LABORATOIRE de CHIMIE PHYSIQUE – MA TIÈRE et RAYONNEMENT
UNITÉ MIXTE de RECHERCHE UPMC – CNRS (UMR 7614)
11 rue PIERRE ET MARIE CURIE, F-75231 P ARIS CEDEX 05, FRANCE
philippe.jonnard@upmc.fr Tel: +33 (0)1 44 27 63 03 Fax: +33 (0) 144 27 62 26 http://www .lcpmr.upmc.fr/themes-A2.php
Séminaire du LCPMR
Interface engineering methods for multilayer
optics in the EUV, soft X-ray and X-ray ranges
Prof. Jingtao ZHU
Key Laboratory of Advanced Micro-structured Materials of Ministry of Education, School of
Physics Science and Engineering, Tongji University, Shanghai 200092, China
E-mail: jtzhu@tongji.edu.cn
Multilayer mirrors are widely used as reflective and monochromatic elements in the
extreme ultraviolet (EUV), soft X-ray and X-ray spectral ranges. Multilayers consist in
optical interference nanometer scale coatings obtained by depositing different materials
alternatively. They require smooth and sharp interface. However, inter-diffusion and
roughness at interfaces significantly depress the reflectivity of multilayer mirrors.
Interface engineering methods are developed to improve the interfaces and their
thermal stability. This talk will introduce the insertion of barrier layer, the co-deposition
and nitrogen reactive sputtering as interface engineering methods.
Mardi 24 juin 2014 à 15h30
Amphithéâtre Jean Perrin
Laboratoire de Chimie Physique – Matière et Rayonnement
ATTENTION : horaire inhabituel, 15h30