials. There are several issues concerning these approaches. First, both methods rely on evaporating carbon atoms from solid carbon sources at ≥ 3000C, which is not efficient and limits the scale-up of SWNTs. Secondly, the nanotubes synthesized by the evaporation methods are in tangled forms that are difficult to purify, manipulate and assemble for building addressable nanotube structures. Recently, growth of single-walled carbon nanotubes with structural perfection was enabled by CVD methods. For an example, it has been found that by using methane as carbon feedstock, reaction temperatures in the range of 850–1000C, suitable catalyst materials and flow conditions one can grow high quality SWNT materials by a simple CVD process [20, 21, 22]. High temperature is necessary to form SWNTs that have small diameters and thus high strain energies, and allow for nearly-defect free crystalline nanotube structures. Among all hydrocarbon molecules; methane is the most stable at high temperatures against self-decomposition. Therefore, catalytic decomposition of methane by the transition-metal catalyst particles can be the dominant process in SWNT growth. The choice of carbon feedstock is thus one of the key elements to the growth of high quality SWNTs containing no defects and amorphous carbon over-coating. Another CVD approach to SWNTs was reported by Smalley and coworkers who used ethylene as carbon feedstock and growth temperature around 800oC [24]. In this case, low partialpressure ethylene was employed in order to reduce amorphous carbon formation due to self-pyrolysis/dissociation of ethylene at the high growth temperature. Gaining an understanding of the chemistry involved in the catalyst and nanotube growth process is critical to enable materials scale-up by CVD [22] .The choice of many of the parameters in CVD requires to be rationalized in order to optimize the materials growth. Within the methane CVD approach for SWNT growth, we have found that the chemical and textural properties of the catalyst materials dictate the yield and quality of SWNTs. This understanding has allowed optimization of the catalyst material and thus the synthesis of bulk quantities of high yield and quality SWNTs [22] . Evident from the TEM image[Fig 7,8] is that the nanotubes are free of amorphous carbon coating throughout their lengths Figure 7 [7] Figure 8: Image of CNT generated by CVD process [8] 8 Directed Growth of Single-Walled Nanotubes Ordered, single-walled nanotube structures can be directly grown by methane CVD on catalytically patterned substrates. A method has been devised to grow suspended SWNT networks with directionality on substrates containing lithographically patterned silicon pillars [25]. Contact printing is used to transfer catalyst materials onto the tops of pillars selectively [Fig 9]. CVD of methane using the substrates leads to suspended SWNTs forming nearly ordered networks with the nanotube orientations directed by the pattern of the pillars [Fig 10] Figure 9: Structured pattern of SiO2 on Si wafer[9] Figure 10: Directed growth of CNT on Pegs[10] Conclusions I have presented an overview of various growth methods for multi-walled and singlewalled carbon nanotubes. It is shown that chemical vapor deposition approaches are highly promising for producing large quantities of high quality nanotube materials at large scales. It can be envisioned that in a foreseeable future, controlled growth will yield nanotube architectures used as key components in next generations of electronic, chemical, mechanical and electromechanical devices. It is fair to say that progress in nanotube research has been built upon the successes in materials synthesis. This trend shall continue. 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Dai, Adv. Mater. 12, 890 (2000) Figure References : All figures have been obtained from the book: Carbon nanotubes synthesis. Structure ,properties and applications. M.S. Dresselhaus, G.Dresselhaus and Ph. Avorius .eds. Springer. New York.2001 10