Syllabus for EEL 4930 / 5934 – Resonant MEMS
1. Catalog Description
Fundamentals of resonant micro-electro-mechanical systems (resonant MEMS) and
their applications. Credits: 3.
2. Pre-requisites
Differential and integral calculus; introductory signals and systems; introductory
circuit theory; statics and dynamics.
3. Course Objectives
Learn the basics of MEMS resonant devices: their principles of operation, theoretical
limits of performance and applications. Introduce resonator-based frequency
references, physical sensors and signal processors. Design micro-resonators to meet
desired needs and specifications.
4. Contribution of course to meeting ABET professional component
N/A
5. Relationship of course to ABET program outcomes
N/A
6. Instructor: Dr. Roozbeh Tabrizian
a. Office location: Larsen 217
b. Office hours: @ Larsen 217 or larger room (if necessary)
Tue (4:00pm – 6:00pm) or by appointment
c. Telephone: 352-846-3017
d. E-mail addresses: rtabrizian@ece.ufl.edu
e. Web site: http://lss.at.ufl.edu/ (Click on “Canvas system entry” button)
7. Teaching Assistants:
N/A
8. Meeting Times
Lecture: MWF 2 (8:30am - 9:20am)
9. Class/Lab Schedule
Three 50-min. lectures per week.
10. Meeting Location
BLK 315
11. Material and Supply Fees
None
EEL 4930 / 5934 Resonant MEMS
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12. Textbooks and Software Required
a. Title: Resonant MEMS: Fundamentals, Implementation and Application
b. Editor: Oliver Brand, et. al.
c. Publication date and edition: 1st Ed., Wiley-VCH, 2015
d. ISBN number: 978-3-527-33545-9
e. COMSOL Multiphysics: Available at ECE Remote Access
f. Advanced Design System (ADS): Available at ECE Remote Access
13. Recommended Reading
Books:
V. Kaajakari, Practical MEMS, Small Gear Publishing, 2009
J. Rosenbaum, Bulk acoustic wave theory and devices, Artech House, 1988.
Primary Journals:
Applied Physics Letters (AIP)
Trans. On Ultrasonics, Ferroelectrics and Frequency Control (IEEE/UFFC)
J. Microelectromechanical Systems (IEEE/ASME)
Trans. On Electron Devices (IEEE/EDS)
Sensors and Actuators (Elsevier)
Major Conferences:
Transducers ‘XX, Int. Conf. on Solid-State Sensors and Actuators, oddnumbered years since 1983, proceedings available from IEEE (US
meetings), Elsevier (European meetings), IEE Japan (Japanese meetings).
IEEE MEMS ‘XX, annual since 1989, proceedings available from IEEE.
IEEE IFCS ‘XX, annual since 1946, proceedings available from IEEE.
IEEE Sensors ‘XX, annual since 2002, proceedings available from IEEE.
Hilton Head ‘XX, Solid-State Sensors and Actuators Workshop, Hilton
Head, SC, even-numbered years since 1984, proceedings available from
Transducer Research Foundation.
Eurosensors ‘XX, annual since 1987, proceedings published in special
issues of Sensors and Actuators.
Informative Websites:
www.kaajakari.net/~ville/research/tutorials/tutorials.shtml (MEMS tutorials)
