SEMI Publication Improvement Proposal Form
Submitted By: Mark Ripkowski
Company: CONSCI
Address:
Date:__11/02/2015_____________________________
Document Number: _R5671C____________________
Document Title:
Revision to SEMI C3.12-1109, Specification for
Ammonia (NH3) in Cylinders, 99.998% Quality
Telephone:
Email: _mark@conscicorp.com___________________
Details
Location of Change:
Page(s) 4,6___________
 Section(s) 8.3, 8.3.3.2, 8.3.3.3
 Figure(s)
 Table(s)
 Note(s)
 Other _____________
Are you a Standards Program
Member?
Yes Χ No 
Proposed Change and Reasons
From:
8.3 Water — The method for the determination of water in ammonia is based
on its decomposition by the reaction 2NH3 → N2 + 3H2, which occurs
completely and irreversibly when ammonia is passed over a nickel catalyst at
1000°C. Water passes through the catalyst unchanged. Therefore, the water
content of ammonia may be determined by measuring the dew point of the
stream of hydrogen and nitrogen produced by decomposition of ammonia.
8.3.3.2 Subtract twice the concentration of oxygen (as measured by the method
specified in ¶ 8.3) in the sample from the concentration of water calculated in
¶ 8.3.3.1. This is necessary because oxygen in the ammonia reacts with the
hydrogen formed by decomposition to produce additional water
8.3.3.2 FTIR (Foutier Transform Infrared) or Cavity Ring Down
Spectrometer configured to meet the specification may be used.
To:
8.3 Water — The method for the determination of water in ammonia is based
on its decomposition by the reaction 2NH3 → N2 + 3H2, which occurs
completely and irreversibly when ammonia is passed over a nickel catalyst at
1000°C. Water passes through the catalyst unchanged. Therefore, the water
content of ammonia may be determined by measuring the dew point of the
stream of hydrogen and nitrogen produced by decomposition of ammonia.
FTIR (Fourier Transform Infrared) or Cavity Ring Down Spectrometer
configured to meet the specification may be used.
8.3.3.2 Subtract twice the concentration of oxygen (as measured by the method
specified in ¶ 8.13) in the sample from the concentration of water calculated in
¶ 8.3.3.1. This is necessary because oxygen in the ammonia reacts with the
hydrogen formed by decomposition to produce additional water
8.3.3.3 FTIR (Foutier Transform Infrared) or Cavity Ring Down Spectrometer
configured to meet the specification may be used.
Justification:
Editorial in nature. The oxygen concentration is determined in Section 8.1. Paragraph
8.3 consists, in its entirety, of “Water – The method… decomposition of ammonia”.
In the structure in the ballot, this paragraph allows using the alternative methods for
reporting, but not for measurement. It seems unlikely this was the intent.
*Corrections to obvious formatting or typographical errors (e.g., misspellings) can be fixed as editorial changes by Publication
Improvement Proposal (PIP) form submission. Changes that do not qualify as editorial (refer to the SEMI Standards Procedure
Guide) will need to follow normal Letter Ballot procedures.
Approved by:
Standards Staff
Laura Nguyen
Date: 11/03/2015
Committee Chair Mohamed Saleem
Date: 11/03/2015
Committee Chair Steve Lewis
Date: 11/03/2015
Please return this form to SEMI, Standards Publications, 3081 Zanker Road, San Jose, CA 95134;
standardspublishing@semi.org
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