www.memsjournal.com Premiere online journal of MEMS-related news
www.memsnet.org General MEMS and Nanotechnology Information
14. Course Outline (These may be adjusted as the course proceeds.)
Week
Topic
1
Course overview, Intro to resonant MEMS devices,
Damped oscillation of microstructures
Integrated transducers and electromechanical coupling
efficiency, Lumped element modeling
2
EEL 4930 / 5934 Resonant MEMS
Prepared by R. Tabrizian
Due Dates
(estimated)
HW1
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3
4
5
6
7
8
9
10
11
12
13
14
15
Performance sensitivity of MEMS resonators to
ambient variables: Temperature, Pressure, Viscosity
Compensation and tuning of MEMS resonators
Dissipation mechanisms and quality factor
Finite element modeling of MEMS resonators
Resonant MEMS in timing & frequency references
Resonant MEMS for physical sensing: Environmental
sensors, Gravimetric sensors
Resonant MEMS for signal processing: Electrically
and mechanically coupled VHF filters
Resonant MEMS for signal processing: Acoustically
coupled UHF filters, Resonant RF switches
Power handling and non-linearity in MEMS resonators
Acoustic phonons and dispersion curves
Phonon traps and evanescent waves
Multi-mode phonon traps
Combinatorial phononic sensors
HW2
HW3
HW4
HW5
HW5
HW7
HW8
15. Attendance and Expectations
Students are expected to attend class lectures and arrive on time. Please turn off cellphones, pagers, and other electronic devices.
16. Grading
a. Homework: 30% (Approximately 8 assignments)
b. Midterm: 20% (Feb 24th, 2016 – open book / notes)
c. Project: 25% (Groups of 2 students)
d. Final exam: 25% (TBA – open book / notes)
17. Grading Scale
Numeric
Cutoff
90
87
83
80
77
73
70
67
63
60
57
<57
Letter
Grade
A
AB+
B
BC+
C
CD+
D
DE
Grade
Points
4.00
3.67
3.33
3.00
2.67
2.33
2.00
1.67
1.33
1.00
0.67
0.0
18. Make-up Exam Policy
EEL 4930 / 5934 Resonant MEMS
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Homeworks: DUE AT BEGINNING OF CLASS PERIOD
-10% if turned in after lecture begins
-20% if turned in after lecture ends (up to one business day late)
Exams:
No make-up unless prior written documentation from Dean of
Students, Physician, or Judge.
19. Honesty
UF students are bound by The Honor Pledge which states, “We, the members of the
University of Florida community, pledge to hold ourselves and our peers to the highest
standards of honor and integrity by abiding by the Honor Code.” On all work submitted
for credit by students at the University of Florida, the following pledge is either
required or implied: “On my honor, I have neither given nor received unauthorized aid
in
doing
this
assignment.”
The
Honor
Code
(http://www.dso.ufl.edu/sccr/process/student-conduct-honor- code/) specifies a
number of behaviors that are in violation of this code and the possible sanctions.
Furthermore, you are obligated to report any condition that facilitates academic
misconduct to appropriate personnel. If you have any questions or concerns, please
consult with the instructor or TAs in this class.
***CHEATING, COPYING, or PLAGERISM will result in a ZERO ON THE
ASSIGNMENT, and DISCIPLINARY ACTION WILL BE PURSUED (see
https://www.dso.ufl.edu/sccr)
20. Course Evaluations
Students are expected to provide feedback on the quality of instruction in this course
by completing online evaluations at https://evaluations.ufl.edu. Evaluations are
typically open during the last two or three weeks of the semester, but students will be
given specific times when they are open. Summary results of these assessments are
available to students at https://evaluations.ufl.edu/results/.
21. Accommodations
Students with disabilities requesting accommodations should first register with the
Disability Resource Center (352-392-8565, www.dso.ufl.edu/drc/) by providing
appropriate documentation. Once registered, students will receive an accommodation
letter, which must be presented to the instructor when requesting accommodation.
Students with disabilities should follow this procedure as early as possible in the
semester.
22. UF Counseling Services
Resources are available on-campus for students having personal problems or lacking
clear career and academic goals. The resources include:
- University Counseling and Wellness Center, 3190 Radio Road, 392-1575, Personal
and Career Counseling.
http://www.counseling.ufl.edu/cwc/Default.aspx
- Student Health Care Center, 392-1171, Personal and Counseling.
http://shcc.ufl.edu/
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- Career Resource Center, Reitz Union, 392-1601, career development assistance and
counseling.
23. Software Use
All faculty, staff and student of the University are required and expected to obey the
laws and legal agreements governing software use. Failure to do so can lead to
monetary damages and/or criminal penalties for the individual violator. Because such
violations are also against University policies and rules, disciplinary action will be
taken as appropriate. We, the members of the University of Florida community, pledge
to uphold ourselves and our peers to the highest standards of honesty and integrity.
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